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    SYSTEMS AND METHODS FOR TRANSFERRING SMALL LOT SIZE SUBSTRATE CARRIERS BETWEEN PROCESSING TOOLS
    15.
    发明申请
    SYSTEMS AND METHODS FOR TRANSFERRING SMALL LOT SIZE SUBSTRATE CARRIERS BETWEEN PROCESSING TOOLS 有权
    用于传送加工工具之间的小尺寸基板载体的系统和方法

    公开(公告)号：US20070059861A1

    公开(公告)日：2007-03-15

    申请号：US11555252

    申请日：2006-10-31

    申请人： Michael Rice ,  Eric Englhardt ,  Vinay Shah ,  Martin Elliott ,  Robert Lowrance ,  Jeffrey Hudgens

    发明人： Michael Rice ,  Eric Englhardt ,  Vinay Shah ,  Martin Elliott ,  Robert Lowrance ,  Jeffrey Hudgens

    IPC分类号： H01L21/00

    CPC分类号： H01L21/67727 ,  H01L21/67276 ,  H01L21/67769 ,  H01L21/67778 ,  Y02P80/40 ,  Y02P90/86

    摘要： In a first aspect, a method of managing work in progress within a small lot size semiconductor device manufacturing facility is provided. The first method includes providing a small lot size semiconductor device manufacturing facility having (1) a plurality of processing tools; and (2) a high speed transport system adapted to transport small lot size substrate carriers among the processing tools. The method further includes maintaining a predetermined work in progress level within the small lot size semiconductor device manufacturing facility by (1) increasing an average cycle time of low priority substrates within the small lot size semiconductor device manufacturing facility; and (2) decreasing an average cycle time of high priority substrates within the small lot size semiconductor device manufacturing facility so as to approximately maintain the predetermined work in progress level within the small lot size semiconductor device manufacturing facility. Numerous other aspects are provided.

    摘要翻译： 在第一方面，提供了一种在小批量半导体器件制造设施内管理正在进行的工作的方法。 第一种方法包括提供具有（1）多个处理工具的小批量半导体器件制造设备; 和（2）适于在处理工具之间运输小批量衬底载体的高速运输系统。 该方法还包括：（1）增加小批量半导体器件制造设备内的低优先级衬底的平均周期时间，使小批量半导体器件制造设备内的预定工作保持在进行中; 和（2）减小小批量半导体器件制造设备内的高优先级衬底的平均周期时间，以便在小批量半导体器件制造设备内大致维持预定工作进行中的水平。 提供了许多其他方面。

    Substrate carrier having reduced height
    16.
    发明申请
    Substrate carrier having reduced height 审中-公开
    基板载体具有降低的高度

    公开(公告)号：US20060061979A1

    公开(公告)日：2006-03-23

    申请号：US11219332

    申请日：2005-09-02

    申请人： Martin Elliott ,  Michael Rice

    发明人： Martin Elliott ,  Michael Rice

    IPC分类号： G06F19/00 ,  H05K7/04

    CPC分类号： H01L21/67353 ,  H01L21/67379

    摘要： A first substrate carrier is provided that includes a body adapted to store one or more substrates; and either (1) a bottom surface having one or more coupling features that extend into a storage region of the body or (2) coupling features that extend alongside the body, so that the substrate carrier's overall height is not increased by the entire height of the coupling feature. Numerous other aspects are provided.

    摘要翻译： 提供了第一衬底载体，其包括适于存储一个或多个衬底的主体; 和（1）具有一个或多个连接特征的底表面，其延伸到主体的存储区域中，或者（2）耦合沿着身体延伸的特征，使得基板载体的整体高度不会增加整个高度 耦合功能。 提供了许多其他方面。

    Methods and apparatus for mapping carrier contents
    17.
    发明申请
    Methods and apparatus for mapping carrier contents 有权
    用于映射运营商内容的方法和装置

    公开(公告)号：US20060051184A1

    公开(公告)日：2006-03-09

    申请号：US11220897

    申请日：2005-09-06

    申请人： Martin Elliott ,  Vinay Shah

    发明人： Martin Elliott ,  Vinay Shah

    IPC分类号： H01L21/677 ,  B66F17/00

    CPC分类号： H01L21/67265

    摘要： In a first aspect, a first method of mapping contents of a substrate carrier is provided. The first method includes the steps of (1) coupling a sensor to the substrate carrier or a loadport adapted to receive the substrate carrier; and (2) determining a presence or absence of a substrate in a slot of the substrate carrier using the sensor. Numerous other aspects are provided.

