Hybrid Interferometric and Scatterometric Sensing Using In-Plane Sensors

    公开(公告)号:US20220316856A1

    公开(公告)日:2022-10-06

    申请号:US17219779

    申请日:2021-03-31

    Applicant: Apple Inc.

    Abstract: An optical sensor system including a semiconductor substrate; a self-mixing interferometry (SMI) sensor formed on the semiconductor substrate and including a semiconductor laser having a resonant cavity; and an array of photodetectors formed on the semiconductor substrate. The SMI sensor is configured to generate an SMI signal responsive to a retro-reflection of electromagnetic radiation emitted by the semiconductor laser and received into the resonant cavity. The array of photodetectors is configured to generate a set of angular-resolved scatter signals responsive to a scatter of the electromagnetic radiation emitted by the semiconductor laser.

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