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公开(公告)号:US08815710B2
公开(公告)日:2014-08-26
申请号:US12988156
申请日:2009-04-17
IPC分类号: H01L29/04 , H01L21/20 , H01L21/306 , C30B25/20 , C30B29/06 , H01L21/02 , C30B33/00 , C30B25/18
CPC分类号: H01L21/30625 , C30B25/186 , C30B25/20 , C30B29/06 , C30B33/00 , H01L21/02381 , H01L21/02532 , H01L21/02587 , H01L21/02609
摘要: Disclosed is a wafer having a good haze level in spite of the fact that the inclination angle of {110} plane in the wafer is small. Also disclosed is a method for producing a silicon epitaxial wafer, which comprises the steps of: growing an epitaxial layer on a silicon single crystal substrate having a main surface of {110} plane of which an off-angle is less than 1 degree; and polishing the surface of the epitaxial layer until the surface of the epitaxial layer has a haze level of 0.18 ppm or less (as measured by SP2 at a DWO mode).
摘要翻译: 公开了具有良好雾度水平的晶片,尽管晶片中{110}面的倾斜角小。 还公开了一种用于制造硅外延晶片的方法,其包括以下步骤:在具有偏离角小于1度的{110}面的主表面的硅单晶衬底上生长外延层; 并抛光外延层的表面,直到外延层的表面具有0.18ppm或更小的雾度水平(在DWO模式下由SP2测量)。
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公开(公告)号:US20100111817A1
公开(公告)日:2010-05-06
申请号:US12596293
申请日:2008-04-18
申请人: Noboru Taniguchi , Shuzo Tokumitsu , Tomohiro Kuroha , Kenichi Tokuhiro , Akio Nakashima , Keita Kobayashi , Shinji Nakahara
发明人: Noboru Taniguchi , Shuzo Tokumitsu , Tomohiro Kuroha , Kenichi Tokuhiro , Akio Nakashima , Keita Kobayashi , Shinji Nakahara
CPC分类号: A61L9/18 , B01J21/063 , B01J27/135 , B01J35/004 , B01J35/1019 , B01J37/26 , C01G23/00 , C01G23/047 , C01P2002/54 , C01P2006/12
摘要: A titanium oxide photocatalyst that is capable of improving a decomposition rate, and a method for producing the same are provided. The titanium oxide photocatalyst of the present invention is a titanium oxide photocatalyst containing at least an anatase-type titanium oxide and fluorine, wherein a content of the fluorine is 2.5 wt % to 3.5 wt %, and 90 wt % or more of the fluorine is chemically bonded to the anatase-type titanium oxide.
摘要翻译: 提供能够提高分解率的氧化钛光催化剂及其制造方法。 本发明的氧化钛光催化剂是至少含有锐钛矿型氧化钛和氟的氧化钛光催化剂,其中氟的含量为2.5〜3.5重量%,氟的90重量%以上为 化学键合到锐钛矿型氧化钛。
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公开(公告)号:US20100047590A1
公开(公告)日:2010-02-25
申请号:US12311595
申请日:2007-09-26
申请人: Emi Ueda , Keita Kobayashi , Shinji Nakahara
发明人: Emi Ueda , Keita Kobayashi , Shinji Nakahara
CPC分类号: C09C1/043 , B32B17/06 , B82Y30/00 , C01G9/02 , C01P2002/52 , C01P2002/82 , C01P2002/84 , C01P2004/04 , C01P2004/64 , C01P2004/84 , C01P2006/12 , C08K3/22 , C09D7/62 , C09D7/67 , C09D11/03
摘要: The object of the present invention is to provide an ultrafine zinc oxide having a sufficient visible light transmittance in addition to an infrared ray shielding ability and conductivity, and also to provide a production method thereof. The ultrafine zinc oxide contains an element having a valence number of 3 or more, bears a metal compound on the surface, and has an average primary particle diameter of 0.1 μm or smaller.
摘要翻译: 本发明的目的是提供除了红外线屏蔽能力和导电性之外具有足够的可见光透射率的超细氧化锌,并且还提供其制造方法。 超细氧化锌含有价数为3以上的元素,表面具有金属化合物,平均一次粒径为0.1μm以下。
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公开(公告)号:US09340900B2
公开(公告)日:2016-05-17
申请号:US11850599
申请日:2007-09-05
申请人: Shinji Nakahara , Masato Sakai , Takayuki Dohi
发明人: Shinji Nakahara , Masato Sakai , Takayuki Dohi
IPC分类号: H01L21/304 , C30B25/20 , C30B25/02 , C30B23/02 , C30B33/00 , H01L21/02 , H01L21/768 , C30B29/06
CPC分类号: C30B25/20 , C30B23/02 , C30B25/02 , C30B29/06 , C30B33/005 , H01L21/02024 , H01L21/76814
摘要: A method of producing an epitaxial wafer, comprising: performing epitaxial growth of silicon on a main surface of a wafer made of a silicon single crystal; performing surface flattening pretreatment of a main surface of the wafer using a treatment liquid of a predetermined composition at a temperature of 100° C. or less, thereby forming an oxide film of a predetermined thickness while removing particles adhered on the main surface of the wafer; and performing a surface polishing step where the main surface of the wafer is mirror polished.
