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公开(公告)号:US07144686B2
公开(公告)日:2006-12-05
申请号:US10439719
申请日:2003-05-16
申请人: Hsin-Hung Lee , Kuo-Ting Lee
发明人: Hsin-Hung Lee , Kuo-Ting Lee
IPC分类号: H01J9/227
CPC分类号: H01L27/3244 , H01L27/3248 , H01L27/3262 , H01L51/56
摘要: A method of forming an active matrix organic light emitting display. A first photo mask is used to pattern a first scanning line, a bottom electrode and a second scanning line. A second photo mask is used to pattern a first island structure and a second island structure respectively within two predetermined TFT areas. A third photo mask is used to form a via to expose a part of the second scanning line outside the predetermined TFT area. A fourth photo mask is used to pattern a transparent conductive layer as a pixel electrode. A fifth photo mask is used to pattern a second metal layer as a data line and a top electrode, in which an opening is formed in the island structure to define a source/drain electrode and a source/drain diffusion region. A sixth photo mask is used to remove a protective layer from the pixel electrode.