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    Microstructure and microstructure manufacture method
    11.
    发明授权
    Microstructure and microstructure manufacture method 有权
    微结构和微结构制造方法

    公开(公告)号：US07952033B2

    公开(公告)日：2011-05-31

    申请号：US12039186

    申请日：2008-02-28

    申请人： Yoshihiro Mizuno ,  Norinao Kouma ,  Hisao Okuda ,  Hiromitsu Soneda ,  Tsuyoshi Matsumoto ,  Osamu Tsuboi

    发明人： Yoshihiro Mizuno ,  Norinao Kouma ,  Hisao Okuda ,  Hiromitsu Soneda ,  Tsuyoshi Matsumoto ,  Osamu Tsuboi

    IPC分类号： H05K1/03

    CPC分类号： B81C1/00698 ,  Y10T29/49117

    摘要： A microstructure comprises a laminate structure having a first conductor, a second conductor, and an intervening insulator located between the first and the second conductors. The first conductor includes opposite faces in relation to the second conductor, side faces, and edge parts which form the boundaries of the aforementioned opposite faces and side faces. The second conductor includes an extended face extending beyond the edge parts exceeding the first conductor. The insulation film includes an area covering at least part of an edge part and/or at least part of a side face.

    摘要翻译： 微结构包括具有第一导体，第二导​​体和位于第一和第二导体之间的中间绝缘体的层压结构。 第一导体包括相对于第二导体的相对面，侧面和形成上述相对面和侧面的边界的边缘部分。 第二导体包括延伸超过超过第一导体的边缘部分的延伸面。 绝缘膜包括覆盖边缘部分的至少一部分和/或侧面的至少一部分的区域。

    MICRO OSCILLATING DEVICE
    12.
    发明申请
    MICRO OSCILLATING DEVICE 失效
    微型振荡器件

    公开(公告)号：US20100007940A1

    公开(公告)日：2010-01-14

    申请号：US12484456

    申请日：2009-06-15

    申请人： Osamu Tsuboi ,  Norinao Kouma ,  Yoshihiro Mizuno ,  Hiromitsu Soneda ,  Hisao Okuda ,  Tsuyoshi Matsumoto

    发明人： Osamu Tsuboi ,  Norinao Kouma ,  Yoshihiro Mizuno ,  Hiromitsu Soneda ,  Hisao Okuda ,  Tsuyoshi Matsumoto

    IPC分类号： G02B26/08

    CPC分类号： G02B26/0841

    摘要： A micro oscillating device includes a first frame; an oscillating portion; a first twist coupling portion and a second twist coupling portion coupling the first frame and the oscillating portion to define a first shaft center of an oscillating operation of the oscillating portion; a second frame including a support base and an arm portion extended from the support base toward the oscillating portion; and a third twist coupling portion and a fourth twist coupling portion coupling the second frame and the first frame to define a second shaft center of an oscillating operation of the first frame, wherein the third twist coupling portion is coupled to the first frame and the arm portion between the oscillating portion and the support base, and the fourth twist coupling portion is coupled to the first frame and the support base or the arm portion between the oscillating portion and the support base.

    摘要翻译： 微振荡装置包括：第一框架; 振荡部分; 第一扭转联接部分和第二扭转联接部分，其联接所述第一框架和所述振荡部分，以限定所述振荡部分的振荡操作的第一轴心; 第二框架，包括支撑基座和从支撑基部向振荡部分延伸的臂部分; 以及第三扭转联接部分和第四扭转联接部分，其联接所述第二框架和所述第一框架以限定所述第一框架的振荡操作的第二轴心，其中所述第三扭转联接部分联接到所述第一框架和所述臂 所述摆动部分与所述支撑基座之间的部分，所述第四扭转联接部分在所述振荡部分和所述支撑基座之间联接到所述第一框架和所述支撑基座或所述臂部分。

    Microstructure and microstructure manufacture method
    13.
    发明授权
    Microstructure and microstructure manufacture method 有权
    微结构和微结构制造方法

