公开(公告)号：US20210364658A1

公开(公告)日：2021-11-25

申请号：US17394407

申请日：2021-08-05

Applicant: FUJIFILM CORPORATION

Inventor： Shinichi USHIKURA ,  Munetaka KATO ,  Keiichi AKAMATSU ,  Haruyasu NAKATSUGAWA

IPC: G01T1/202 ,  A61B6/00 ,  H01L27/146

Abstract: A method of manufacturing a radiation detector includes: forming a substrate in which a flexible base material is provided via a peeling layer on a support body and plural pixels that accumulate electric charges generated in response to light converted from radiation are provided in a pixel region of the base material; forming a conversion layer for converting the radiation into light on a surface of the base material; providing a first reinforcing substrate on a surface of the conversion layer opposite to a surface on the substrate side; peeling the substrate provided with the conversion layer and the first reinforcing substrate from the support body; providing a second reinforcing substrate on a surface of the substrate peeled from the support body; and peeling the first reinforcing substrate from the substrate provided with the conversion layer after providing the second reinforcing substrate.

公开(公告)号：US20210333421A1

公开(公告)日：2021-10-28

申请号：US17320241

申请日：2021-05-14

Applicant: FUJIFILM CORPORATION

Inventor： Shinichi USHIKURA ,  Munetaka KATO ,  Keiichi AKAMATSU ,  Haruyasu NAKATSUGAWA

IPC: G01T1/29 ,  H01L31/115 ,  G01T1/161

Abstract: Provided are a radiation detector, a radiographic imaging apparatus, and a manufacturing method that include a TFT substrate in which a plurality of pixels that accumulate electric charges generated depending on light converted from radiation are formed in a pixel region of a first surface of a flexible base material and a terminal region of the first surface is provided with a terminal for electrically connecting a flexible cable; a conversion layer that is provided outside the terminal region on the first surface of the base material to convert the radiation into light; a first reinforcing substrate that is provided on a surface of the conversion layer opposite to a surface on a TFT substrate side and has a higher stiffness than the base material; and a second reinforcing substrate that is provided on a second surface of the base material opposite to the first surface to cover a surface larger than the first reinforcing substrate, and that are capable of suppressing that a defect occurs in the substrate and have an excellent peeling property in a reworking process.

公开(公告)号：US20210096271A1

公开(公告)日：2021-04-01

申请号：US17025566

申请日：2020-09-18

Applicant: FUJIFILM Corporation

Inventor： Yoshihiro OKADA ,  Keiichi AKAMATSU ,  Shinichi USHIKURA ,  Munetaka KATO ,  Haruyasu NAKATSUGAWA

IPC: G01T1/20 ,  G01T1/161 ,  A61B6/00

Abstract: A radiation detector including: a substrate formed with plural pixels that accumulate electrical charges generated in response to light converted from radiation in a pixel region at an opposite-side surface of a base member to a surface including a fine particle layer; the base member being flexible and is made of resin and that includes a fine particle layer containing inorganic fine particles having a mean particle size of from 0.05 μm to 2.5 μm, a conversion layer provided at the surface of the base member provided with the pixel region and configured to convert the radiation into light; and a reinforcement substrate provided to at least one out of a surface on the substrate side of a stacked body configured by stacking the substrate and the conversion layer, or a surface on the conversion layer side of the stacked body.

公开(公告)号：US20190302279A1

公开(公告)日：2019-10-03

申请号：US16369781

申请日：2019-03-29

Applicant: FUJIFILM Corporation

Inventor： Shinichi USHIKURA ,  Keiichi AKAMATSU ,  Haruyasu NAKATSUGAWA ,  Shunsuke KODAIRA

IPC: G01T1/20 ,  G01T1/24

Abstract: A radiation detector includes: a sensor substrate including a flexible base material and a layer which is provided on a first surface of the base material and in which plural pixels, which accumulate electrical charges generated in accordance with light converted from radiation, are formed; a conversion layer that is provided on the first surface side of the sensor substrate to convert radiation into the light; and a protective film that covers a portion ranging from an opposite surface of the conversion layer opposite to a side where the sensor substrate is provided, to a corresponding position, corresponding to a position of an end part of the conversion layer, on a second surface opposite to the first surface of the base material.