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公开(公告)号：US5269847A
公开(公告)日：1993-12-14
申请号：US879545
申请日：1992-05-04
IPC分类号： C23C16/455 , H01L21/00
CPC分类号： C23C16/455 , Y10S438/935
摘要： A wafer processing reactor having an input manifold to enable control of a process gas flow profile over a wafer that is being processed. Both process gas relative concentrations and flow rates can be controlled, thereby enabling an increased uniformity of processing across the wafer.
摘要翻译： 具有输入歧管的晶片处理反应器，以使得能够控制正被处理的晶片上的工艺气流分布。 可以控制工艺气体的相对浓度和流速，从而能够提高跨晶片的加工均匀性。
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12.发明授权Apparatus and method for substrate heating utilizing various infrared means to achieve uniform intensity 失效用于加强各种红外波段的基板加热装置和方法，以达到均匀强度
公开(公告)号：US5179677A
公开(公告)日：1993-01-12
申请号：US651668
申请日：1991-02-06
IPC分类号： H01L21/205 , C23C16/48 , H01L21/00 , H01L21/22 , H01L21/31
CPC分类号： H01L21/67115 , C23C16/481
摘要： A reflector array employs a number of linear, tubular heater lamps arranged in a circle concentric with the substrate to be heated. Some of the lamps have focusing reflectors and the remainder have dispersive reflectors. A peripheral cylindrical reflector surrounds the lamps and their associated reflectors. The combined reflectors permit balancing the thermal radiation intensity across the surface of the substrate.
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13.发明授权Exploring for subsurface hydrocarbons by sea floor temperature gradients preferably using a multiplexed thermistor probe 失效通过海底温度梯度探索地下碳氢化合物，优选使用多路复用的热敏电阻探头
公开(公告)号：US4676664A
公开(公告)日：1987-06-30
申请号：US514303
申请日：1983-07-15
CPC分类号： E21B47/065 , G01K1/026 , G01K13/10 , G01V9/005
摘要： Disclosed are a method and a system for measuring the sea floor temperature gradient several meters into the formation at each of an array of measurement sites, and using these gradients to explore for and characterize hydrocarbon deposits. The measurements can be taken with a special lance driven into the otherwise undisturbed sea floor.
摘要翻译： 公开了一种用于测量在每个测量点阵列处的地层中几米的海底温度梯度的方法和系统，并且使用这些梯度来探索和表征烃沉积物。 测量可以用特殊的喷枪驱动到另外没有受到干扰的海底。
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公开(公告)号：US09395707B2
公开(公告)日：2016-07-19
申请号：US13214057
申请日：2011-08-19
CPC分类号： G06Q10/06315 , G05B13/0265 , G05B15/02 , G05B23/0283 , G06F17/5009 , G06Q10/04 , G06Q10/06375 , G06Q50/06 , H02J2003/007 , Y04S10/54
摘要： The disclosed subject matter provides systems and methods for allocating resources within an infrastructure, such as an electrical grid, in response to changes to inputs and output demands on the infrastructure, such as energy sources and sinks. A disclosed system includes one or more processors, each having respective communication interfaces to receive data from the infrastructure, the data including infrastructure network data, one or more software applications, operatively coupled to and at least partially controlling the one or more processors, to process and characterize the infrastructure network data; and a display, coupled to the one or more processors, for visually presenting a depiction of at least a portion of the infrastructure including any changes in condition thereof, and one or more controllers in communication with the one or more processors, to manage processing of the resource, wherein the resource is obtained and/or distributed based on the characterization of the real time infrastructure data.
