公开(公告)号：US08177550B2

公开(公告)日：2012-05-15

申请号：US11665645

申请日：2005-10-17

申请人： Kenjiro Haraki ,  Hiroyuki Yamamoto ,  Satoshi Uemura ,  Yuji Tsunoda ,  Yasushi Takeuchi ,  Hirofumi Kaneko

发明人： Kenjiro Haraki ,  Hiroyuki Yamamoto ,  Satoshi Uemura ,  Yuji Tsunoda ,  Yasushi Takeuchi ,  Hirofumi Kaneko

IPC分类号： F27D3/06

CPC分类号： H01L21/67769 ,  H01L21/67109 ,  Y10S414/14

摘要： A vertical heat treatment apparatus includes: at least one loading and unloading part 3 and 4 for loading and unloading a carrying container 2 containing a plurality of process objects W into and from said vertical heat treatment apparatus; a first storage part 5 that stores a plurality of carrying containers loaded into said vertical heat treatment apparatus via the loading and unloading part; a heat treatment furnace 7 that accommodates a holder 6 holding a plurality of process objects at multiple levels to perform a predetermined heat treatment to the process objects; and a transfer 8 part that supports thereon a carrying container for transferring process objects between the holder and the carrying container, wherein an upper loading and unloading part 3 and a lower loading and unloading part 4 are provided as said at least one loading and unloading part, and a second storage part 20 that stores a carrying container is disposed between the upper and lower loading and unloading parts. Either one of the loading and unloading parts 3, 4 is utilized as a third storage part 30 that stores a carrying container 2. The carrying container storage capacity may be increased and the throughput may be improved.

摘要翻译： 立式热处理装置包括：至少一个装载和卸载部分3和4，用于将包含多个处理物体W的承载容器2装载到所述垂直热处理装置中并从所述立式热处理装置中卸载; 第一存储部5，其经由装卸部存储装载到所述立式热处理装置中的多个搬运容器; 容纳多个处理对象的保持器6的热处理炉7，对处理对象进行预定的热处理; 以及在其上支撑用于在保持器和承载容器之间传送处理物体的承载容器的转移件8，其中上装载部件3和下装载部件4设置为所述至少一个装载和卸载部件 并且存储运载容器的第二存储部20设置在上下装载部分之间。 加载和卸载部件3,4中的任一个被用作存储携带容器2的第三存储部件30.可以增加承载容器的存储容量并且可以提高生产量。

公开(公告)号：US07564209B2

公开(公告)日：2009-07-21

申请号：US11593028

申请日：2006-11-06

申请人： Naoto Mochizuki ,  Hirofumi Kaneko ,  Masahiro Kouno

发明人： Naoto Mochizuki ,  Hirofumi Kaneko ,  Masahiro Kouno

IPC分类号： B25J9/18

CPC分类号： B25J7/00

摘要： A micro-manipulator has grippers for gripping micro-material; an actuator for driving the grippers; a drive amount detection device for detecting a drive amount of the actuator; a power control device for controlling power supplied to the actuator so that a difference in a target drive amount of the input actuator and a drive amount detected by the drive amount detection device is small, after at least the grippers touch the micro-material; a gripping determination device for determining that grippers have gripped the micro-material based on the difference; and a resilience value calculation device for calculating a resilience value that represents a degree of softness of the micro-material by dividing the actuator drive force that is equivalent to the repulsive force of micro-material gripped by the grippers in proportion to power supplied to the actuator via the power control device.

摘要翻译： 微机械手具有用于夹紧微量材料的夹具; 用于驱动夹具的致动器; 驱动量检测装置，用于检测致动器的驱动量; 电源控制装置，用于在至少夹持器接触微材料之后，控制供应到致动器的电力，使得输入致动器的目标驱动量的差异和由驱动量检测装置检测的驱动量的差小; 夹持确定装置，用于确定夹具基于该差异夹紧微材料; 以及弹性值计算装置，用于通过将与所述夹持器夹持的微材料的斥力的等效的致动器驱动力与施加到所述夹持器的功率成比例地成比例地分配来表示所述微细材料的柔软度的弹性值 执行器通过电源控制装置。

公开(公告)号：US20070147978A1

公开(公告)日：2007-06-28

申请号：US11593028

申请日：2006-11-06

申请人： Naoto Mochizuki ,  Hirofumi Kaneko ,  Masahiro Kouno

发明人： Naoto Mochizuki ,  Hirofumi Kaneko ,  Masahiro Kouno

IPC分类号： B66C3/00

CPC分类号： B25J7/00

摘要： A micro-manipulator has grippers for gripping micro-material; an actuator for driving the grippers; a drive amount detection device for detecting a drive amount of the actuator; a power control device for controlling power supplied to the actuator so that a difference in a target drive amount of the input actuator and a drive amount detected by the drive amount detection device is small, after at least the grippers touch the micro-material; a gripping determination device for determining that grippers have gripped the micro-material based on the difference; and a resilience value calculation device for calculating a resilience value that represents a degree of softness of the micro-material by dividing the actuator drive force that is equivalent to the repulsive force of micro-material gripped by the grippers in proportion to power supplied to the actuator via the power control device.

