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12 条记录 (耗时 0.012 秒)

    Device comprising nanostructures and method of manufacturing thereof
    11.
    发明授权
    Device comprising nanostructures and method of manufacturing thereof 有权

    公开(公告)号：US10141261B2

    公开(公告)日：2018-11-27

    申请号：US14129373

    申请日：2012-06-29

    申请人： Waqas Khalid

    发明人： Waqas Khalid

    IPC分类号： H01L23/525 ,  H01L23/532 ,  H01J1/304 ,  H01J9/02 ,  H01L21/768

    摘要： A method for manufacturing of a device including a first substrate including a plurality of sets of nanostructures arranged on the first substrate, wherein each of the sets of nanostructures is individually electrically addressable, the method including the steps of: providing a substrate having a first face, the substrate having an insulating layer including an insulating material arranged on the first face of the substrate forming an interface between the insulating layer and the substrate; providing a plurality of stacks on the first substrate, wherein each stack includes a first conductive layer and a second conductive layer; heating the first substrate having the plurality of stacks arranged thereon in a reducing atmosphere to enable formation of nanostructures on the second conductive material; heating the first substrate having the plurality of stacks arranged thereon in an atmosphere such that nanostructures are formed on the second layer.