Complementary metal-oxide-semiconductor transistor structure for high density and high performance integrated circuits
    11.
    发明授权
    Complementary metal-oxide-semiconductor transistor structure for high density and high performance integrated circuits 有权
    用于高密度和高性能集成电路的互补金属氧化物半导体晶体管结构

    公开(公告)号:US07545008B2

    公开(公告)日:2009-06-09

    申请号:US11347164

    申请日:2006-02-03

    IPC分类号: H01L27/088

    摘要: A semiconductor device may include a substrate and an insulating layer formed on the substrate. A multi-layer fin may be formed on the insulating layer and may include two semiconducting layers isolated by an insulating layer in vertical direction. A first MOS type device comprising a first source region, a first channel region and a first drain region is arranged on the first semiconducting layer in the multi-layer fin. A second MOS type device comprising a second source region, a second channel region and a second drain region is arranged on the second semiconducting layer in the multi-layer fin. A gate electrode is provided so as to be vertically adjacent to the first and second channel regions.

    摘要翻译: 半导体器件可以包括衬底和形成在衬底上的绝缘层。 可以在绝缘层上形成多层鳍,并且可以包括在垂直方向上被绝缘层隔离的两个半导体层。 包括第一源极区域,第一沟道区域和第一漏极区域的第一MOS型器件被布置在多层鳍片的第一半导体层上。 包括第二源极区,第二沟道区和第二漏极区的第二MOS型器件布置在多层鳍中的第二半导体层上。 栅电极设置成与第一和第二沟道区垂直相邻。