公开(公告)号：US06584675B1

公开(公告)日：2003-07-01

申请号：US09591697

申请日：2000-06-09

Applicant: Sunder S. Rajan ,  James A. Dayton, Jr.

Inventor： Sunder S. Rajan ,  James A. Dayton, Jr.

IPC: H01Q1300

CPC classification number: H01J23/165 ,  H01J2223/24 ,  H01J2225/34 ,  Y10T29/49002 ,  Y10T29/49016

Abstract: A method for constructing thermally and dimensionally stable traveling wave tube circuits having high dimensional stability, narrow tolerances, and very small size by providing a small hollow preform constructed of a desired material which is coated with a layer of photoresist material then exposed to a UV laser to form a desired pattern mask in the photoresist layer. The pattern masked preform is then etched to create a preform having a desired shape. After shaping, the photoresist coating is stripped from said shaped preform to form a traveling wave tube circuit. Optionally the travel wave tube circuit may be polished. Additionally, the present invention contemplates an apparatus for forming small three dimensional circuit structures from preforms comprising a chuck for supporting the preform on its axis, a motor for rotating the preform, a UV laser for directing a beam onto the preform, a means for shifting the laser along said preform, and a controller for controlling the motors rate of rotation, the rate of movement along the length of the preform caused by shifting means, and whether the laser is on or off to achieve a predetermined pattern mask on the preform. Additionally, the present invention contemplates novel three dimensional structures including a very small helical traveling wave tube circuit, a ringed bar circuit structure, a finned ladder circuit structure, and a slotted finned ladder circuit structure as well as traveling wave tubes incorporating these structures.

Abstract translation: 通过提供一种由所需材料构成的小型中空预制件，该方法用于构造具有高尺寸稳定性，窄公差和非常小尺寸的热和尺寸稳定的行波管回路的方法，该中空预制件涂覆有光致抗蚀剂材料层然后暴露于UV激光 以在光致抗蚀剂层中形成期望的图案掩模。 然后对图案掩模的预成型件进行蚀刻以产生具有所需形状的预制件。 成形后，从所述成形预成型件剥离光致抗蚀剂涂层以形成行波管电路。 可选地，行波管电路可以被抛光。 另外，本发明考虑了一种用于从预成型件形成小三维电路结构的装置，包括用于在其轴线上支撑预成型件的卡盘，用于旋转预制件的马达，用于将梁引导到预成型件上的UV激光器，用于移动的装置 沿着所述预成型件的激光器，以及用于控制电机转速，由移动装置引起的沿着预成型件长度的移动速度的控制器，以及激光器是否打开或关闭以在预成型件上实现预定的图案掩模。 此外，本发明考虑了新颖的三维结构，其包括非常小的螺旋行波管电路，环形电路结构，翅片梯形电路结构和带槽翅片的梯形电路结构以及结合这些结构的行波管。