摘要翻译： 所公开的主题提供了用于在诸如电网之类的基础设施（例如电网）内分配资源的系统和方法，以响应对基础设施（例如能量源和汇）的输入和输出需求的改变。 所公开的系统包括一个或多个处理器，每个处理器具有各自的通信接口以从基础设施接收数据，数据包括基础设施网络数据，一个或多个软件应用，可操作地耦合到并且至少部分地控制一个或多个处理器，以处理 并表征基础设施网络数据; 以及耦合到所述一个或多个处理器的显示器，用于可视地呈现所述基础设施的至少一部分的描绘，包括其条件的任何改变，以及与所述一个或多个处理器通信的一个或多个控制器，以管理 资源，其中基于实时基础设施数据的表征来获得和/或分发资源。
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公开(公告)号：US20130138482A1
公开(公告)日：2013-05-30
申请号：US13479198
申请日：2012-05-23
申请人： Roger N. Anderson , Maggie Chow , Albert Boulanger
发明人： Roger N. Anderson , Maggie Chow , Albert Boulanger
IPC分类号： G06Q10/06
CPC分类号： G06Q10/06375 , G06Q40/06
摘要： A capital asset planning system for selecting assets for improvement within an infrastructure that includes one or more data sources descriptive of the infrastructure, one or more databases, coupled to the one or more data sources, to compile the one or more data sources, one or more processors, each coupled to and having respective communication interfaces to receive data from the one or more databases. The processor includes a predictor to generate a first metric of estimated infrastructure effectiveness based, at least in part, on a current status of the infrastructure, a second metric of estimated infrastructure effectiveness based, at least in part, on a user-selected, proposed changed configuration of the infrastructure, and a net metric of infrastructure effectiveness based, at least in part, on said first metric and said second metric. The system also includes a display, coupled to have the one or more processors, for visually presenting the net metric of infrastructure effectiveness, in which the assets for improvement are selected based, at least in part, on the net metric of infrastructure effectiveness.
摘要翻译： 一种资本资产规划系统，用于在基础设施内选择资产以进行改进，所述基础设施包括描述基础设施的一个或多个数据源，耦合到所述一个或多个数据源的一个或多个数据库，以编译所述一个或多个数据源，一个或多个数据源， 更多的处理器，每个处理器耦合到并具有各自的通信接口以从一个或多个数据库接收数据。 所述处理器包括预测器，用于至少部分地基于所述基础设施的当前状态来生成估计的基础设施有效性的第一度量，所述预测器至少部分地基于用户选择的，提出的 改变了基础设施的配置，以及至少部分地基于所述第一度量和所述第二度量的基础设施有效性的净度。 该系统还包括耦合以具有一个或多个处理器的显示器，用于可视地呈现基础设施有效性的净度量度，其中至少部分地基于基础设施有效性的净度度量来选择用于改进的资产。
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16.发明授权Polymeric coating of substrate processing system components for contamination control 有权用于污染控制的基底处理系统部件的聚合物涂层公开(公告)号：US08337619B2
公开(公告)日：2012-12-25
申请号：US12234038
申请日：2008-09-19
IPC分类号： C23C16/00 , C23C16/50 , C23F1/00 , H01L21/306
CPC分类号： C23C30/00 , B05D5/083 , B05D7/14 , B05D2350/65 , C23C2/26 , C23C26/00 , C23C28/00 , Y10T428/239 , Y10T428/263 , Y10T428/264 , Y10T428/265 , Y10T428/3154
摘要： A method of treating a metal surface of a portion of a substrate processing system to lower a defect concentration near a processed surface of a substrate includes forming a protective coating on the metal surface, wherein the protective coating includes nickel (Ni) and a fluoropolymer. Forming the protective coating on the metal surface can further include forming a nickel layer on the metal surface, impregnating the nickel layer with a fluoropolymer, and removing fluoropolymer from the surface leaving a predominantly nickel surface so the fluoropolymer is predominantly subsurface. A substrate processing system includes a process chamber into which a reactant gas is introduced, a pumping system for removing material from the process chamber, a first component with a protective coating, wherein the protective coating forms a surface of the component which is exposed to an interior of the substrate processing chamber or an interior of the pumping system. The protective coating includes nickel (Ni) and a flouropolymer.
摘要翻译： 处理基板处理系统的一部分的金属表面以降低基板的加工表面附近的缺陷浓度的方法包括在金属表面上形成保护涂层，其中保护涂层包括镍（Ni）和含氟聚合物。 在金属表面上形成保护涂层还可以包括在金属表面上形成镍层，用含氟聚合物浸渍镍层，以及从表面除去含氟聚合物，留下主要的镍表面，因此含氟聚合物主要是在下表面。 基板处理系统包括其中引入反应气体的处理室，用于从处理室中去除材料的泵送系统，具有保护涂层的第一部件，其中所述保护涂层形成暴露于所述部件的表面 衬底处理室的内部或泵送系统的内部。 保护涂层包括镍（Ni）和氟聚合物。
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17.发明授权Film formation apparatus and methods including temperature and emissivity/pattern compensation 有权成膜装置及方法，包括温度和发射率/图案补偿公开(公告)号：US07691204B2
公开(公告)日：2010-04-06
申请号：US11242298
申请日：2005-09-30
申请人： Juan Chacin , Aaron Hunter , Craig Metzner , Roger N. Anderson
发明人： Juan Chacin , Aaron Hunter , Craig Metzner , Roger N. Anderson
IPC分类号： C23C16/00 , C23C16/46 , C23C16/52 , H01L21/306
CPC分类号： C23C16/481 , C23C16/52
摘要： A film formation system 10 has a processing chamber 15 bounded by sidewalls 18 and a top cover 11. In one embodiment, the top cover 11 has a reflective surface 13 for reflecting radiant energy back onto a substrate 19, pyrometers 405 for measuring the temperature of the substrate 19 across a number of zones, and at least one emissometer 410 for measuring the actual emissivity of the substrate 19. In another embodiment, a radiant heating system 313 is disposed under the substrate support 16. The temperature of the substrate 19 is obtained from pyrometric data from the pyrometers 405, and the emissometer 410.