    公开(公告)号：US08471152B2

    公开(公告)日：2013-06-25

    申请号：US13091728

    申请日：2011-04-21

    申请人： Yoshihiro Mizuno ,  Norinao Kouma ,  Hisao Okuda ,  Hiromitsu Soneda ,  Tsuyoshi Matsumoto ,  Osamu Tsuboi

    发明人： Yoshihiro Mizuno ,  Norinao Kouma ,  Hisao Okuda ,  Hiromitsu Soneda ,  Tsuyoshi Matsumoto ,  Osamu Tsuboi

    IPC分类号： H05K1/03

    CPC分类号： B81C1/00698 ,  Y10T29/49117

    摘要： A microstructure comprises a laminate structure having a first conductor, a second conductor, and an intervening insulator located between the first and the second conductors. The first conductor includes opposite faces in relation to the second conductor, side faces, and edge parts which form the boundaries of the aforementioned opposite faces and side faces. The second conductor includes an extended face extending beyond the edge parts exceeding the first conductor. The insulation film includes an area covering at least part of an edge part and/or at least part of a side face.

    摘要翻译： 微结构包括具有第一导体，第二导​​体和位于第一和第二导体之间的中间绝缘体的层压结构。 第一导体包括相对于第二导体的相对面，侧面和形成上述相对面和侧面的边界的边缘部分。 第二导体包括延伸超过超过第一导体的边缘部分的延伸面。 绝缘膜包括覆盖边缘部分的至少一部分和/或侧面的至少一部分的区域。

    Micro movable element
    15.
    发明授权
    Micro movable element 失效
    微动元件

    公开(公告)号：US07903313B2

    公开(公告)日：2011-03-08

    申请号：US12397462

    申请日：2009-03-04

    申请人： Yoshihiro Mizuno ,  Norinao Kouma ,  Hisao Okuda ,  Hiromitsu Soneda ,  Tsuyoshi Matsumoto ,  Osamu Tsuboi

    发明人： Yoshihiro Mizuno ,  Norinao Kouma ,  Hisao Okuda ,  Hiromitsu Soneda ,  Tsuyoshi Matsumoto ,  Osamu Tsuboi

    IPC分类号： G02B26/08

    CPC分类号： G02B26/0841

    摘要： A micro movable element including a movable portion; first and second driving electrodes; first and second conductor portions electrically connected to the first and second driving electrodes, respectively; an intermediate insulating portion disposed between the first conductor portion and the second conductor portion; and a partly laminated structure portion including the first conductor portion, the intermediate insulating portion and the second conductor portion, wherein the first conductor portion has an opposed face making contact with the intermediate insulating portion, a side face adjacent to the opposed face and an edge portion forming the boundary between the opposed face and the side face, part of the edge portion opposed to the second conductor portion is covered with an insulating film, and parts of the first and second driving electrodes are not covered with an insulating film.

    摘要翻译： 一种微型可移动元件，包括可动部分; 第一和第二驱动电极; 分别电连接到第一和第二驱动电极的第一和第二导体部分; 设置在所述第一导体部分和所述第二导体部分之间的中间绝缘部分; 以及包括所述第一导体部分，所述中间绝缘部分和所述第二导体部分的部分层压结构部分，其中所述第一导体部分具有与所述中间绝缘部分接触的相对面，与相对面相邻的侧面和边缘 形成相对面和侧面之间的边界的部分，与第二导体部分相对的边缘部分的一部分被绝缘膜覆盖，并且第一和第二驱动电极的一部分没有被绝缘膜覆盖。

    Micro movable element and micro movable element array
    16.
    发明授权
    Micro movable element and micro movable element array 失效
    微动元件和微动元件阵列

    公开(公告)号：US07893596B2

    公开(公告)日：2011-02-22

    申请号：US12761123

    申请日：2010-04-15

    申请人： Osamu Tsuboi ,  Norinao Kouma ,  Yoshihiro Mizuno ,  Hisao Okuda ,  Hiromitsu Soneda ,  Tsuyoshi Matsumoto