摘要翻译： 微机械手具有用于夹紧微量材料的夹具; 用于驱动夹具的致动器; 驱动量检测装置，用于检测致动器的驱动量; 电源控制装置，用于在至少夹持器接触微材料之后，控制供应到致动器的电力，使得输入致动器的目标驱动量的差异和由驱动量检测装置检测的驱动量的差小; 夹持确定装置，用于确定夹具基于该差异夹紧微材料; 以及弹性值计算装置，用于通过将与所述夹持器夹持的微材料的斥力的等效的致动器驱动力与施加到所述夹持器的功率成比例地成比例地分配来表示所述微细材料的柔软度的弹性值 执行器通过电源控制装置。

公开(公告)号：US20120260857A1

公开(公告)日：2012-10-18

申请号：US13448512

申请日：2012-04-17

申请人： Kiyohiko TAKAHASHI ,  Hirofumi Kaneko

发明人： Kiyohiko TAKAHASHI ,  Hirofumi Kaneko

IPC分类号： C23C16/46

CPC分类号： H01L21/67109 ,  C23C16/303 ,  C23C16/45563 ,  C23C16/46 ,  H01L21/67017

摘要： A heat treatment apparatus includes a reaction tube extending in a first direction; a substrate support unit which is placed in the reaction tube and is configured to be capable of supporting plural substrates along the first direction; plural gas supply pipes provided at a side surface of the reaction tube to be aligned in the first direction with intervals for supplying a gas into the reaction tube; a gas dispersing plate which is provided in the reaction tube between opening edges of the plural gas supply pipes and the substrate support unit placed in the reaction tube, the gas dispersing plate being provided with plural opening portions formed to correspond to the gas supply pipes, respectively; and a heater which is placed outside the reaction tube for heating the substrates.

摘要翻译： 热处理设备包括沿第一方向延伸的反应管; 基板支撑单元，其被放置在所述反应管中并且被构造成能够沿着所述第一方向支撑多个基板; 多个气体供给管，设置在所述反应管的侧表面，以沿着所述第一方向排列间隔，以将气体供应到所述反应管中; 气体分散板，其设置在所述反应管中，所述气体分散板设置在所述多个气体供给管的开口边缘和位于所述反应管中的所述基板支撑单元之间，所述气体分散板设置有形成为对应于所述气体供给管的多个开口部， 分别; 以及放置在反应管外部用于加热基板的加热器。

公开(公告)号：US20090053665A1

公开(公告)日：2009-02-26

申请号：US11665645

申请日：2005-10-17

申请人： Kenjiro Haraki ,  Hiroyuki Yamamoto ,  Satoshi Uemura ,  Yuji Tsunoda ,  Yasushi Takeuchi ,  Hirofumi Kaneko

发明人： Kenjiro Haraki ,  Hiroyuki Yamamoto ,  Satoshi Uemura ,  Yuji Tsunoda ,  Yasushi Takeuchi ,  Hirofumi Kaneko

IPC分类号： F27D3/00

CPC分类号： H01L21/67769 ,  H01L21/67109 ,  Y10S414/14

摘要： A vertical heat treatment apparatus includes: at least one loading and unloading part 3 and 4 for loading and unloading a carrying container 2 containing a plurality of process objects W into and from said vertical heat treatment apparatus; a first storage part 5 that stores a plurality of carrying containers loaded into said vertical heat treatment apparatus via the loading and unloading part; a heat treatment furnace 7 that accommodates a holder 6 holding a plurality of process objects at multiple levels to perform a predetermined heat treatment to the process objects; and a transfer 8 part that supports thereon a carrying container for transferring process objects between the holder and the carrying container, wherein an upper loading and unloading part 3 and a lower loading and unloading part 4 are provided as said at least one loading and unloading part, and a second storage part 20 that stores a carrying container is disposed between the upper and lower loading and unloading parts. Either one of the loading and unloading parts 3, 4 is utilized as a third storage part 30 that stores a carrying container 2. The carrying container storage capacity may be increased and the throughput may be improved.

