公开(公告)号：US07380330B2

公开(公告)日：2008-06-03

申请号：US11186174

申请日：2005-07-21

申请人： Daniel Wayne Bedell ,  Aron Pentek ,  Katalin Pentek ,  Yi Zheng

发明人： Daniel Wayne Bedell ,  Aron Pentek ,  Katalin Pentek ,  Yi Zheng

IPC分类号： G11B5/127

CPC分类号： G11B5/3163 ,  Y10T29/49032 ,  Y10T29/49041 ,  Y10T29/49043 ,  Y10T29/49046 ,  Y10T29/49052

摘要： After defining the P2 pole of a magnetic read head, alumina is deposited over it and planarized by CMP, with the portion of the alumina overlaying the ABS region of the P2 pole subsequently being masked by a photoresist layer and with the portions of the alumina overlaying the flare area, back gap region, and center tap regions of the P2 pole not being masked. A reactive ion mill is performed to expose the flare area, back gap region, and center tap regions of the P2 pole by removing the alumina over these portions, so that subsequent steps such as forming a layer of coiled conductors, forming a return pole, and forming stud connections along with removing the respective seed layers can be executed with the ABS region protected by the alumina and with the flare area, back gap region, and center tap region exposed.

摘要翻译： 在定义磁读头的P2极之后，将氧化铝沉积在其上并通过CMP平坦化，其中覆盖P2极的ABS区域的氧化铝的部分随后被光致抗蚀剂层掩蔽，并且氧化铝的部分覆盖 P2极的光斑区域，背隙区域和中心抽头区域不被掩蔽。 通过在这些部分上除去氧化铝，进行反应离子磨，以暴露P2极的火炬区域，后隙区域和中心抽头区域，从而形成后续步骤，例如形成线圈导体层，形成返回极， 并且可以利用由氧化铝保护的ABS区域和暴露的火炬区域，后隙区域和中心抽头区域来执行形成螺柱连接以及移除相应的种子层。

公开(公告)号：US08854764B2

公开(公告)日：2014-10-07

申请号：US13250204

申请日：2011-09-30

申请人： Andrew Chiu ,  Sujit Kirpekar ,  Katalin Pentek ,  Oscar J. Ruiz ,  David J. Seagle

发明人： Andrew Chiu ,  Sujit Kirpekar ,  Katalin Pentek ,  Oscar J. Ruiz ,  David J. Seagle

IPC分类号： G11B21/02 ,  G11B5/60

CPC分类号： G11B5/6076 ,  G11B5/607

摘要： Techniques of the present invention include detecting a touchdown between a read/write head of a disk drive and a surface of a magnetic disk using multiple touchdown sensors located at an air-bearing surface (ABS). The multiple sensors increase the likelihood that a touchdown event—i.e., a portion of the ABS of the head contacting the underlying magnetic disk surface—will be detected. During touchdown, the portion of the head contacting the magnetic disk generates frictional heat which changes a characteristic (e.g., the electrical resistance) of at least one of the sensors located at the ABS. When the sensors are connected to a detection circuit, the changing characteristic may be monitored to identify a touchdown event. The touchdown sensors may be, for example, electrically connected in either series or parallel to the detection circuit. Thus, as long as the electrical resistance of one of the sensors is changed, a touchdown event may be detected.

摘要翻译： 本发明的技术包括使用位于空气轴承表面（ABS）的多个触地传感器检测磁盘驱动器的读/写磁头与磁盘表面之间的触地。 多个传感器增加触发事件 - 即头部的ABS的一部分接触下面的磁盘表面 - 将被检测的可能性。 触地时，头部与磁盘接触的部分产生摩擦热，该摩擦热改变位于ABS处的至少一个传感器的特性（例如，电阻）。 当传感器连接到检测电路时，可以监视变化特性以识别触地事件。 触地传感器可以例如以串联或并联的方式电连接到检测电路。 因此，只要传感器之一的电阻改变，就可以检测到触地事件。