    发明人： Osamu Tsuboi ,  Norinao Kouma ,  Yoshihiro Mizuno ,  Hisao Okuda ,  Hiromitsu Soneda ,  Tsuyoshi Matsumoto

    IPC分类号： H02N2/00

    CPC分类号： B81B3/0086 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/0136 ,  B81B2203/058 ,  G02B26/0841

    摘要： A micro movable device suitable for suppressing deterioration of driving characteristics, and a micro movable device array including such a micro movable device are provided. The micro movable device (X1) of the present invention includes a movable portion including a first driving electrode, a second driving electrode for generating electrostatic attraction between the first driving electrode and the second driving electrode, a first conductor portion (22c) electrically connected to the first driving electrode, a second conductor portion (22b) electrically connected to the second driving electrode, and a third conductor portion (21a) which is not electrically connected to the first and the second driving electrodes and which is bonded to the first conductor portion (22c) via an insulating film (23) and bonded to the second conductor portion (22b) via the insulating film (23).

    摘要翻译： 提供一种适用于抑制驱动特性的劣化的微型可移动装置，以及包括这种微型可移动装置的微型可移动装置阵列。 本发明的微型可移动装置（X1）包括可动部，包括第一驱动电极，用于在第一驱动电极和第二驱动电极之间产生静电吸引力的第二驱动电极，第一导体部分（22c），电连接到 第一驱动电极，与第二驱动电极电连接的第二导体部分（22b）和不与第一和第二驱动电极电连接并且连接到第一导体部分的第三导体部分（21a） （22c）经由绝缘膜（23）经由绝缘膜（23）与第二导体部（22b）接合。

    Micro oscillating device
    17.
    发明授权
    Micro oscillating device 失效
    微振荡器

    公开(公告)号：US07903315B2

    公开(公告)日：2011-03-08

    申请号：US12484456

    申请日：2009-06-15

    申请人： Osamu Tsuboi ,  Norinao Kouma ,  Yoshihiro Mizuno ,  Hiromitsu Soneda ,  Hisao Okuda ,  Tsuyoshi Matsumoto

    发明人： Osamu Tsuboi ,  Norinao Kouma ,  Yoshihiro Mizuno ,  Hiromitsu Soneda ,  Hisao Okuda ,  Tsuyoshi Matsumoto

    IPC分类号： G02B26/00

    CPC分类号： G02B26/0841

    摘要： A micro oscillating device includes a first frame; an oscillating portion; a first twist coupling portion and a second twist coupling portion coupling the first frame and the oscillating portion to define a first shaft center of an oscillating operation of the oscillating portion; a second frame including a support base and an arm portion extended from the support base toward the oscillating portion; and a third twist coupling portion and a fourth twist coupling portion coupling the second frame and the first frame to define a second shaft center of an oscillating operation of the first frame, wherein the third twist coupling portion is coupled to the first frame and the arm portion between the oscillating portion and the support base, and the fourth twist coupling portion is coupled to the first frame and the support base or the arm portion between the oscillating portion and the support base.

    摘要翻译： 微振荡装置包括：第一框架; 振荡部分; 第一扭转联接部分和第二扭转联接部分，其联接所述第一框架和所述振荡部分，以限定所述振荡部分的振荡操作的第一轴心; 第二框架，包括支撑基座和从支撑基部向振荡部分延伸的臂部分; 以及第三扭转联接部分和第四扭转联接部分，其联接所述第二框架和所述第一框架以限定所述第一框架的振荡操作的第二轴心，其中所述第三扭转联接部分联接到所述第一框架和所述臂 所述摆动部分与所述支撑基座之间的部分，所述第四扭转联接部分在所述振荡部分和所述支撑基座之间联接到所述第一框架和所述支撑基座或所述臂部分。

    Micro oscillating device and micro oscillating device array
    19.
    发明授权
    Micro oscillating device and micro oscillating device array 失效
    微振荡器和微振荡器阵列

