UNCOOLED INFRARED IMAGING DEVICE
    11.
    发明申请
    UNCOOLED INFRARED IMAGING DEVICE 审中-公开
    未经处理的红外成像装置

    公开(公告)号:US20130248714A1

    公开(公告)日:2013-09-26

    申请号:US13728009

    申请日:2012-12-27

    IPC分类号: H01L27/146 G01J5/20

    摘要: An uncooled infrared imaging device according to an embodiment includes: reference pixels formed on a semiconductor substrate and arranged in at least one row; and infrared detection pixels arranged in the remaining rows and detecting incident infrared rays. Each of the reference pixels includes a first cell located above a first concave portion. The first cell includes a first thermoelectric conversion unit having a first infrared absorption film; and a first thermoelectric conversion element. Each of the infrared detection pixels includes a second cell located above a second concave portion, and having a larger area than the first cell. The second cell includes: a second thermoelectric converting unit located above the second concave portion; and first and second supporting structure units supporting the second thermoelectric converting unit above the second concave portion. The second thermoelectric converting unit includes: a second infrared absorption film; and a second thermoelectric conversion element.

    摘要翻译: 根据实施例的非冷却红外成像装置包括:形成在半导体衬底上并布置在至少一行中的参考像素; 以及布置在其余行中的红外检测像素,并检测入射的红外线。 每个参考像素包括位于第一凹部上方的第一单元。 第一电池包括具有第一红外线吸收膜的第一热电转换单元; 和第一热电转换元件。 每个红外检测像素包括位于第二凹部上方的第二单元,并且具有比第一单元更大的面积。 第二单元包括:位于第二凹部上方的第二热电转换单元; 以及第一和第二支撑结构单元,其在第二凹部上方支撑第二热电转换单元。 第二热电转换单元包括:第二红外线吸收膜; 和第二热电转换元件。

    Infrared imaging device and method for manufacturing same
    12.
    发明授权
    Infrared imaging device and method for manufacturing same 有权
    红外成像装置及其制造方法

    公开(公告)号:US08749010B2

    公开(公告)日:2014-06-10

    申请号:US13426097

    申请日:2012-03-21

    IPC分类号: H01L27/146 H01L31/058

    CPC分类号: H04N5/33 G01J5/024 G01J5/10

    摘要: According to one embodiment, an infrared imaging device includes a substrate, a detecting section, an interconnection, a contact plug and a support beam. The detecting section is provided above the substrate and includes an infrared absorbing section and a thermoelectric converting section. The interconnection is provided on an interconnection region of the substrate and is configured to read the electrical signal. The contact plug is extends from the interconnection toward a connecting layer provided in the interconnection region. The contact plug is electrically connected to the interconnection and the connecting layer. The support beam includes a support beam interconnection and supports the detecting section above the substrate. The support beam interconnection transmits the electrical signal from the thermoelectric converting section to the interconnection.

    摘要翻译: 根据一个实施例,红外成像装置包括基板,检测部分,互连件,接触插塞和支撑梁。 检测部设置在基板的上方,并且包括红外线吸收部和热电转换部。 互连设置在基板的互连区域上,并被配置为读取电信号。 接触插头从互连延伸到设置在互连区域中的连接层。 接触插头电连接到互连和连接层。 支撑梁包括支撑梁互连并且支撑基板上方的检测部分。 支撑束互连将电信号从热电转换部传送到互连。

    INFRARED IMAGING DEVICE AND METHOD FOR MANUFACTURING SAME
    13.
    发明申请
    INFRARED IMAGING DEVICE AND METHOD FOR MANUFACTURING SAME 审中-公开
    红外成像装置及其制造方法

    公开(公告)号:US20110073978A1

    公开(公告)日:2011-03-31

    申请号:US12888465

    申请日:2010-09-23

    IPC分类号: H01L31/102 H01L31/18

    CPC分类号: H04N5/33 G01J5/08 G01J5/0853

    摘要: According to one embodiment, an infrared imaging device includes a substrate, an infrared absorption unit, a thermoelectric conversion unit, a support body, and an interconnection. The infrared absorption unit is provided on the substrate and apart from the substrate to absorb an infrared ray. The thermoelectric conversion unit is provided apart from the substrate and in contact with the infrared absorption unit between the infrared absorption unit and the substrate. The thermoelectric conversion unit converts a temperature change due to the infrared ray absorbed by the infrared absorption unit into an electrical signal. The support body supports the thermoelectric conversion unit on the substrate and apart from the substrate and transmits the electrical signal. The interconnection transmits the electrical signal in reading the electrical signal. The infrared absorption unit includes a protrusion provided on a rim of the infrared absorption unit to protrude toward the substrate.

