公开(公告)号：US08242006B2

公开(公告)日：2012-08-14

申请号：US11962494

申请日：2007-12-21

申请人： Stanton Earl Weaver ,  Stacey Joy Kennerly ,  Marco Francesco Aimi

发明人： Stanton Earl Weaver ,  Stacey Joy Kennerly ,  Marco Francesco Aimi

IPC分类号： H01L21/76 ,  H01L21/44 ,  H01L21/28 ,  H01L21/4763

CPC分类号： H01L23/3677 ,  B32B2038/0092 ,  B32B2457/14 ,  H01L21/76898 ,  H01L2924/0002 ,  H01L2924/00

摘要： A smooth electrode is provided. The smooth electrode includes at least one metal layer having thickness greater than about 1 micron; wherein an average surface roughness of the smooth electrode is less than about 10 nm.

摘要翻译： 提供平滑的电极。 平滑电极包括至少一个厚度大于约1微米的金属层; 其中平滑电极的平均表面粗糙度小于约10nm。

公开(公告)号：US20100242628A1

公开(公告)日：2010-09-30

申请号：US12411878

申请日：2009-03-26

申请人： Aaron Jay Knobloch ,  David William Vernooy ,  Weizhuo Li ,  David Mulford Shaddock ,  Stacey Joy Kennerly

发明人： Aaron Jay Knobloch ,  David William Vernooy ,  Weizhuo Li ,  David Mulford Shaddock ,  Stacey Joy Kennerly

IPC分类号： G01L1/24 ,  B29D11/00

CPC分类号： G01L9/0079 ,  G01L9/0007

摘要： A high-temperature pressure sensor is provided. The sensor includes a quartz substrate with a cavity etched on one side. A reflective coating is deposited on at least a portion of the cavity. The sensor further includes a ferrule section coupled to the quartz substrate with the cavity therebetween. The cavity exists in a vacuum, and cavity gap is formed between the reflective metal coating and a surface of the ferrule. The sensor also includes an optical fiber enclosed by the ferrule section and extending from the cavity gap to an opposing end of the ferrule section and a metal casing surrounding the ferrule section and the quartz substrate with an opening for said optical fiber extending therefrom. The pressure applied to the quartz substrate changes the dimensions of the cavity gap and a reflected signal from the reflective coating is processed as a pressure.

摘要翻译： 提供高温压力传感器。 该传感器包括具有在一侧蚀刻的腔的石英衬底。 反射涂层沉积在空腔的至少一部分上。 传感器还包括耦合到石英基板的套圈部分，其间具有空腔。 空腔存在于真空中，并且在反射金属涂层和套圈的表面之间形成腔间隙。 传感器还包括由套圈部分包围并从套圈部分的相对端延伸的光纤，以及围绕套圈部分和石英衬底的金属壳体，所述金属壳体具有从其延伸的所述光纤的开口。 施加到石英衬底的压力改变了空腔间隙的尺寸，并且将来自反射涂层的反射信号作为压力进行处理。

公开(公告)号：US07411670B2

公开(公告)日：2008-08-12

申请号：US11400863

申请日：2006-04-10

申请人： Anis Zribi ,  Ayan Banerjee ,  Shivappa Ningappa Goravar ,  Shankar (nmn) Chandrasekaran ,  Sandip Maity ,  Glenn Scott Claydon ,  Stacey Joy Kennerly ,  Todd Ryan Tolliver ,  David Cecil Hays ,  Sheila Neumann Tandon ,  Long Que ,  Christopher Fred Keimel

发明人： Anis Zribi ,  Ayan Banerjee ,  Shivappa Ningappa Goravar ,  Shankar (nmn) Chandrasekaran ,  Sandip Maity ,  Glenn Scott Claydon ,  Stacey Joy Kennerly ,  Todd Ryan Tolliver ,  David Cecil Hays ,  Sheila Neumann Tandon ,  Long Que ,  Christopher Fred Keimel

IPC分类号： G01J3/44

CPC分类号： G01J3/44 ,  G01J3/02 ,  G01J3/0291 ,  G01N21/65

摘要： A photonic crystal based collection probe is provided. The probe includes a photonic crystal configured to guide and condition a beam of Raman scattered photons. Further, the device includes a spectrograph in optical communication with the photonic crystal and configured to receive Raman scattering from the photonic crystal. The device may be employed in a Raman spectrometer system.