    摘要翻译： 在第一方面，提供了一种映射衬底载体的内容的第一种方法。 第一种方法包括以下步骤：（1）将传感器耦合到衬底载体或适于接收衬底载体的负载端口; 和（2）使用传感器确定衬底载体的槽中是否存在衬底。 提供了许多其他方面。

    Wafer loading station that automatically retracts from a moving conveyor in response to an unscheduled event
    19.
    发明申请
    Wafer loading station that automatically retracts from a moving conveyor in response to an unscheduled event 有权
    晶圆加载站，响应于非计划事件，自动从运动的输送机回缩

    公开(公告)号：US20050135903A1

    公开(公告)日：2005-06-23

    申请号：US10987452

    申请日：2004-11-12

    申请人： Michael Rice ,  Eric Englhardt ,  Robert Lowrance ,  Martin Elliott ,  Jeffrey Hudgens

    发明人： Michael Rice ,  Eric Englhardt ,  Robert Lowrance ,  Martin Elliott ,  Jeffrey Hudgens

    IPC分类号： H01L21/677 ,  B65G1/00

    CPC分类号： H01L21/67769 ,  H01L21/67775 ,  H01L21/67778 ,  Y10S414/135 ,  Y10S414/136

    摘要： In a first aspect, a wafer loading station adapted to exchange wafer carriers with a wafer carrier transport system comprises a biasing element adapted to urge the end effector of the wafer loading station away from a moveable conveyor of the wafer carrier transport system upon the occurrence of a unscheduled event such as a power failure or an emergency shutdown. In a second aspect, an uninterruptible power supply commands a controller to cause the wafer carrier handler to retract the end effector from the wafer carrier transport system upon the occurrence of the unscheduled event, and provides the power necessary for the same. Numerous other aspects are provided.

    摘要翻译： 在第一方面，一种适于与晶片载体传输系统交换晶片载体的晶片装载站包括偏置元件，该偏置元件适于在晶片载体传输系统发生时将晶片载体站的末端执行器远离晶片载体传输系统的可移动传送器 一个非计划的事件，如停电或紧急停机。 在第二方面，不间断电源命令控制器使晶片载体处理器在发生非预定事件时从晶片载体传输系统缩回端部执行器，并提供其所需的功率。 提供了许多其他方面。

    Break-away positioning conveyor mount for accommodating conveyor belt bends
    20.
    发明申请
    Break-away positioning conveyor mount for accommodating conveyor belt bends 有权
    分离定位输送机支架，用于容纳输送带弯头

    公开(公告)号：US20050121293A1

    公开(公告)日：2005-06-09

    申请号：US10987955

    申请日：2004-11-12

    申请人： Michael Rice ,  Eric Englhardt ,  Robert Lowrance ,  Martin Elliott ,  Jeffrey Hudgens

    发明人： Michael Rice ,  Eric Englhardt ,  Robert Lowrance ,  Martin Elliott ,  Jeffrey Hudgens

    IPC分类号： B65G15/30 ,  B65G49/05 ,  H01L21/00 ,  H01L21/677 ,  H01L21/68 ,  H01L21/687 ,  B65G47/24

    CPC分类号： H01L21/68707 ,  H01L21/6773 ,  H01L21/67733

    摘要： A break-away mounting system for a continuous-motion, high-speed position conveyor system is disclosed. A support cradle may be suspended from a conveyor belt such that the support cradle maintains a fixed position and orientation relative to at least one point on the conveyor belt without inducing appreciable stress on the conveyor belt, the support cradle, or the coupling between the conveyor belt and the support cradle. The mount may include a leading rotatable bearing attached to the support cradle which may releasably engage a first key attached to the conveyor belt, the rotatable bearing adapted to accommodate rotational forces applied to the support cradle by the conveyor belt. The mount may also include a slide bearing attached to the support cradle which may releasably engage a second key attached to the conveyor belt, the slide bearing adapted to accommodate longitudinal forces applied to the support cradle by the conveyor belt.

    摘要翻译： 公开了一种用于连续运动的高速位置传送器系统的分离安装系统。 支撑托架可以从传送带悬挂，使得支撑托架相对于传送带上的至少一个点保持固定的位置和方向，而不会在传送带，支撑架或传送带之间的联接中引起明显的应力 皮带和支撑架。 安装件可以包括附接到支撑架的前导可旋转轴承，其可释放地接合附接到传送带的第一键，该旋转轴承适于容纳由传送带施加到支撑支架的旋转力。 安装件还可以包括附接到支撑支架的滑动轴承，其可以可释放地接合附接到传送带的第二键，滑动轴承适于容纳由传送带施加到支撑支架的纵向力。