    摘要翻译: 根据一个实施例,红外成像装置包括基板,红外吸收单元,热电转换单元,支撑体和互连。 红外线吸收单元设置在基板上并离开基板以吸收红外线。 热电转换单元与基板分开设置并与红外线吸收单元和基板之间的红外线吸收单元接触。 热电转换单元将由红外线吸收单元吸收的红外线的温度变化转换为电信号。 支撑体支撑基板上的热电转换单元并且与基板分开并传输电信号。 互连在读取电信号时发送电信号。 红外线吸收单元包括设置在红外线吸收单元的边缘上以朝向基板突出的突起。

    INFRARED DETECTION DEVICE
    14.
    发明申请
    INFRARED DETECTION DEVICE 有权
    红外检测装置

    公开(公告)号:US20120061791A1

    公开(公告)日:2012-03-15

    申请号:US13069610

    申请日:2011-03-23

    IPC分类号: H01L29/66

    摘要: According to one embodiment, an infrared detection device includes a detection element. The detection element includes a semiconductor substrate, a signal interconnect section, a detection cell and a support section. The semiconductor substrate is provided with a cavity on a surface of the semiconductor substrate. The signal interconnect section is provided in a region surrounding the cavity of the semiconductor substrate. The detection cell spaced from the semiconductor substrate above the cavity includes a thermoelectric conversion layer, and an absorption layer. The absorption layer is laminated with the thermoelectric conversion layer, and provided with a plurality of holes each having a shape whose upper portion is widened. The support section holds the detection cell above the cavity and connects the signal interconnect section and the detection cell.

    摘要翻译: 根据一个实施例,红外检测装置包括检测元件。 检测元件包括半导体衬底,信号互连部分,检测单元和支撑部分。 半导体衬底在半导体衬底的表面上设置有空腔。 信号互连部分设置在围绕半导体衬底的空腔的区域中。 与空腔上方的半导体衬底间隔开的检测单元包括热电转换层和吸收层。 吸收层与热电转换层层叠,并且设置有多个孔,每个孔具有上部加宽的形状。 支撑部分将检测单元保持在空腔上方并连接信号互连部分和检测单元。

    Infrared detection device
    15.
    发明授权
    Infrared detection device 有权
    红外线检测装置

    公开(公告)号:US08541861B2

    公开(公告)日:2013-09-24

    申请号:US13069610

    申请日:2011-03-23

    IPC分类号: H01L31/058

    摘要: According to one embodiment, an infrared detection device includes a detection element. The detection element includes a semiconductor substrate, a signal interconnect section, a detection cell and a support section. The semiconductor substrate is provided with a cavity on a surface of the semiconductor substrate. The signal interconnect section is provided in a region surrounding the cavity of the semiconductor substrate. The detection cell spaced from the semiconductor substrate above the cavity includes a thermoelectric conversion layer, and an absorption layer. The absorption layer is laminated with the thermoelectric conversion layer, and provided with a plurality of holes each having a shape whose upper portion is widened. The support section holds the detection cell above the cavity and connects the signal interconnect section and the detection cell.

    摘要翻译: 根据一个实施例,红外检测装置包括检测元件。 检测元件包括半导体衬底,信号互连部分,检测单元和支撑部分。 半导体衬底在半导体衬底的表面上设置有空腔。 信号互连部分设置在围绕半导体衬底的空腔的区域中。 与空腔上方的半导体衬底间隔开的检测单元包括热电转换层和吸收层。 吸收层与热电转换层层叠,并且设置有多个孔,每个孔具有上部加宽的形状。 支撑部分将检测单元保持在空腔上方并连接信号互连部分和检测单元。