    公开(公告)号：US07880951B2

    公开(公告)日：2011-02-01

    申请号：US12059859

    申请日：2008-03-31

    申请人： Osamu Tsuboi ,  Norinao Kouma ,  Hiromitsu Soneda ,  Hisao Okuda ,  Yoshihiro Mizuno ,  Tsuyoshi Matsumoto

    发明人： Osamu Tsuboi ,  Norinao Kouma ,  Hiromitsu Soneda ,  Hisao Okuda ,  Yoshihiro Mizuno ,  Tsuyoshi Matsumoto

    IPC分类号： G02B26/00

    CPC分类号： G02B26/0841 ,  B81B3/0086 ,  B81B2201/033 ,  B81B2201/047

    摘要： A micro oscillating device includes a frame, an oscillating part including a first drive electrode for application of a reference electric potential, and a connecting part for connecting the frame and the oscillating part to each other, where the connecting part defines an axis of an oscillating motion of the oscillating part. A second drive electrode is fixed to the frame to cooperate with the first drive electrode for generation of a driving force for the oscillating movement. The first drive electrode includes a first end extension and a second end extension separated from each other and extending in a direction crossing the axis. The second drive electrode is within a separation distance between the first and the second end extensions.

    摘要翻译： 微振荡装置包括框架，包括用于施加参考电位的第一驱动电极的振荡部分和用于将框架和振荡部分彼此连接的连接部分，其中连接部分限定摆动轴线 摆动部分的运动。 第二驱动电极固定到框架以与第一驱动电极协作以产生用于振荡运动的驱动力。 第一驱动电极包括彼此分离并沿与轴线交叉的方向延伸的第一端部延伸部和第二端部延伸部。 第二驱动电极在第一和第二端部延伸部之间的间隔距离内。

    MICRO MOVABLE ELEMENT AND MICRO MOVABLE ELEMENT ARRAY
    20.
    发明申请
    MICRO MOVABLE ELEMENT AND MICRO MOVABLE ELEMENT ARRAY 失效
    微移动元件和微动元件阵列

    公开(公告)号：US20100194235A1

    公开(公告)日：2010-08-05

    申请号：US12761123

    申请日：2010-04-15

    申请人： Osamu TSUBOI ,  Norinao Kouma ,  Yoshihiro Mizuno ,  Hisao Okuda ,  Hiromitsu Soneda ,  Tsuyoshi Matsumoto

    发明人： Osamu TSUBOI ,  Norinao Kouma ,  Yoshihiro Mizuno ,  Hisao Okuda ,  Hiromitsu Soneda ,  Tsuyoshi Matsumoto

    IPC分类号： H02N11/00

    CPC分类号： B81B3/0086 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/0136 ,  B81B2203/058 ,  G02B26/0841

    摘要： A micro movable device suitable for suppressing deterioration of driving characteristics, and a micro movable device array including such a micro movable device are provided. The micro movable device (X1) of the present invention includes a movable portion including a first driving electrode, a second driving electrode for generating electrostatic attraction between the first driving electrode and the second driving electrode, a first conductor portion (22c) electrically connected to the first driving electrode, a second conductor portion (22b) electrically connected to the second driving electrode, and a third conductor portion (21a) which is not electrically connected to the first and the second driving electrodes and which is bonded to the first conductor portion (22c) via an insulating film (23) and bonded to the second conductor portion (22b) via the insulating film (23).

    摘要翻译： 提供一种适用于抑制驱动特性的劣化的微型可移动装置，以及包括这种微型可移动装置的微型可移动装置阵列。 本发明的微型可移动装置（X1）包括可动部，包括第一驱动电极，用于在第一驱动电极和第二驱动电极之间产生静电吸引力的第二驱动电极，第一导体部分（22c），电连接到 第一驱动电极，与第二驱动电极电连接的第二导体部分（22b）和不与第一和第二驱动电极电连接并且连接到第一导体部分的第三导体部分（21a） （22c）经由绝缘膜（23）经由绝缘膜（23）与第二导体部（22b）接合。