摘要翻译: 一种制造外延晶片的方法,包括:在由硅单晶构成的晶片的主表面上进行硅的外延生长; 使用预定组成的处理液在100℃以下的温度下对晶片的主表面进行表面平整预处理,从而形成预定厚度的氧化膜,同时除去附着在晶片主表面上的颗粒 ; 并进行表面抛光步骤,其中晶片的主表面被镜面抛光。
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公开(公告)号:US08580148B2
公开(公告)日:2013-11-12
申请号:US10549585
申请日:2004-03-12
申请人: Seiko Hirayama , Keita Kobayashi , Junya Ishii , Mizuho Wada , Shinji Nakahara
发明人: Seiko Hirayama , Keita Kobayashi , Junya Ishii , Mizuho Wada , Shinji Nakahara
IPC分类号: C09K11/77
CPC分类号: C09K11/7734
摘要: It is an object of the present invention to provide an alkaline earth metal aluminate phosphor having good heat resistance and durability against vacuum ultraviolet rays and ultraviolet rays, among others, and a method of producing the same.An alkaline earth metal aluminate phosphor containing bivalent europium as an activator, which contains at least one element (e) selected from the group consisting of indium, tungsten, niobium, bismuth, molybdenum, tantalum, thallium and lead.
摘要翻译: 本发明的目的是提供一种对真空紫外线和紫外线具有良好的耐热性和耐久性的碱土金属铝酸盐荧光体及其制造方法。 含有二价铕作为活化剂的碱土金属铝酸盐荧光体,其含有选自铟,钨,铌,铋,钼,钽,铊和铅中的至少一种元素(e)。
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公开(公告)号:US08152919B2
公开(公告)日:2012-04-10
申请号:US13164511
申请日:2011-06-20
申请人: Takayuki Dohi , Shinji Nakahara , Masaya Sakurai , Masato Sakai
发明人: Takayuki Dohi , Shinji Nakahara , Masaya Sakurai , Masato Sakai
CPC分类号: H01L21/02634 , C30B25/20 , C30B29/06 , H01L21/02381 , H01L21/02433 , H01L21/02532 , H01L21/02609 , H01L22/00 , H01L29/045 , H01L29/32 , H01L2924/0002 , Y10S117/902 , H01L2924/00
摘要: An epitaxial silicon wafer is provided in which an epitaxial layer is grown on a silicon wafer having a plane inclined from a {110} plane of a silicon single crystal as a main surface. In the silicon wafer for growing the epitaxial layer thereon, an inclination angle azimuth of the {110} plane is in the range of 0 to 45 degrees as measured from a orientation parallel to the {110} plane toward a direction. With such an arrangement, LPDs of 100 nm or less can be measured from a {110} wafer that has a carrier mobility (including the hole and electron mobilities) higher than that of a {100} wafer. Also, surface roughness degradation in the {110} wafer can be suppressed. Also, the surface state of the {110} wafer can be measured. Further, a quality evaluation can be performed on the {110} wafer.
摘要翻译: 提供了一种外延硅晶片,其中外延层生长在具有从作为主表面的硅单晶的{110}面倾斜的平面的硅晶片上。 在用于在其上生长外延层的硅晶片中,从平行于{110}平面朝向<100>的<100>取向测量,{110}面的倾斜角方位角在0至45度的范围内, 方向。 通过这样的布置,可以从具有高于{100}晶片的载流子迁移率(包括空穴和电子迁移率)的{110}晶片测量100nm或更小的LPD。 此外,可以抑制{110}晶片中的表面粗糙度劣化。 此外,可以测量{110}晶片的表面状态。 此外,可以对{110}晶片进行质量评估。
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公开(公告)号:US08148289B2
公开(公告)日:2012-04-03
申请号:US12596293
申请日:2008-04-18
申请人: Noboru Taniguchi , Shuzo Tokumitsu , Tomohiro Kuroha , Kenichi Tokuhiro , Akio Nakashima , Keita Kobayashi , Shinji Nakahara
发明人: Noboru Taniguchi , Shuzo Tokumitsu , Tomohiro Kuroha , Kenichi Tokuhiro , Akio Nakashima , Keita Kobayashi , Shinji Nakahara
IPC分类号: B01J27/06 , B01J23/00 , C01G23/047
CPC分类号: A61L9/18 , B01J21/063 , B01J27/135 , B01J35/004 , B01J35/1019 , B01J37/26 , C01G23/00 , C01G23/047 , C01P2002/54 , C01P2006/12
摘要: A titanium oxide photocatalyst that is capable of improving a decomposition rate, and a method for producing the same are provided. The titanium oxide photocatalyst of the present invention is a titanium oxide photocatalyst containing at least an anatase-type titanium oxide and fluorine, wherein a content of the fluorine is 2.5 wt % to 3.5 wt %, and 90 wt % or more of the fluorine is chemically bonded to the anatase-type titanium oxide.
