公开(公告)号：US08076154B2

公开(公告)日：2011-12-13

申请号：US12370358

申请日：2009-02-12

申请人： Joseph Erickson ,  Eugene Tokhtuev ,  Christopher Owen ,  Paul Schilling

发明人： Joseph Erickson ,  Eugene Tokhtuev ,  Christopher Owen ,  Paul Schilling

IPC分类号： G01N21/00

CPC分类号： G01N35/085 ,  G01N21/05 ,  G01N21/274 ,  G01N35/1097 ,  G01N2021/0346 ,  G01N2035/0097 ,  Y10T436/201666 ,  Y10T436/206664

摘要： A use composition monitor determines the concentration of peracid and/or peroxide in a use composition using a kinetic assay procedure. A sample mixture containing a sample of the use composition, a diluent and at least one reagent is prepared and analyzed using, for example, an optical detector. Response data obtained by the detector is used to determine the concentrations of peracid and/or peroxide in the use composition based upon an evaluation function determined by a calibration method. The calibration method includes determining coefficients of the evaluation function based upon known concentrations, and measured response data of calibration samples.

摘要翻译： 使用组合物监测器使用动力学测定程序确定使用组合物中过酸和/或过氧化物的浓度。 使用例如光学检测器制备并分析含有使用组合物样品，稀释剂和至少一种试剂的样品混合物。 基于通过校准方法确定的评价函数，使用检测器获得的反应数据用于确定使用组合物中过酸和/或过氧化物的浓度。 校准方法包括基于已知浓度确定评估函数的系数，以及校准样本的测量响应数据。

公开(公告)号：US07989780B2

公开(公告)日：2011-08-02

申请号：US12633304

申请日：2009-12-08

申请人： Eugene Tokhtuev ,  Christopher J. Owen ,  Viktor Slobodyan ,  Anatoly Skirda ,  Paul Schilling ,  Anna Pilipchenko ,  Paul R. Kraus ,  Katherine M. Sanville ,  Joseph Phillip Erickson

发明人： Eugene Tokhtuev ,  Christopher J. Owen ,  Viktor Slobodyan ,  Anatoly Skirda ,  Paul Schilling ,  Anna Pilipchenko ,  Paul R. Kraus ,  Katherine M. Sanville ,  Joseph Phillip Erickson

IPC分类号： G01N21/64 ,  G01J1/42 ,  G01N21/49

CPC分类号： G01N21/8507 ,  G01N21/6402 ,  G01N33/18

摘要： An ultraviolet (UV) fluorometric sensor measures a chemical concentration in a sample based on the measured fluorescence of the sample. The sensor includes a controller, at least one UV light source, and at least one UV detector. The sensor emits UV light in a wavelength range of 245-265 nm from the light source through the sample in an analytical area. The UV detector measures the fluorescence emission from the sample. The controller transforms output signals from the UV detector into fluorescence values or optical densities for one or more wavelengths in the wavelength range of 265-340 nm. The controller calculates the chemical concentration of the chemical in the sample based on the measured fluorescence emissions.

公开(公告)号：US20090150086A1

公开(公告)日：2009-06-11

申请号：US12370369

申请日：2009-02-12

申请人： Eugene Tokhtuev ,  Christopher Owen ,  Paul Kraus ,  Joseph Erickson ,  Paul Schilling ,  Daniel Kamben ,  William Christensen ,  Viktor Slobodyan

发明人： Eugene Tokhtuev ,  Christopher Owen ,  Paul Kraus ,  Joseph Erickson ,  Paul Schilling ,  Daniel Kamben ,  William Christensen ,  Viktor Slobodyan

IPC分类号： G06F17/00 ,  G01N21/00

CPC分类号： G01N21/274 ,  G01N21/05 ,  G01N21/8507 ,  G01N33/52 ,  G01N33/84 ,  G01N35/085 ,  G01N35/1097 ,  G01N2021/0346 ,  G01N2035/0097 ,  Y10T436/206664 ,  Y10T436/21

摘要： A use composition monitor determines the concentration of peracid and/or peroxide in a use composition using a kinetic assay procedure. A sample mixture containing a sample of the use composition, a diluent and at least one reagent is prepared and analyzed using, for example, an optical detector. Response data obtained by the detector is indicative of the optical absorbance of the sample mixture as a function of time. A processor analyzes the response data to determine a corresponding best fit linear relationship. Depending upon an expected concentration range, the initial absorbance and/or the slope of the best fit equation are used to calculate the concentrations of the peracid and peroxide in the use composition.

