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公开(公告)号：US09069264B2
公开(公告)日：2015-06-30
申请号：US13542319
申请日：2012-07-05
CPC分类号： G03F7/70633 , G03F1/44 , G03F7/70683
摘要： A target structure including a periodic structure is formed on a substrate. An image of the target structure is detected while illuminating the target structure with a beam of radiation, the image being formed using a first part of non-zero order diffracted radiation while excluding zero order diffracted radiation. Intensity values extracted from a region of interest within the image are used to determine a property of the periodic structure. A processing unit recognizes locations of a plurality of boundary features in the image of the target structure to identify regions of interest. The number of boundary features in each direction is at least twice a number of boundaries of periodic structures within the target structure. The accuracy of locating the region is greater than by recognizing only the boundaries of the periodic structure(s).
摘要翻译： 包括周期性结构的靶结构形成在基板上。 在用辐射束照射目标结构的同时检测目标结构的图像，该图像使用非零次衍射辐射的第一部分形成，同时排除零级衍射辐射。 使用从图像内的感兴趣区域提取的强度值来确定周期性结构的性质。 处理单元识别目标结构的图像中的多个边界特征的位置以识别感兴趣的区域。 每个方向上边界特征的数量至少是目标结构内周期性结构边界数量的两倍。 定位区域的精度大于仅识别周期性结构的边界。
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12.发明授权Method for projection of a circuit pattern, which is arranged on a mask, onto a semiconductor wafer 有权将布置在掩模上的电路图案投影到半导体晶片上的方法公开(公告)号：US07252913B2
公开(公告)日：2007-08-07
申请号：US10917426
申请日：2004-08-13
申请人： Bernd Kochan , Juergen Karl , Michael Kubis , Norbert Haase
发明人： Bernd Kochan , Juergen Karl , Michael Kubis , Norbert Haase
CPC分类号： G03F7/70991 , G03F7/705 , G03F7/70616 , G06T7/0004 , G06T2207/30148
摘要： A simulation is carried out of a projection based on an electronically stored circuit pattern and adjustable projection parameters and optical parameters which characterize the specific characteristics of a projection apparatus. Positions at which it is predicted that side lobes will occur in the event of an actual projection are identified in the calculated circuit pattern. The positions of the side lobes are transmitted to a manufacturing unit and are recorded in a measurement program. A wafer, which has been exposed by a mask, is inspected for side lobes, at least at precisely those transmitted positions using the measurement program. The adjustable projection parameters are adapted, a radiation-sensitive layer is removed from and reapplied to the wafer and the projection is repeated with the adapted projection parameters depending on the detection result. The control process is repeated until the side lobes have been completely prevented.
摘要翻译： 基于电子存储的电路图案和表征投影设备的特定特性的可调投影参数和光学参数的投影进行模拟。 在计算出的电路图案中，可以预测在实际投影的情况下发生旁瓣的位置。 旁瓣的位置被传送到制造单元并记录在测量程序中。 已经通过掩模曝光的晶片至少在使用测量程序的那些传输位置处被检查为旁瓣。 可调节的投影参数被适配，辐射敏感层被去除并重新应用于晶片，并且根据检测结果，利用适配的投影参数重复投影。 重复控制过程，直到旁瓣完全被防止。
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公开(公告)号：US06352597B1
公开(公告)日：2002-03-05
申请号：US09554841
申请日：2000-07-14
申请人： Oliver Gutfleisch , Michael Kubis , Axel Handstein , Bernhard Gebel , Karl-Hartmut Mueller , Ivor Harris , Ludwig Schultz
发明人： Oliver Gutfleisch , Michael Kubis , Axel Handstein , Bernhard Gebel , Karl-Hartmut Mueller , Ivor Harris , Ludwig Schultz
IPC分类号： H01F106
CPC分类号： H01F1/0553 , B22F9/023 , B22F9/04 , B22F2999/00 , B22F2201/013 , B22F1/0085
摘要： A method is disclosed enabling a technologically controllable and economical production of a hard-magnetic powder composed of a samarium-cobalt base alloy for highly coercive permanent magnets. The method is based on a HDDR treatment in which a starting powder is subjected to hydrogenation with disproportionation of the alloy in a first method step under hydrogen and, in a subsequent, second method step under vacuum conditions, a hydrogen desorption with recombination of the alloy. A starting powder containing samarium and cobalt is treated in the first method step either at a high temperature in the range of 500° C. to 900° C. and with a high hydrogen pressure of >0.5 MPa or by applying an intensive fine grinding at a low temperature in the range of 50° C. to 500° C. and with a hydrogen pressure of >0.15 MPa. By means of the method of the invention, magnetic alloy powders can be produced from samarium-cobalt base alloys; highly coercive permanent magnets can be produced from these magnetic alloy powders, particularly by hot compacting or plastic bonding.
摘要翻译： 公开了一种能够技术上可控和经济地生产由用于高矫顽永磁体的钐 - 钴基合金组成的硬磁粉末的方法。 该方法基于HDDR处理，其中起始粉末在第一方法步骤中在氢气下以合金的歧化进行氢化，并且在随后的第二方法步骤中，在真空条件下，通过合金的复合氢解吸 。 在第一方法步骤中，在500℃至900℃的高温和> 0.5MPa的高氢气压力下或通过在 在50℃至500℃的范围内的低温和> 0.15MPa的氢气压力。 通过本发明的方法，可以由钐钴基合金制备磁性合金粉末; 可以通过这些磁性合金粉末，特别是通过热压实或塑性粘合来制造高矫顽永久磁铁。
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公开(公告)号：US20130050501A1
公开(公告)日：2013-02-28
申请号：US13542319
申请日：2012-07-05
CPC分类号： G03F7/70633 , G03F1/44 , G03F7/70683
摘要： A target structure including a periodic structure is formed on a substrate. An image of the target structure is detected while illuminating the target structure with a beam of radiation, the image being formed using a first part of non-zero order diffracted radiation while excluding zero order diffracted radiation. Intensity values extracted from a region of interest within the image are used to determine a property of the periodic structure. A processing unit recognizes locations of a plurality of boundary features in the image of the target structure to identify regions of interest. The number of boundary features in each direction is at least twice a number of boundaries of periodic structures within the target structure. The accuracy of locating the region is greater than by recognizing only the boundaries of the periodic structure(s).
摘要翻译： 包括周期性结构的靶结构形成在基板上。 在用辐射束照射目标结构的同时检测目标结构的图像，该图像使用非零次衍射辐射的第一部分形成，同时排除零级衍射辐射。 使用从图像内的感兴趣区域提取的强度值来确定周期性结构的性质。 处理单元识别目标结构的图像中的多个边界特征的位置以识别感兴趣的区域。 每个方向上边界特征的数量至少是目标结构内周期性结构边界数量的两倍。 定位区域的精度大于仅识别周期性结构的边界。
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