ORGANIC THIN FILM DEPOSITION SYSTEM AND METHOD FOR DEPOSITING ORGANIC FILM
    14.
    发明申请
    ORGANIC THIN FILM DEPOSITION SYSTEM AND METHOD FOR DEPOSITING ORGANIC FILM 审中-公开
    有机薄膜沉积系统及沉积有机膜的方法

    公开(公告)号:US20140261184A1

    公开(公告)日:2014-09-18

    申请号:US14288337

    申请日:2014-05-27

    CPC classification number: H01L51/56 C23C14/12 C23C14/243

    Abstract: An organic thin film deposition system is disclosed. The organic thin film deposition system includes: a plurality of crucibles each having an inlet capable of selectively being opened and closed; an organic composite material made up of two or more organic materials and having an initial composition ratio, the organic composite material for placing in the plurality of crucibles; and a transferring unit for controlling a position of the plurality of crucibles.

    Abstract translation: 公开了一种有机薄膜沉积系统。 有机薄膜沉积系统包括:多个坩埚,每个坩埚具有能够选择性地打开和关闭的入口; 由两种或更多种有机材料构成并具有初始组成比的有机复合材料,用于放置在多个坩埚中的有机复合材料; 以及用于控制所述多个坩埚的位置的转印单元。

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