摘要翻译： 使用组合物监测器使用动力学测定程序确定使用组合物中过酸和/或过氧化物的浓度。 使用例如光学检测器制备并分析含有使用组合物样品，稀释剂和至少一种试剂的样品混合物。 由检测器获得的响应数据表示作为时间的函数的样品混合物的光吸收。 处理器分析响应数据以确定相应的最佳拟合线性关系。 根据预期的浓度范围，使用最佳拟合方程的初始吸光度和/或斜率来计算使用组合物中过酸和过氧化物的浓度。

公开(公告)号：US07399708B2

公开(公告)日：2008-07-15

申请号：US11094939

申请日：2005-03-30

申请人： Paul Schilling

发明人： Paul Schilling

IPC分类号： H01L21/307 ,  H01L21/461

CPC分类号： H01L21/02101 ,  H01L21/02063 ,  H01L21/76814 ,  Y10S438/909

摘要： Methods are provided for cleaning a microelectronic device, and one method includes providing a substrate having a patterned SOG/anti-reflective material; performing a process to cure the patterned SOG/anti-reflective material; and performing a cleaning process to remove the cured SOG/anti-reflective material. An apparatus for cleaning a microelectronic device is provided that includes a processing chamber; means for performing a SOG/anti-reflective material curing process within the processing chamber, means for performing a cleaning process within the processing chamber and means for venting the processing chamber.

摘要翻译： 提供了用于清洁微电子器件的方法，并且一种方法包括提供具有图案化的SOG /抗反射材料的衬底; 执行固化图案化的SOG /抗反射材料的工艺; 并执行清洁处理以除去固化的SOG /抗反射材料。 提供一种用于清洁微电子器件的设备，其包括处理室; 用于在处理室内进行SOG /抗反射材料固化过程的装置，用于在处理室内进行清洁处理的装置和用于排出处理室的装置。

公开(公告)号：US20080030712A1

公开(公告)日：2008-02-07

申请号：US11809208

申请日：2007-05-31

申请人： Eugene Tokhtuev ,  Christopher Owen ,  Viktor Slobodyan ,  Anatoly Skirda ,  Paul Schilling ,  Anna Pilipchenko ,  Paul Kraus ,  Katherine Sanville ,  Joseph Erickson

发明人： Eugene Tokhtuev ,  Christopher Owen ,  Viktor Slobodyan ,  Anatoly Skirda ,  Paul Schilling ,  Anna Pilipchenko ,  Paul Kraus ,  Katherine Sanville ,  Joseph Erickson

IPC分类号： G01J3/00

CPC分类号： G01N21/8507 ,  G01N21/6402 ,  G01N33/18

摘要： An ultraviolet (UV) fluorometric sensor measures a chemical concentration in a sample based on the measured fluorescence of the sample. The sensor includes a controller, at least one UV light source, and at least one UV detector. The sensor emits UV light in a wavelength range of 245-265 nm from the light source through the sample in an analytical area. The UV detector measures the fluorescence emission from the sample. The controller transforms output signals from the UV detector into fluorescence values or optical densities for one or more wavelengths in the wavelength range of 265-340 nm. The controller calculates the chemical concentration of the chemical in the sample based on the measured fluorescence emissions.

摘要翻译： 紫外线（UV）荧光传感器基于样品的测量荧光测量样品中的化学浓度。 传感器包括控制器，至少一个UV光源和至少一个UV检测器。 传感器在分析区域内通过样品从光源发射波长245-265nm的紫外光。 UV检测器测量样品的荧光发射。 控制器将来自UV检测器的输出信号转换为在波长范围为265-340nm的一个或多个波长的荧光值或光密度。 控制器基于测量的荧光发射计算样品中化学品的化学浓度。

公开(公告)号：US20050008980A1

公开(公告)日：2005-01-13

申请号：US10911085

申请日：2004-08-03

申请人： Chantal Arena-Foster ,  Allan Awtrey ,  Nicholas Ryza ,  Paul Schilling

发明人： Chantal Arena-Foster ,  Allan Awtrey ,  Nicholas Ryza ,  Paul Schilling

IPC分类号： B05D3/02 ,  G03C5/26 ,  G03F7/30

CPC分类号： B05D3/02 ,  G03C5/26 ,  G03F7/30

摘要： A method of developing a polymeric film without the need for a water rinse step. An object having a surface supporting a polymeric film is placed onto a support region within a pressure chamber. A fluid and developer is introduced into the pressure chamber and the object is processed at supercritical conditions to develop the polymeric film such that the polymeric film is not substantially deformed. The pressure chamber is then vented.

