公开(公告)号：US20140298884A1

公开(公告)日：2014-10-09

申请号：US14101177

申请日：2013-12-09

Applicant: MKS Instruments, Inc.

Inventor： Leonid Mindlin ,  Stephen F. Bart ,  Lei Gu

IPC: G01L27/00

CPC classification number: G01L9/0047 ,  G01L9/0072 ,  G01L27/00 ,  Y10T29/49826

Abstract: A self-calibrating pressure sensor system may measure the pressure of a gas or liquid. The system may include a pressure sensor, a reference sensor, and a drift compensation system. The pressure sensor may include a pressure-sensing flexible diaphragm with one side exposed to the gas or liquid and another side forming a wall of a sealed chamber. The reference sensor may include a reference flexible diaphragm that has two sides that are both within or exposed to the same sealed chamber. The drift compensation system may produce information that is indicative of the pressure of the gas or liquid based on the signal from the pressure sensor, and compensate for drift in this signal based on changes in the signal from the reference sensor. The pressure-sensing flexible diaphragm and the reference flexible diaphragm may be made at substantially the same time by depositing or growing a single layer of material in a single continuous step.

Abstract translation: 自校准压力传感器系统可以测量气体或液体的压力。 该系统可以包括压力传感器，参考传感器和漂移补偿系统。 压力传感器可以包括压力感测柔性膜片，其一侧暴露于气体或液体，另一侧形成密封室的壁。 参考传感器可以包括参考柔性膜片，其具有在相同的密封室内或暴露于同一密封室内的两侧。 漂移补偿系统可以基于来自压力传感器的信号产生指示气体或液体的压力的信息，并且基于来自参考传感器的信号的变化来补偿该信号中的漂移。 压力感测柔性隔膜和参考柔性隔膜可以通过在单个连续步骤中沉积或生长单层材料而在大致相同的时间进行。