摘要翻译： 提供了一种基于光子晶体的收集探针。 探针包括配置为引导和调节拉曼散射光子束的光子晶体。 此外，该装置包括与光子晶体光学通信并被配置为从光子晶体接收拉曼散射的光谱仪。 该装置可以用在拉曼光谱仪系统中。

公开(公告)号：US20120080214A1

公开(公告)日：2012-04-05

申请号：US11962494

申请日：2007-12-21

申请人： Stanton Earl Weaver ,  Stacey Joy Kennerly ,  Marco Francesco Aimi

发明人： Stanton Earl Weaver ,  Stacey Joy Kennerly ,  Marco Francesco Aimi

IPC分类号： H01B3/00 ,  B32B38/10 ,  B32B38/08 ,  H01B5/00

CPC分类号： H01L23/3677 ,  B32B2038/0092 ,  B32B2457/14 ,  H01L21/76898 ,  H01L2924/0002 ,  H01L2924/00

摘要： A smooth electrode is provided. The smooth electrode includes at least one metal layer having thickness greater than about 1 micron; wherein an average surface roughness of the smooth electrode is less than about 10 nm.

摘要翻译： 提供平滑的电极。 平滑电极包括至少一个厚度大于约1微米的金属层; 其中平滑电极的平均表面粗糙度小于约10nm。

公开(公告)号：US20080232745A1

公开(公告)日：2008-09-25

申请号：US11687931

申请日：2007-03-19

申请人： Aaron Jay Knobloch ,  David Mulford Shaddock ,  David Richard Esler ,  Marco Francesco Aimi ,  Douglas S. Byrd ,  David Robert O'Connor ,  Stacey Joy Kennerly

发明人： Aaron Jay Knobloch ,  David Mulford Shaddock ,  David Richard Esler ,  Marco Francesco Aimi ,  Douglas S. Byrd ,  David Robert O'Connor ,  Stacey Joy Kennerly

IPC分类号： G02B6/36 ,  B29C65/02 ,  B29C65/08

CPC分类号： G02B6/3624 ,  B23K26/21 ,  B23K2101/04 ,  B23K2101/36 ,  G02B6/3833 ,  Y10T156/10

摘要： A method for assembling a Fabry-Perot interferometer includes depositing a first metal layer on an end portion of a ferrule, depositing a second metal layer on a back portion of a die, placing the first metal layer and the second metal layer in contact with each other with respective first and second orifices aligned with respect to each other, and bonding the ferrule to the die by thermo compression. The resulting interferometer includes a glass die with a cavity, a silicon diaphragm disposed over the opening of the cavity and bonded to the glass die, a ferrule bonded to the glass die by thermo compression with the first and second orifices being aligned to each other, and an optical fiber inserted through the other end of the ferrule in direct contact to a back portion of the die and aligned with the first orifice.

摘要翻译： 用于组装法布里 - 珀罗干涉仪的方法包括在套圈的端部上沉积第一金属层，在模具的后部上沉积第二金属层，将第一金属层和第二金属层与每个金属层接触 另一个，相应的第一和第二孔相对于彼此对准，并且通过热压接将套圈接合到管芯。 所得到的干涉仪包括具有空腔的玻璃模具，设置在空腔的开口上并结合到玻璃模具的硅膜片，通过第一和第二孔彼此对准的热压而与玻璃模具接合的套圈， 以及插入穿过套管的另一端的光纤直接接触模具的后部并与第一孔对准。

公开(公告)号：US07313965B2

公开(公告)日：2008-01-01

申请号：US11509397

申请日：2006-08-25

申请人： Vinayak Tilak ,  Jie Jiang ,  David Mulford Shaddock ,  Stacey Joy Kennerly ,  David Richard Esler ,  Aaron Jay Knobloch