公开(公告)号：US08084756B2

公开(公告)日：2011-12-27

申请号：US13175491

申请日：2011-07-01

申请人： Eugene Tokhtuev ,  Christopher J. Owen ,  Viktor Slobodyan ,  Anatoly Skirda ,  Paul Schilling ,  Anna Pilipchenko ,  Paul R. Kraus ,  Katherine M. Sanville ,  Joseph Phillip Erickson

发明人： Eugene Tokhtuev ,  Christopher J. Owen ,  Viktor Slobodyan ,  Anatoly Skirda ,  Paul Schilling ,  Anna Pilipchenko ,  Paul R. Kraus ,  Katherine M. Sanville ,  Joseph Phillip Erickson

IPC分类号： G01N21/64 ,  G01J1/42 ,  G01N21/49

CPC分类号： G01N21/8507 ,  G01N21/6402 ,  G01N33/18

摘要： An ultraviolet (UV) fluorometric sensor measures a chemical concentration in a sample based on the measured fluorescence of the sample. The sensor includes a controller, at least one UV light source, and at least one UV detector. The sensor emits UV light in a wavelength range of 245-265 nm from the light source through the sample in an analytical area. The UV detector measures the fluorescence emission from the sample. The controller transforms output signals from the UV detector into fluorescence values or optical densities for one or more wavelengths in the wavelength range of 265-340 nm. The controller calculates the chemical concentration of the chemical in the sample based on the measured fluorescence emissions.

摘要翻译： 紫外线（UV）荧光传感器基于样品的测量荧光测量样品中的化学浓度。 传感器包括控制器，至少一个UV光源和至少一个UV检测器。 传感器在分析区域内通过样品从光源发射波长245-265 nm的紫外光。 UV检测器测量样品的荧光发射。 控制器将来自UV检测器的输出信号转换为在波长范围为265-340nm的一个或多个波长的荧光值或光密度。 控制器基于测量的荧光发射计算样品中化学品的化学浓度。

公开(公告)号：US07652267B2

公开(公告)日：2010-01-26

申请号：US12436593

申请日：2009-05-06

申请人： Eugene T. Tokhtuev ,  Christopher J. Owen ,  Viktor Slobodyan ,  Anatoly Skirda ,  Paul Schilling ,  Anna Pilipchenko ,  Paul R. Kraus ,  Katherine M. Sanville ,  Joseph Phillip Erickson

发明人： Eugene T. Tokhtuev ,  Christopher J. Owen ,  Viktor Slobodyan ,  Anatoly Skirda ,  Paul Schilling ,  Anna Pilipchenko ,  Paul R. Kraus ,  Katherine M. Sanville ,  Joseph Phillip Erickson

IPC分类号： G01N21/64 ,  G01N21/00 ,  G01J3/00

CPC分类号： G01N21/8507 ,  G01N21/6402 ,  G01N33/18

摘要： An ultraviolet (UV) fluorometric sensor measures a chemical concentration in a sample based on the measured fluorescence of the sample. The sensor includes a controller, at least one UV light source, and at least one UV detector. The sensor emits UV light in a wavelength range of 245-265 nm from the light source through the sample in an analytical area. The UV detector measures the fluorescence emission from the sample. The controller transforms output signals from the UV detector into fluorescence values or optical densities for one or more wavelengths in the wavelength range of 265-340 nm. The controller calculates the chemical concentration of the chemical in the sample based on the measured fluorescence emissions.

