公开(公告)号：US06867467B2

公开(公告)日：2005-03-15

申请号：US10329390

申请日：2002-12-27

申请人： Woo Seok Yang ,  Sung Weon Kang ,  Yun Tae Kim ,  Sung Hae Jung

发明人： Woo Seok Yang ,  Sung Weon Kang ,  Yun Tae Kim ,  Sung Hae Jung

IPC分类号： H01H59/00 ,  H01P1/12 ,  H01L29/82

CPC分类号： H01H59/0009 ,  H01G5/40 ,  H01P1/127

摘要： The present invention relates to a capacitive micro-electro-mechanical switch and method of manufacturing the same. In the capacitive micro-electro-mechanical switch for use in the radio frequency (RF) and the microwave driven by the electrostatic force, a capacitor of a 3-dimensional structure is formed on a signal transmission line. An ON capacitance is increased without increasing an capacitor area while preventing an increase in an OFF capacitance using the capacitor. Thus, an ON/OFF capacitance ratio of the capacitive micro-electro-mechanical switch can be increased and insertion loss and isolation characteristic could be improved.

摘要翻译： 本发明涉及一种电容式微机电开关及其制造方法。 在用于射频（RF）的电容微机电开关和由静电力驱动的微波中，在信号传输线上形成三维结构的电容器。 在不增加电容器面积的同时增加ON电容，同时防止使用电容器的OFF电容的增加。 因此，可以提高电容式微机电开关的导通/截止电容比，并且可以提高插入损耗和隔离特性。

公开(公告)号：US06750742B2

公开(公告)日：2004-06-15

申请号：US10331592

申请日：2002-12-30

申请人： Sung Weon Kang ,  Sung Hae Jung ,  Woo Seok Yang ,  Yun Tae Kim

发明人： Sung Weon Kang ,  Sung Hae Jung ,  Woo Seok Yang ,  Yun Tae Kim

IPC分类号： H01P110

CPC分类号： H01P1/127

摘要： Provided is a radio frequency device using a micro-electronic-mechanical system (MEMS) technology that can be applied to a mobile communication area by reducing the operating voltage, while increasing the operating speed. The RF device of the present research includes: a substrate; a first electrode which is mounted on the substrate and forms an actuator, part of the first electrode not contacting the substrate; and a second electrode which is apart in a regular space from the substrate and forms an actuator, part of the second electrode being overlapped with the first electrode, wherein the first electrode and the second electrode contact each other at a contact point by an electrostatic attractive force generated between the two electrodes.

摘要翻译： 提供了一种使用微电子机械系统（MEMS）技术的射频装置，其可以通过降低工作电压同时提高操作速度而应用于移动通信区域。 本研究的RF器件包括：衬底; 第一电极，其安装在所述基板上并形成致动器，所述第一电极的一部分不接触所述基板; 以及第二电极，其与所述基板在规则的空间中分开并形成致动器，所述第二电极的一部分与所述第一电极重叠，其中所述第一电极和所述第二电极在接触点处通过静电吸引 在两个电极之间产生的力。