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11.
公开(公告)号:US5492718A
公开(公告)日:1996-02-20
申请号:US349230
申请日:1994-12-05
申请人: James A. O'Neill , Michael L. Passow , Tina J. Cotler , Jonathan D. Chapple-Sokol , Richard A. Conti , Jyothi Singh
发明人: James A. O'Neill , Michael L. Passow , Tina J. Cotler , Jonathan D. Chapple-Sokol , Richard A. Conti , Jyothi Singh
IPC分类号: G01N21/33 , C23C16/44 , C23C16/455 , C23C16/52 , C23F4/00 , G01N21/35 , H01L21/205 , H01L21/302 , H01L21/31 , H01L31/00 , B05D3/06 , C23C8/00
CPC分类号: G01N21/3504 , C23C16/52
摘要: An apparatus for processing a layer on a workpiece includes a source of reactant fluid, a reaction chamber having a support for the workpiece and a fluid delivery apparatus for feeding an input fluid into the reaction chamber with the input fluid being utilized to process the material. An infrared sensor is adapted to cooperate with the fluid delivery apparatus for sensing the concentration of a component of the input fluid. The infrared sensor includes an infrared light source positioned to direct a beam of infrared light at an infrared light detector through the input fluid. The infrared light detector produces an electrical output signal indicative of the amount of light received by the detector and therefore not absorbed by the input fluid.
摘要翻译: 用于处理工件上的层的设备包括反应物流体源,具有用于工件的支撑的反应室和用于将输入流体输送到反应室中的流体输送装置,其中输入流体用于处理材料。 红外传感器适于与流体输送装置配合,用于感测输入流体的组分的浓度。 红外传感器包括红外光源,其被定位成通过输入流体引导红外光检测器处的红外光束。 红外光检测器产生指示由检测器接收的光量的电输出信号,因此不被输入流体吸收。