摘要翻译： 立式热处理装置包括：至少一个装载和卸载部分3和4，用于将包含多个处理物体W的承载容器2装载到所述垂直热处理装置中并从所述立式热处理装置中卸载; 第一存储部5，其经由装卸部存储装载到所述立式热处理装置中的多个搬运容器; 容纳多个处理对象的保持器6的热处理炉7，对处理对象进行预定的热处理; 以及在其上支撑用于在保持器和承载容器之间传送处理物体的承载容器的转移件8，其中上装载部件3和下装载部件4设置为所述至少一个装载和卸载部件 并且存储运载容器的第二存储部20设置在上下装载部分之间。 加载和卸载部件3,4中的任一个被用作存储携带容器2的第三存储部件30.可以增加承载容器的存储容量并且可以提高生产量。

公开(公告)号：USD619630S1

公开(公告)日：2010-07-13

申请号：US29290247

申请日：2007-11-08

申请人： Hirofumi Kaneko

设计人： Hirofumi Kaneko

公开(公告)号：USD590359S1

公开(公告)日：2009-04-14

申请号：US29264779

申请日：2006-08-18

申请人： Hirofumi Kaneko

设计人： Hirofumi Kaneko

公开(公告)号：US06168154A

公开(公告)日：2001-01-02

申请号：US09085266

申请日：1998-05-26

申请人： Tsuyoshi Asahara ,  Hirofumi Kaneko ,  Kazuaki Sano ,  Takashi Saito ,  Hideki Mimura

发明人： Tsuyoshi Asahara ,  Hirofumi Kaneko ,  Kazuaki Sano ,  Takashi Saito ,  Hideki Mimura

IPC分类号： B65H904

CPC分类号： B65H31/3081 ,  B42C1/12 ,  B65H31/34 ,  B65H2301/42266 ,  B65H2404/725 ,  B65H2404/732 ,  B65H2404/733

摘要： A sheet handling device for accommodating, aligning and storing sheets fed from an image forming apparatus such as a copying machine is provided with front-side and rear-side aligning members for pressing the sheets stacked on a first storage means between the aligning members to stably and exactly align the stacked sheets. The front side aligning member is movable vertically or rotatable to open a sheet transferring passage so as to enable a sheet aligning mechanism in the sheet handling device to be operated in a small space, and thus, made compact. While transferring the aligned sheets from the first storage means to a second storage means, the aligned sheets are stably held by the front-side aligning member being in soft contact with the upper surface of the sheets being transferred.

摘要翻译： 用于容纳，对准和存储从诸如复印机的图像形成设备馈送的片材的片材处理装置设置有前侧和后侧对准构件，用于将堆叠在对准构件之间的第一存储装置上的片材稳定地按压 并准确对齐堆叠的纸张。 前侧对准构件可垂直或可旋转地移动以打开片材传送通道，使得片材处理装置中的片材对准机构能够在较小的空间中操作，从而使其紧凑。 在将对准的片材从第一存储装置转移到第二存储装置的同时，由正面对准部件稳定地保持对准的片材与正被转印的片材的上表面软接触。

公开(公告)号：US5957652A

公开(公告)日：1999-09-28

申请号：US22389

申请日：1998-02-12

申请人： Hideki Mimura ,  Kazuyuki Kubota ,  Takehiko Saito ,  Hirofumi Kaneko ,  Tsuyoshi Asahara ,  Kazuaki Sano

发明人： Hideki Mimura ,  Kazuyuki Kubota ,  Takehiko Saito ,  Hirofumi Kaneko ,  Tsuyoshi Asahara ,  Kazuaki Sano

IPC分类号： B42C1/12 ,  B65H31/32 ,  B65G57/00 ,  B65H29/02 ,  B65H33/04 ,  B65H39/045

CPC分类号： B42C1/12 ,  B65H31/32 ,  B65H2405/32

摘要： A sheet handling apparatus receives a plurality of sheets discharged by a discharge roller pair from an image recording apparatus on a first support member disposed below the discharge roller pair to form a stack of the sheets on the first support member and carries out handling on the stack of sheets. A second support member is supported to be movable back and forth between a projecting position where it is projected over the first support member and is able to support a rear end portion of a sheet discharged by the discharge roller pair with a front end portion of the sheet supported by the first support member and a retracted position where it is retracted from the first support member. A controller controls movement of the second support member.

摘要翻译： 片材处理装置从布置在排出辊对下方的第一支撑构件上的图像记录装置接收由排出辊对排出的多个片材，以在第一支撑构件上形成片材的堆叠，并且对堆叠进行处理 的床单。 第二支撑构件被支撑为可在其突出在第一支撑构件上的突出位置之间来回移动，并且能够支撑由排出辊对排出的片材的后端部分，其中前端部分 由第一支撑构件支撑的片材和从第一支撑构件缩回的缩回位置。 控制器控制第二支撑构件的运动。