Cross-linked electrically conductive polymers, precursors thereof
    11.
    发明授权
    Cross-linked electrically conductive polymers, precursors thereof 失效
    交联导电聚合物及其前体

    公开(公告)号:US06193909B1

    公开(公告)日:2001-02-27

    申请号:US08595853

    申请日:1996-02-02

    IPC分类号: H01B112

    CPC分类号: C08G73/1071 H01B1/128

    摘要: Cross-linked electrically conductive polymers, in particular electrically conductive, polyaniline are described. Dopants and substituents having pendant cross-linkable functionality are used which form a cross-linked conducting polymer network. The cross-linking functionality can be hydrogen-bonding as well as chemically polymerizable or cross-linkable. A conjugated path between chains can also be incorporated. The resulting cross-linked conducting polymers have enhanced thermal and environmental stability. The dopant cannot readily be washed out with solvents or diffuse out upon exposure to heat. In addition, the cross-linked polymers have enhanced electrical conductivity.

    摘要翻译: 描述了交联的导电聚合物,特别是导电的聚苯胺。 使用具有侧链可交联官能团的掺杂剂和取代基,其形成交联的导电聚合物网络。 交联官能团可以是氢键合以及化学上可聚合的或可交联的。 还可以并入链之间的共轭路径。 所得的交联导电聚合物具有增强的热和环境稳定性。 掺杂剂不容易用溶剂洗涤或在暴露于热量时扩散出来。 此外,交联聚合物具有增强的导电性。

    Structure and manufacture of X-ray mask pellicle with washer-shaped member
    12.
    发明授权
    Structure and manufacture of X-ray mask pellicle with washer-shaped member 失效
    具有垫圈构件的X射线掩模防护薄膜的结构和制造

    公开(公告)号:US06180292B2

    公开(公告)日:2001-01-30

    申请号:US09335536

    申请日:1999-06-18

    IPC分类号: G03F900

    摘要: A precise thickness bulk etchable wafer material, that is responsive to protection with an oxide that inhibits insertion of an etch responsiveness altering material, is assembled with a membrane material that is susceptible to deposition processes. A bulk etch then removes most of the wafer. The arrangement permits the strength and rigidity of the bulk spacer to serve to permit the finely controllable deposition processes for ultra thin and wider ranges of membrane materials, the selective protection for spacer shaping and finally, the removal by the low stress process of etching, of the unused bulk spacer material. An oxide layer is patterned on a bulk spacer material wafer that has a thickness of the gap between an X-ray mask and the to be patterned oxide. The oxide on the bulk spacer material prevents conversion, through the exposed surface of the bulk spacer material wafer, of a portion of the wafer that is to serve as the spacer to a different etch responsiveness from that of the bulk spacer material. The exposed bulk spacer material wafer is converted to a depth that will serve as the spacer and to protect the edges. The oxide is then removed. The membrane is deposited over the full surface of the bulk spacer material. The bulk wafer is removed down to the converted portion using the imparted different etch responsivness.

    摘要翻译: 使用易于沉积工艺的膜材料组装精确厚度的可块状可蚀刻晶片材料,该晶片材料响应于防止蚀刻反应性改变材料插入的氧化物的保护。 体蚀刻然后去除大部分晶片。 该布置允许散装隔板的强度和刚度用于允许对薄膜材料的超薄和更宽范围的精细可控的沉积工艺,用于间隔件成形的选择性保护以及最终通过蚀刻的低应力过程的去除 未使用的散装隔板材料。 将氧化物层图案化在具有X射线掩模和待图案化氧化物之间的间隙厚度的块状间隔物材料晶片上。 块状隔离物材料上的氧化物防止了通过体隔片材料晶片的暴露表面将用作间隔物的晶片的一部分与块状间隔物材料的不同的蚀刻响应性的转换。 将暴露的块状间隔材料晶片转换成将用作间隔物并保护边缘的深度。 然后除去氧化物。 膜沉积在整块隔板材料的整个表面上。 使用赋予的不同蚀刻响应将体晶片除去到转化部分。

    Methods of fabrication of deaggregated electrically conductive polymers
and precursors thereof
    14.
    发明授权
    Methods of fabrication of deaggregated electrically conductive polymers and precursors thereof 失效
    解聚集的导电聚合物及其前体的制备方法

    公开(公告)号:US6087472A

    公开(公告)日:2000-07-11

    申请号:US370128

    申请日:1995-01-09

    CPC分类号: H01B1/128 C08G2261/312

    摘要: Deaggregated substituted and unsubstitued polyparaphenylenes, polyparaphenylevevinyles, polyanilines, polyazines, polythiophenes, poly-p-phenylene sulfides, polyfuranes, polypyrroles, polysclenophene, polyacetylenes formed from soluble precursors and combinations thereof and copolymers thereof and methods of fabrication are described. The deaggregated polymer molecules when subsequently doped show higher electrical conductivity. Agents such as lithium chloride, m-cresol and nonylphenol are used to deaggregate the polymer molecules. The deaggregating agents can be added prior to or during doping the molecules.

    摘要翻译: 描述了聚集的取代和未取代的聚对苯二酚,聚对苯乙烯基乙烯基,聚苯胺,聚嗪,聚噻吩,聚对苯硫醚,聚呋喃,聚吡咯,聚烯烃,由可溶性前体及其组合形成的聚乙炔及其共聚物及其制备方法。 随后掺杂时的解聚聚合物分子显示更高的导电性。 诸如氯化锂,间甲酚和壬基苯酚的试剂用于解聚聚合物分子。 解聚剂可以在掺杂分子之前或期间加入。

    Methods of fabrication of deaggregated electrically conductive polymers
and precursors thereof
    16.
    发明授权
    Methods of fabrication of deaggregated electrically conductive polymers and precursors thereof 失效
    解聚集的导电聚合物及其前体的制备方法

    公开(公告)号:US5990249A

    公开(公告)日:1999-11-23

    申请号:US919740

    申请日:1997-08-28

    IPC分类号: C08F283/00 C08G61/12

    CPC分类号: C08F283/00 C08G61/12

    摘要: Deaggregated substituted and unsubstituted polyparaphenylenes, polyparaphenylevevinyles, polyanilines, polyazines, polythiophenes, poly-p-phenylene sulfides, polyfuranes, polypyrroles, polyselenophene, polyacetylenes formed from soluble precursors and combinations thereof and copolymers thereof and methods of fabrication are described. The deaggregated polymer molecules when subsequently doped show higher electrical conductivity. Agents such as lithium chloride, m-cresol and nonylphenol are used to deaggregate the polymer molecules. The deaggregating agents can be added prior to or during doping the molecules.

    摘要翻译: 描述了聚集的取代和未取代的聚对苯二酚,聚对苯乙烯基乙烯基,聚苯胺,聚嗪,聚噻吩,聚对苯硫醚,聚呋喃,聚吡咯,聚硒酚,由可溶性前体及其组合形成的聚乙炔及其共聚物及其制备方法。 随后掺杂时的解聚聚合物分子显示更高的导电性。 诸如氯化锂,间甲酚和壬基苯酚的试剂用于解聚聚合物分子。 解聚剂可以在掺杂分子之前或期间加入。