公开(公告)号：US20130083430A1

公开(公告)日：2013-04-04

申请号：US13250204

申请日：2011-09-30

申请人： Andrew Chiu ,  Sujit Kirpekar ,  Katalin Pentek ,  Oscar J. Ruiz ,  David J. Seagle

发明人： Andrew Chiu ,  Sujit Kirpekar ,  Katalin Pentek ,  Oscar J. Ruiz ,  David J. Seagle

IPC分类号： G11B5/60

CPC分类号： G11B5/6076 ,  G11B5/607

摘要： Techniques of the present invention include detecting a touchdown between a read/write head of a disk drive and a surface of a magnetic disk using multiple touchdown sensors located at an air-bearing surface (ABS). The multiple sensors increase the likelihood that a touchdown event—i.e., a portion of the ABS of the head contacting the underlying magnetic disk surface—will be detected. During touchdown, the portion of the head contacting the magnetic disk generates frictional heat which changes a characteristic (e.g., the electrical resistance) of at least one of the sensors located at the ABS. When the sensors are connected to a detection circuit, the changing characteristic may be monitored to identify a touchdown event. The touchdown sensors may be, for example, electrically connected in either series or parallel to the detection circuit. Thus, as long as the electrical resistance of one of the sensors is changed, a touchdown event may be detected.

摘要翻译： 本发明的技术包括使用位于空气轴承表面（ABS）的多个触地传感器检测磁盘驱动器的读/写磁头与磁盘表面之间的触地。 多个传感器增加触发事件 - 即头部的ABS的一部分接触下面的磁盘表面 - 将被检测的可能性。 触地时，头部与磁盘接触的部分产生摩擦热，该摩擦热改变位于ABS处的至少一个传感器的特性（例如，电阻）。 当传感器连接到检测电路时，可以监视变化特性以识别触地事件。 触地传感器可以例如以串联或并联的方式电连接到检测电路。 因此，只要传感器之一的电阻改变，就可以检测到触地事件。

公开(公告)号：US07110217B2

公开(公告)日：2006-09-19

申请号：US10687284

申请日：2003-10-15

申请人： Edward Hin Pong Lee ,  Katalin Pentek ,  Yong Shen ,  Sue Siyang Zhang

发明人： Edward Hin Pong Lee ,  Katalin Pentek ,  Yong Shen ,  Sue Siyang Zhang

IPC分类号： G11B5/147

CPC分类号： G11B5/60 ,  G11B5/127 ,  G11B5/147

摘要： A magnetic head having an air bearing surface (ABS) and a first pole tip. A second pole tip is spaced apart from and facing the upper end of the first pole tip across a write gap. A bump extends into a portion of the upper end of the first pole tip and a portion of the bottom end of the second pole tip, the bump being positioned away from the ABS. The bump defines a throat height of the first and second pole tips.

摘要翻译： 具有空气轴承表面（ABS）和第一极端的磁头。 第二极尖与间隙隔开并面对第一极尖的上端。 凸块延伸到第一极尖端的上端的一部分和第二极尖的底端的一部分，凸块被定位成远离ABS。 凸块限定第一和第二极尖的喉部高度。

公开(公告)号：US20070247750A1

公开(公告)日：2007-10-25

申请号：US11411590

申请日：2006-04-25

申请人： Wen-Chien Hsiao ,  Yimin Hsu ,  Edward Lee ,  Vladimir Nikitin ,  Katalin Pentek

发明人： Wen-Chien Hsiao ,  Yimin Hsu ,  Edward Lee ,  Vladimir Nikitin ,  Katalin Pentek

IPC分类号： G11B5/147

CPC分类号： G11B5/1278 ,  G11B5/3133 ,  G11B5/3136

摘要： A magnetic write pole having a structure that prevents thermally induced pole tip protrusion. The write head has a return pole with a magnetic pedestal formed at the air bearing surface (ABS) and a back gap at an end opposite the ABS. An electrically conductive write coil having a plurality of turns passes over the return pole. A fill layer of a material having a low coefficient of thermal expansion, such as alumina is disposed between the coil and the pedestal, and may extend over the top of the coil to the back gap. A photoresist coil insulation layer may be provided between the turns of the coil to insulate the turns of the coil from one another. The photoresist coil insulation layer can also extend to the back gap. A write pole, formed above the return pole and coil is magnetically connected with the back gap layer and return pole by a magnetic shaping layer.

