摘要:
A method of subjecting a plurality of wafers to coating and beating treatments where a first boat is placed on a stage arranged in an interface section. The first boat is capable of containing the wafers stacked at intervals in a vertical direction. The stage is capable of moving in a horizontal direction, and has a plurality of positions for respectively placing a plurality of boats. The wafers are conveyed from a supply section to a coating section, and are subjected to a coating treatment one by one. The wafers, which have undergone the coating treatment, are conveyed to the interface section. The wafers, which have undergone the coating treatment, are loaded into the first boat placed on the stage, in the interface section. The first boat containing the wafers, which have undergone the coating treatment, is located at a transfer position by moving the stage. The first boat, located at a transfer position by moving the stage. The first boat, located at the transfer position, is conveyed from the stage into a heating section, and the wafers, which have undergone the coating treatment, are subjected to a heating treatment simultaneously and all together.
摘要:
The invention provides a lamp reflecting mirror in which sufficient light reflecting characteristic (surface smoothness) can be obtained without application of any undercoat layer and in which heat resisting property, luminous intensity distributing performance (dimensional stability) and form retaining characteristic (material stiffness) at the time of adjustment of the optical axis can be satisfied at the same time. The lamp reflecting mirror is produced by injection molding a composition containing 30 to 50% by weight of polyphenylene sulfide resin, 5 to 30% by weight of calcium silicate whiskers, and 20 to 65% by weight of granular inorganic filler.
摘要:
A substrate processing apparatus according to this invention includes an interface section having a first transfer member for transferring an object from a coating process section for applying a process solution to the object in accordance with a single sheet process to an object holding member, and a moving member for detachably supplying a plurality of object holding member and simultaneously moving the plurality of object holding member, and a heat-treatment section having a second transfer member for transferring the object placed on the object holding member to a heat-treatment section for heat-treating the plurality of objects, which have undergone the coating process, in accordance with a batch process.
摘要:
A color liquid crystal display unit having improved resolution with good color mixing and little directivity. The display unit includes upper and lower light-transmissible substrates disposed in opposition to one another, scanning and signal electrodes formed on opposed surfaces of the substrates, color filters formed at a predetermined repetition interval on the signal electrodes, and a liquid crystal enclosed between the upper and lower substrates. At least one of the signal electrodes is divided into plural portions, and at least a portion of another signal electrode is interleaved therewith.