发明人： Vinayak Tilak ,  Jie Jiang ,  David Mulford Shaddock ,  Stacey Joy Kennerly ,  David Richard Esler ,  Aaron Jay Knobloch

IPC分类号： G01L9/00

CPC分类号： G01H9/00 ,  G01L1/044 ,  G01L1/148 ,  G01L1/16 ,  G01L9/0052 ,  G01L9/0073 ,  G01L9/0075 ,  G01L9/008 ,  G01L9/085 ,  G01L19/0681

摘要： A high-temperature pressure sensor that includes a dielectric layer. The pressure sensor also includes a substrate capable of withstanding temperatures greater than 450° C. without entering a phase change, at least one semiconducting material deposited on the sapphire substrate, and a silicon dioxide layer deposited over the semiconducting material. One aspect of the pressure sensor includes a second semiconducting material.

摘要翻译： 一种包括电介质层的高温压力传感器。 压力传感器还包括能够耐受大于450℃的温度而不进入相变的衬底，沉积在蓝宝石衬底上的至少一种半导体材料和沉积在半导体材料上的二氧化硅层。 压力传感器的一个方面包括第二半导体材料。

公开(公告)号：US07966887B2

公开(公告)日：2011-06-28

申请号：US12411878

申请日：2009-03-26

申请人： Aaron Jay Knobloch ,  David William Vernooy ,  Weizhuo Li ,  David Mulford Shaddock ,  Stacey Joy Kennerly

发明人： Aaron Jay Knobloch ,  David William Vernooy ,  Weizhuo Li ,  David Mulford Shaddock ,  Stacey Joy Kennerly

IPC分类号： G01L9/00

CPC分类号： G01L9/0079 ,  G01L9/0007

摘要： A high-temperature pressure sensor is provided. The sensor includes a quartz substrate with a cavity etched on one side. A reflective coating is deposited on at least a portion of the cavity. The sensor further includes a ferrule section coupled to the quartz substrate with the cavity therebetween. The cavity exists in a vacuum, and cavity gap is formed between the reflective metal coating and a surface of the ferrule. The sensor also includes an optical fiber enclosed by the ferrule section and extending from the cavity gap to an opposing end of the ferrule section and a metal casing surrounding the ferrule section and the quartz substrate with an opening for said optical fiber extending therefrom. The pressure applied to the quartz substrate changes the dimensions of the cavity gap and a reflected signal from the reflective coating is processed as a pressure.

摘要翻译： 提供高温压力传感器。 该传感器包括具有在一侧蚀刻的腔的石英衬底。 反射涂层沉积在空腔的至少一部分上。 传感器还包括耦合到石英基板的套圈部分，其间具有空腔。 空腔存在于真空中，并且在反射金属涂层和套圈的表面之间形成腔间隙。 传感器还包括由套圈部分包围并从套圈部分的相对端延伸的光纤，以及围绕套圈部分和石英衬底的金属壳体，所述金属壳体具有从其延伸的所述光纤的开口。 施加到石英衬底的压力改变了空腔间隙的尺寸，并且将来自反射涂层的反射信号作为压力进行处理。

公开(公告)号：US07505128B2

公开(公告)日：2009-03-17

申请号：US11400948

申请日：2006-04-10

申请人： Anis Zribi ,  Stacey Joy Kennerly ,  Glenn Scott Claydon ,  Long Que ,  Ayan Banerjee ,  Shankar Chandrasekaran ,  Shivappa Ningappa Goravar ,  David Cecil Hays

发明人： Anis Zribi ,  Stacey Joy Kennerly ,  Glenn Scott Claydon ,  Long Que ,  Ayan Banerjee ,  Shankar Chandrasekaran ,  Shivappa Ningappa Goravar ,  David Cecil Hays