摘要翻译： 具有防止热感应极尖突出的结构的磁性写入极。 写头具有在空气轴承表面（ABS）形成的磁性基座的返回极和与ABS相对的一端的后部间隙。 具有多个匝的导电写入线圈通过返回极。 具有低热膨胀系数的材料的填充层（例如氧化铝）设置在线圈和基座之间，并且可以在线圈的顶部延伸到后部间隙。 可以在线圈的匝之间设置光致抗蚀剂线圈绝缘层，以将线圈的匝彼此绝缘。 光致抗蚀剂线圈绝缘层也可以延伸到后隙。 在返回极和线圈之上形成的写极通过磁性成形层与后间隙层和返回极磁连接。

公开(公告)号：US07023204B2

公开(公告)日：2006-04-04

申请号：US10298880

申请日：2002-11-18

申请人： Vladimir Nikitin ,  Katalin Pentek

发明人： Vladimir Nikitin ,  Katalin Pentek

IPC分类号： G01R33/12

CPC分类号： G01Q60/54 ,  G01Q10/06 ,  G01R33/0385 ,  G11B5/012 ,  G11B5/3103 ,  G11B5/3166 ,  G11B5/3173 ,  G11B5/3193 ,  G11B5/3909 ,  G11B5/455 ,  G11B2005/001 ,  G11B2005/0013 ,  G11B2005/0016 ,  G11B2005/3996

摘要： A novel magnetic imaging microscope test system with high spatial (1–10 nm) and temporal (˜1 ns) resolution of the magnetic field is disclosed, as well as the system application for characterization of read and write heads for magnetic recording. The test system includes a scanner assembly and a work piece holder for holding a work piece to be tested. The scanner assembly and the work piece holder are positionable relative to each other at very fine resolution during scanning. A probe arm is cantilevered from the scanner assembly to bring a probe head into close proximity to the work piece holder. The probe head is configured scan a work piece in contacting engagement therewith so that a magnetic device on the probe head magnetically interacts with a magnetic field generating or magnetic field sensing device on the work piece. A probe head for use in the test system and a related test method are also disclosed.

摘要翻译： 公开了一种具有高空间（1-10nm）和时间（〜1ns）磁场分辨率的新型磁成像显微镜测试系统，以及用于表征磁记录读写头的系统应用。 测试系统包括扫描器组件和用于保持要测试的工件的工件保持器。 扫描仪组件和工件保持件可以在扫描期间以非常细的分辨率相对于彼此定位。 探头臂从扫描仪组件悬臂，使探针头靠近工件支架。 探针头被配置为扫描与其接触的工件，使得探针头上的磁性装置与工件上的磁场产生或磁场感测装置磁性地相互作用。 还公开了用于测试系统的探头和相关测试方法。

公开(公告)号：US07593183B2

公开(公告)日：2009-09-22

申请号：US11411590

申请日：2006-04-25

申请人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Edward Hin Pong Lee ,  Vladimir Nikitin ,  Katalin Pentek

发明人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Edward Hin Pong Lee ,  Vladimir Nikitin ,  Katalin Pentek

IPC分类号： G11B5/17 ,  G11B5/147

CPC分类号： G11B5/1278 ,  G11B5/3133 ,  G11B5/3136

摘要： A magnetic write pole having a structure that prevents thermally induced pole tip protrusion. The write head has a return pole with a magnetic pedestal formed at the air bearing surface (ABS) and a back gap at an end opposite the ABS. An electrically conductive write coil having a plurality of turns passes over the return pole. A fill layer of a material having a low coefficient of thermal expansion, such as alumina is disposed between the coil and the pedestal, and may extend over the top of the coil to the back gap. A photoresist coil insulation layer may be provided between the turns of the coil to insulate the turns of the coil from one another. The photoresist coil insulation layer can also extend to the back gap. A write pole, formed above the return pole and coil is magnetically connected with the back gap layer and return pole by a magnetic shaping layer.

