公开(公告)号：US20200013658A1

公开(公告)日：2020-01-09

申请号：US16363430

申请日：2019-03-25

Applicant: Samsung Display Co., Ltd.

Inventor： Junhyeuk KO ,  Euigyu KIM ,  Minchul SONG ,  Byungik KONG ,  Jaesuk MOON ,  Soohyun MIN ,  Seungjin LEE ,  Seungju HONG

IPC: H01L21/683 ,  H01L51/56 ,  C23C14/04 ,  C23C14/50

Abstract: An electrostatic chuck unit includes a first wiring portion configured to generate a relatively weak electrostatic force and a second wiring portion configured to generate a relatively strong electrostatic force.