摘要翻译： 紫外线（UV）荧光传感器基于样品的测量荧光测量样品中的化学浓度。 传感器包括控制器，至少一个UV光源和至少一个UV检测器。 传感器在分析区域内通过样品从光源发射波长245-265 nm的紫外光。 UV检测器测量样品的荧光发射。 控制器将来自UV检测器的输出信号转换为在波长范围为265-340nm的一个或多个波长的荧光值或光密度。 控制器基于测量的荧光发射计算样品中化学品的化学浓度。

公开(公告)号：US20090212236A1

公开(公告)日：2009-08-27

申请号：US12436593

申请日：2009-05-06

申请人： Eugene Tokhtuev ,  Christopher J. Owen ,  Viktor Slobodyan ,  Anatoly Skirda ,  Paul Schilling ,  Anna Pilipchenko ,  Paul R. Kraus ,  Katherine M. Sanville ,  Joseph Phillip Erickson

发明人： Eugene Tokhtuev ,  Christopher J. Owen ,  Viktor Slobodyan ,  Anatoly Skirda ,  Paul Schilling ,  Anna Pilipchenko ,  Paul R. Kraus ,  Katherine M. Sanville ,  Joseph Phillip Erickson

IPC分类号： G01N21/64

CPC分类号： G01N21/8507 ,  G01N21/6402 ,  G01N33/18

摘要： An ultraviolet (UV) fluorometric sensor measures a chemical concentration in a sample based on the measured fluorescence of the sample. The sensor includes a controller, at least one UV light source, and at least one UV detector. The sensor emits UV light in a wavelength range of 245-265 nm from the light source through the sample in an analytical area. The UV detector measures the fluorescence emission from the sample. The controller transforms output signals from the UV detector into fluorescence values or optical densities for one or more wavelengths in the wavelength range of 265-340 nm. The controller calculates the chemical concentration of the chemical in the sample based on the measured fluorescence emissions.

摘要翻译： 紫外线（UV）荧光传感器基于样品的测量荧光测量样品中的化学浓度。 传感器包括控制器，至少一个UV光源和至少一个UV检测器。 传感器在分析区域内通过样品从光源发射波长245-265 nm的紫外光。 UV检测器测量样品的荧光发射。 控制器将来自UV检测器的输出信号转换为在波长范围为265-340nm的一个或多个波长的荧光值或光密度。 控制器基于测量的荧光发射计算样品中化学品的化学浓度。

公开(公告)号：US07372039B2

公开(公告)日：2008-05-13

申请号：US11311126

申请日：2005-12-20

申请人： Eugene Tokhtuev ,  Christopher J. Owen ,  Paul Schilling ,  Anna Pilipchenko ,  Paul R. Kraus ,  Katherine M. Sanville

发明人： Eugene Tokhtuev ,  Christopher J. Owen ,  Paul Schilling ,  Anna Pilipchenko ,  Paul R. Kraus ,  Katherine M. Sanville

IPC分类号： G01J1/42

CPC分类号： G01N21/33 ,  G01J3/021 ,  G01J3/0264 ,  G01J3/0272 ,  G01J3/0283 ,  G01J3/12 ,  G01J3/36 ,  G01J3/42 ,  G01J3/4412 ,  G01J2003/1226 ,  G01N21/532 ,  G01N21/5907 ,  G01N21/8507 ,  G01N2201/0221

摘要： A UV absorption spectrometer includes a housing, a controller, and a sensor unit including an ultraviolet light source, an analytical area in an analytical cell or in running water or gaseous medium, and an UV wavelength separator including a UV detector. An ultraviolet light in a wavelength range of 200-320 nm emits from the light source through the analytical area to the wavelength separator, and the controller transforms output signals from the UV detector into absorbance values or optical densities for two or more wavelengths in the wavelength range, calculates differences of said absorbance values or optical densities, determines a concentration of a chemical in the solution with calibration constants found for a known concentration of the chemical and said differences of said absorbance values or optical densities.

摘要翻译： 紫外线吸收光谱仪包括壳体，控制器和包括紫外光源，分析单元中的分析区域或流水或气体介质中的分析区域的传感器单元和包括UV检测器的UV波长分离器。 波长范围为200-320nm的紫外光从光源通过分析区域发射到波长分离器，并且控制器将来自UV检测器的输出信号转换成波长为两个或更多波长的吸光度值或光密度 范围，计算所述吸光度值或光密度的差异，确定溶液中化学物质的浓度，其中针对已知化学浓度和所述吸光度值或光密度的差异发现校准常数。