公开(公告)号：US20200227243A1

公开(公告)日：2020-07-16

申请号：US16833279

申请日：2020-03-27

Applicant: ASM IP Holding B.V.

Inventor： Hyeongeu Kim ,  Loren Jacobs ,  Peter Westrom

IPC: H01J37/32 ,  C23C16/46 ,  G01J5/00 ,  C23C16/52 ,  G01K15/00

Abstract: Methods for thermally calibrating reaction chambers are provided. In some embodiments, methods may include calculating a first correction factor of a first contact type temperature sensor within a first reaction chamber utilizing a first temperature sensor and applying the first correction factor to a first temperature controller to provide a first calibrated contact type temperature sensor. Embodiments may also include calculating a first calibration factor of a first non-contact type temperature sensor within the first reaction chamber utilizing the first calibrated contact type temperature sensor and applying the first calibration factor to the first non-contact type temperature sensor to provide a first calibrated non-contact type temperature sensor.