公开(公告)号：US08809149B2

公开(公告)日：2014-08-19

申请号：US13712234

申请日：2012-12-12

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Ki Young Lee ,  Sanggil Bae ,  Tony Joung

IPC: H01L21/336 ,  H01L29/788

CPC classification number: H01L29/66181 ,  H01L28/60 ,  H01L29/94

Abstract: A serial capacitor comprised of a bottom electrode, a top electrode that is conductively coupled the bottom electrode, a middle electrode positioned between the bottom and top electrode, a lower dielectric layer positioned between the bottom and middle electrodes, and an upper dielectric layer positioned between the middle and the electrodes. A method includes forming the bottom electrode in a first layer of insulating material, forming the lower dielectric layer and the middle electrode above the bottom electrode, wherein the middle electrode is positioned in a second layer of insulating material, forming the upper dielectric layer above the middle electrode, forming an opening that exposes a portion of the bottom electrode, and forming the top electrode above the upper dielectric layer, wherein a portion of the top electrode extends through the opening and contacts the bottom electrode.

Abstract translation: 一种串联电容器，包括底部电极，导电耦合底部电极的顶部电极，位于底部和顶部电极之间的中间电极，位于底部和中间电极之间的下部电介质层，以及位于 中间和电极。 一种方法包括在第一绝缘材料层中形成底部电极，在底部电极之上形成下部电介质层和中间电极，其中中间电极位于第二绝缘材料层中，形成上部电介质层 中间电极，形成露出所述底部电极的一部分的开口，以及在所述上部电介质层的上方形成所述顶部电极，其中所述顶部电极的一部分延伸穿过所述开口并接触所述底部电极。