IPC分类号： G01J3/44

CPC分类号： G01J3/02 ,  G01J3/0208 ,  G01J3/0256 ,  G01J3/0272 ,  G01J3/0291 ,  G01J3/26 ,  G01J3/44 ,  G01N21/65 ,  G01N21/658 ,  G01N2201/0221

摘要： An integrated spectrometer instrument, including an optical source formed on a chip, the optical source configured to generate an incident optical beam upon a sample to be measured. Collection optics formed on the chip are configured to receive a scattered optical beam from the sample, and filtering optics formed on the chip are configured to remove elastically scattered light from the scattered optical beam at a wavelength corresponding to the optical source. A tunable filter formed on the chip is configured to pass selected wavelengths of the scattered optical beam, and a photo detector device formed on the chip is configured to generate an output signal corresponding to the intensity of photons passed through the tunable filter.

摘要翻译： 一种集成光谱仪器，包括形成在芯片上的光源，所述光源被配置为在待测样品上产生入射光束。 形成在芯片上的采集光学元件被配置为接收来自样品的散射光束，并且形成在芯片上的滤光光学元件被配置为以对应于光源的波长去除来自散射光束的弹性散射光。 形成在芯片上的可调滤波器被配置为通过散射光束的选定波长，并且形成在芯片上的光检测器装置被配置为产生对应于通过可调谐滤波器的光子的强度的输出信号。

公开(公告)号：US20080239306A1

公开(公告)日：2008-10-02

申请号：US11693277

申请日：2007-03-29

申请人： William Scott Sutherland ,  Anis Zribi ,  Long Que ,  Glenn Scott Claydon ,  Stacey Joy Kennerly ,  Ayan Banerjee ,  Shivappa Ningappa Goravar ,  Shankar Chandrasekaran ,  David Cecil Hays ,  Victor Samper ,  Dirk Lange ,  Marko Baller ,  Min-Yi Shih ,  Sandip Maity

发明人： William Scott Sutherland ,  Anis Zribi ,  Long Que ,  Glenn Scott Claydon ,  Stacey Joy Kennerly ,  Ayan Banerjee ,  Shivappa Ningappa Goravar ,  Shankar Chandrasekaran ,  David Cecil Hays ,  Victor Samper ,  Dirk Lange ,  Marko Baller ,  Min-Yi Shih ,  Sandip Maity

IPC分类号： G01J3/44 ,  G01N21/55 ,  G02B26/08

CPC分类号： G01N21/65 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0218 ,  G01J3/0232 ,  G01J3/0237 ,  G01J3/027 ,  G01J3/0289 ,  G01J3/10 ,  G01J3/1895 ,  G01J3/44 ,  G02B26/02 ,  G02B26/0808 ,  G02B26/0816

摘要： A system and method for managing optical power for controlling thermal alteration of a sample undergoing spectroscopic analysis is provided. The system includes a moveable laser beam generator for irradiating the sample and a beam shaping device for moving and shaping the laser beam to prevent thermal overload or build up in the sample. The moveable laser beam generator includes at least one beam shaping device selected from the group consisting of at least one optical lens, at least one optical diffractor, at least one optical path difference modulator, at least one moveable mirror, at least one Micro-Electro-Mechanical Systems (MEMS) integrated circuit (IC), and/or a liquid droplet. The system also includes an at least two degree of freedom (2 DOF) moveable substrate platform and a controller for controlling the laser beam generator and the substrate platform, and for analyzing light reflected from the sample.

摘要翻译： 提供了一种用于管理用于控制进行光谱分析的样品的热变化的光功率的系统和方法。 该系统包括用于照射样品的可移动激光束发生器和用于移动和成形激光束的光束整形装置，以防止样品中的热过载或积聚。 可移动激光束发生器包括至少一个光束成形装置，其选自由至少一个光学透镜，至少一个光学衍射器，至少一个光程差调制器，至少一个可动反射镜，至少一个微电极 机电系统（MEMS）集成电路（IC）和/或液滴。 该系统还包括至少两个自由度（2自由度）可移动基板平台和用于控制激光束发生器和基板平台的控制器，并用于分析从样品反射的光。