公开(公告)号：US06952255B2

公开(公告)日：2005-10-04

申请号：US10636086

申请日：2003-08-06

申请人： Andrew Perry ,  Robert Steger ,  Neil Benjamin

发明人： Andrew Perry ,  Robert Steger ,  Neil Benjamin

IPC分类号： G01C1/00 ,  H01L21/68 ,  G01B11/26

CPC分类号： G01C1/00 ,  H01J2237/30438 ,  H01L21/681

摘要： An optical alignment system for use in a semiconductor processing system is provided. The optical alignment system includes a wafer chuck that has an alignment feature integrated into the top surface of the wafer chuck. In addition, a beam-forming system, which is capable of emitting an optical signal onto the alignment feature, is disposed above the wafer chuck. Also, a detector is included that can detect an amplitude of the optical signal emitted onto the alignment feature. In one aspect, the alignment feature can be a reflective alignment feature that reflects a portion of the optical signal back to the beam detector. In additional aspect, the alignment feature can be a transmittance alignment feature capable of allowing a portion of the optical signal to pass through the wafer chuck to the detector. In this aspect, the detector can be disposed below the wafer chuck.