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公开(公告)号:US10043803B2
公开(公告)日:2018-08-07
申请号:US15372876
申请日:2016-12-08
Applicant: Samsung Electronics Co., Ltd.
Inventor: Wonkeun Chung , Gigwan Park , Huyong Lee , TaekSoo Jeon , Sangjin Hyun
IPC: H01L29/06 , H01L29/43 , H01L29/49 , H01L27/092 , H01L29/423
Abstract: A semiconductor device includes a substrate having an active pattern thereon, a gate electrode intersecting the active pattern, and a spacer on a sidewall of the gate electrode. The gate electrode includes a first metal pattern adjacent to the active pattern. The first metal pattern has a first portion parallel to the sidewall and a second portion parallel to the substrate. A top surface of the first portion has a descent in a direction from the spacer towards the second portion.