摘要翻译： 成膜系统10具有由侧壁18和顶盖11限定的处理室15.在一个实施例中，顶盖11具有用于将辐射能量反射回到基板19上的反射表面13，用于测量温度 穿过多个区域的基板19和用于测量基板19的实际发射率的至少一个辐射计410.在另一实施例中，辐射加热系统313设置在基板支撑件16下方。获得基板19的温度 来自高温计405的高温测量数据和发射计410。
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公开(公告)号：US20080270329A1
公开(公告)日：2008-10-30
申请号：US12045458
申请日：2008-03-10
IPC分类号： G06F15/18
CPC分类号： G06N99/005 , G06K9/6256
摘要： Boosting algorithms are provided for accelerated machine learning in the presence of misclassification noise. In an exemplary embodiment, a machine learning method having multiple learning stages is provided. Each learning stage may include partitioning examples into bins, choosing a base classifier for each bin, and assigning an example to a bin by counting the number of positive predictions previously made by the base classifier associated with the bin.
摘要翻译： 提供增强算法用于在存在错误分类噪声的情况下加速机器学习。 在一个示例性实施例中，提供了具有多个学习阶段的机器学习方法。 每个学习阶段可以包括将示例分割成分区，为每个分组选择一个基本分类器，并且通过对与该分组相关联的基本分类器先前做出的肯定预测的数量进行计数，将一个示例分配给一个分组。
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19.发明授权公开(公告)号：US07395252B2
公开(公告)日：2008-07-01
申请号：US11349711
申请日：2006-02-08
CPC分类号： G06Q10/04 , G06N5/022 , G06N99/005 , G06Q10/10
摘要： An Innervated Stochastic Controller optimizes business decision-making under uncertainty through time. The Innervated Stochastic Controller uses a unified reinforcement learning algorithm to treat multiple interconnected operational levels of a business process in a unified manner. The Innervated Stochastic Controller generates actions that are optimized with respect to both financial profitability and engineering efficiency at all levels of the business process. The Innervated Stochastic Controller can be configured to evaluate real options. In one embodiment of the invention, the Innervated Stochastic Controller is configured to generate actions that are martingales. In another embodiment of the invention, the Innervated Stochastic Controller is configured as a computer-based learning system for training power grid operators to respond to grid exigencies.
摘要翻译： 内在随机控制器通过时间优化不确定性下的业务决策。 内在随机控制器采用统一的强化学习算法，统一处理业务流程的多个互联操作级别。 内在随机控制器产生针对业务流程各个层面的财务盈利能力和工程效率优化的行动。 内置随机控制器可以配置为评估实际选项。 在本发明的一个实施例中，内在随机控制器被配置为产生mart的动作。 在本发明的另一个实施例中，内置随机控制器被配置为用于训练电网运营商以响应网格紧急情况的基于计算机的学习系统。
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公开(公告)号：US06833322B2
公开(公告)日：2004-12-21
申请号：US10273830
申请日：2002-10-17
IPC分类号： H01L2144
CPC分类号： C23C16/4408 , C23C16/402 , C23C16/4585 , C23C16/481 , C23C16/52 , C23C16/54 , H01L21/02164 , H01L21/02211 , H01L21/02271 , H01L21/31612 , H01L21/76254
摘要： Methods and apparatuses for forming an oxide film. The method includes depositing an oxide film on a substrate using a process gas mixture that comprises a silicon source gas, an oxygen gas, and a hydrogen gas, and a process temperature between 800° C. and 1300° C. During the deposition of the oxide film, the process gas mixture comprises less than 6% oxygen, silicon gas, and predominantly hydrogen.
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