公开(公告)号：US20220220131A1

公开(公告)日：2022-07-14

申请号：US17710178

申请日：2022-03-31

Applicant: BASF SE ,  Wayne State University

Inventor： David Dominique Schweinfurth ,  Lukas Mayr ,  Sinja Verena Klenk ,  Sabine Weiguny ,  Charles Hartger Winter ,  Kyle Blakeney ,  Nilanka Weerathunga Sirikkathuge ,  Tharindu Malawara Arachchige Nimanthaka Karunaratne

IPC: C07F5/06 ,  C23C16/08 ,  C23C16/20 ,  C23C16/455 ,  C23C16/12

Abstract: A process including bringing a solid substrate in contact with a compound of general formula (I), (II), (III), or (IV) in the gaseous state where A is NR2 or OR with R being an alkyl group, an alkenyl group, an aryl group, or a silyl group, E is NR or O, n is 0, 1 or 2, m is 0, 1 or 2, and R′ is hydrogen, an alkyl group, an alkenyl group, an aryl group, or a silyl group.