摘要翻译： 具有防止热感应极尖突出的结构的磁性写入极。 写头具有在空气轴承表面（ABS）形成的磁性基座的返回极和与ABS相对的一端的后部间隙。 具有多个匝的导电写入线圈通过返回极。 具有低热膨胀系数的材料的填充层（例如氧化铝）设置在线圈和基座之间，并且可以在线圈的顶部延伸到后部间隙。 可以在线圈的匝之间设置光致抗蚀剂线圈绝缘层，以将线圈的匝彼此绝缘。 光致抗蚀剂线圈绝缘层也可以延伸到后隙。 在返回极和线圈之上形成的写极通过磁性成形层与后间隙层和返回极磁连接。

公开(公告)号：US20050083606A1

公开(公告)日：2005-04-21

申请号：US10687284

申请日：2003-10-15

申请人： Edward Lee ,  Katalin Pentek ,  Yong Shen ,  Sue Zhang

发明人： Edward Lee ,  Katalin Pentek ,  Yong Shen ,  Sue Zhang

IPC分类号： G11B5/127 ,  G11B5/147 ,  G11B5/60

CPC分类号： G11B5/60 ,  G11B5/127 ,  G11B5/147

摘要： A magnetic head having an air bearing surface (ABS) and a first pole tip. A second pole tip is spaced apart from and facing the upper end of the first pole tip across a write gap. A bump extends into a portion of the upper end of the first pole tip and a portion of the bottom end of the second pole tip, the bump being positioned away from the ABS. The bump defines a throat height of the first and second pole tips.

摘要翻译： 具有空气轴承表面（ABS）和第一极端的磁头。 第二极尖与间隙隔开并面对第一极尖的上端。 凸块延伸到第一极尖端的上端的一部分和第二极尖的底端的一部分，凸块被定位成远离ABS。 凸块限定第一和第二极尖的喉部高度。

公开(公告)号：US20070263324A1

公开(公告)日：2007-11-15

申请号：US11379969

申请日：2006-04-24

申请人： Donald Allen ,  Amanda Baer ,  Michael Feldbaum ,  Wen-Chien Hsiao ,  Vladimir Nikitin ,  Aron Pentek ,  Katalin Pentek

发明人： Donald Allen ,  Amanda Baer ,  Michael Feldbaum ,  Wen-Chien Hsiao ,  Vladimir Nikitin ,  Aron Pentek ,  Katalin Pentek

IPC分类号： G11B5/48

CPC分类号： G11B5/1278 ,  G11B5/11 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/3163 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： The invention is a perpendicular magnetic recording write head with a write pole, a trapezoidal-shaped trailing shield notch, and a metal gap layer between the write pole and notch. The write pole has a trailing edge that has a width substantially defining the track width and that faces the front edge of the notch but is spaced from it by the gap layer. The write head is fabricated by a process than includes reactive ion beam etching of a thin mask film above the write pole to remove the mask film and widen the opening at the edges of the write pole. The gap layer and notch are deposited into the widened opening above the write pole. The write pole has nonmagnetic filler material, such as alumina, surrounding it except at its trailing edge, where it is in contact with the gap layer, which is formed of a different material than the surrounding filler material.

摘要翻译： 本发明是一种具有写极，梯形后屏蔽切口和写极与刻槽之间的金属间隙层的垂直磁记录写头。 写入极具有后缘，其具有基本上限定轨道宽度的宽度并且面向凹口的前边缘，但是通过间隙层与其间隔开。 写头通过一种工艺制造，而不是包括对写极上方的薄掩模膜的反应离子束蚀刻，以去除掩模膜并加宽写入极的边缘处的开口。 间隙层和凹口沉积在写柱上方的加宽开口中。 写极具有非磁性填充材料，例如氧化铝，除了其后缘外围，其与间隙层接触，间隙层由与周围填料材料不同的材料形成。