摘要翻译: 提供能够提高分解率的氧化钛光催化剂及其制造方法。 本发明的氧化钛光催化剂是至少含有锐钛矿型氧化钛和氟的氧化钛光催化剂,其中氟的含量为2.5重量%〜3.5重量%,氟的90重量%以上为 化学键合到锐钛矿型氧化钛。
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公开(公告)号:US20080057323A1
公开(公告)日:2008-03-06
申请号:US11850591
申请日:2007-09-05
申请人: Takayuki Dohi , Shinji Nakahara , Masaya Sakurai , Masato Sakai
发明人: Takayuki Dohi , Shinji Nakahara , Masaya Sakurai , Masato Sakai
CPC分类号: H01L21/02634 , C30B25/20 , C30B29/06 , H01L21/02381 , H01L21/02433 , H01L21/02532 , H01L21/02609 , H01L22/00 , H01L29/045 , H01L29/32 , H01L2924/0002 , Y10S117/902 , H01L2924/00
摘要: An epitaxial silicon wafer is provided in which an epitaxial layer is grown on a silicon wafer having a plane inclined from a {110} plane of a silicon single crystal as a main surface. In the silicon wafer for growing the epitaxial layer thereon, an inclination angle azimuth of the {110} plane is in the range of 0 to 45 degrees as measured from a orientation parallel to the {110} plane toward a direction. With such an arrangement, LPDs of 100 nm or less can be measured from a {110} wafer that has a carrier mobility (including the hole and electron mobilities) higher than that of a {100} wafer. Also, surface roughness degradation in the {110} wafer can be suppressed. Also, the surface state of the {110} wafer can be measured. Further, a quality evaluation can be performed on the {110} wafer.
摘要翻译: 提供了一种外延硅晶片,其中外延层生长在具有从作为主表面的硅单晶的{110}面倾斜的平面的硅晶片上。 在用于在其上生长外延层的硅晶片中,从平行于{110}面朝向<110>面的<100>取向测量,{110}面的倾斜角方位角在0至45度的范围内, 方向。 通过这样的布置,可以从具有高于{100}晶片的载流子迁移率(包括空穴和电子迁移率)的{110}晶片测量100nm或更小的LPD。 此外,可以抑制{110}晶片中的表面粗糙度劣化。 此外,可以测量{110}晶片的表面状态。 此外,可以对{110}晶片进行质量评估。
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公开(公告)号:US5569445A
公开(公告)日:1996-10-29
申请号:US368203
申请日:1994-12-29
申请人: Yoshiki Fukatsu , Shinji Nakahara , Youichi Yamada , Hideji Yamamoto , Tatsuya Hida , Mizuho Wada
发明人: Yoshiki Fukatsu , Shinji Nakahara , Youichi Yamada , Hideji Yamamoto , Tatsuya Hida , Mizuho Wada
CPC分类号: G11B5/70642 , C01G49/06 , G11B5/70615 , G11B5/708 , C01P2002/10 , C01P2002/70 , C01P2004/03 , C01P2004/10 , C01P2004/54 , C01P2004/62 , C01P2006/12 , C01P2006/42
摘要: Disclosed herein is fine acicular .alpha.-ferric oxide which has the crystallite diameter (D.sub.1014) in the direction perpendicular to the (1014) plane and the crystallite diameter (D.sub.1120) in the direction perpendicular to the (1120) plane such that their ratio D.sub.1014 /D.sub.1120 is in the range of 1-2, and also has a specific surface area of 40-50 m.sup.2 g. Disclosed also herein is fine acicular .alpha.-ferric oxide which has the crystallite diameter (D.sub.1014) in the direction perpendicular to the (1014) plane and the crystallite diameter (D.sub.1120) in the direction perpendicular to the (1120) plane such that their ratio D.sub.1014 /D.sub.1120 is the range of 1-2, and also has an average aspect ratio of 10-15 and a specific surface area of 20-40 m.sup.2 /g. They are produced by wet process including the step of hydrothermal reaction.
摘要翻译: 本文公开了在垂直于(10 + E,ovs 1 + EE 4)面的方向上具有微晶直径(D10 + E,ov1 + EE4)的细针状α-氧化铁和微晶直径(D11 + E,ovs 2 + EE 0)在垂直于(11 + E,ovs 2 + EE 0)平面的方向上使得它们的比率D10 + E,ov1 + EE4 / D11 + E,ov2 + EE0 在1-2的范围内,还具有40-50m 2 g的比表面积。 此处还公开了在垂直于(10 + E,ovs 1 + EE 4)面和微晶直径(D11)的方向上具有微晶直径(D10 + E,ov1 + EE4)的精细针状α-氧化铁 + E,ovs 2 + EE 0)在垂直于(11 + E,ovs 2 + EE 0)平面的方向上使得它们的比率D10 + E,ov1 + EE4 / D11 + E,ov2 + EE0 为1-2的范围,平均纵横比为10-15,比表面积为20-40m 2 / g。 它们通过湿法制备,包括水热反应步骤。
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