INTEGRATED OPTICAL SENSOR OF THE SINGLE-PHOTON AVALANCHE PHOTODIODE TYPE, AND MANUFACTURING METHOD

    公开(公告)号:US20210151616A1

    公开(公告)日:2021-05-20

    申请号:US17097661

    申请日:2020-11-13

    Inventor: Didier DUTARTRE

    Abstract: An integrated optical sensor includes a photon-detection module of a single-photon avalanche photodiode type. The detection module includes a semiconductive active zone in a substrate. The semiconductive active zone includes a region that contains germanium with a percentage between 3% and 10%. This percentage range is advantageous because it makes it possible to obtain a material firstly containing germanium (which in particular increases the efficiency of the sensor in the infrared or near infrared domain) and secondly having no or very few dislocations(which facilitates the implementation of a functional sensor in integrated form).

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