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公开(公告)号：US20190293972A1
公开(公告)日：2019-09-26
申请号：US16318058
申请日：2017-07-14
Applicant: TDK CORPORATION
Inventor： Kenji SASAKI , Shinji IWATSUKA
Abstract: A dielectric thin film-applied substrate capable of suppressing occurrence of cracks even when the film thickness of the lithium niobate film is made, e.g., equal to or larger than 1 μm. The dielectric thin film-applied substrate includes a single crystal substrate and a dielectric thin film which is made of c-axis oriented lithium niobate and epitaxially formed on a main surface of the single crystal substrate. The dielectric thin film has a twin crystal structure including a first and crystals existing at a position obtained by rotating the first crystal 180° centered on the c-axis. In pole figure measurement by an X-ray diffraction method, the ratio between a first diffraction intensity corresponding to the first crystal and a second diffraction intensity corresponding to the second crystal is equal to or higher than 0.5 and equal to or lower than 2.0. Distortions accumulated inside the lithium niobate film are alleviated and occurrences of cracks accompanying increases in the film thickness are suppressed.
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公开(公告)号：US20150138619A1
公开(公告)日：2015-05-21
申请号：US14528183
申请日：2014-10-30
Applicant: TDK CORPORATION
Inventor： Shinji IWATSUKA , Kenji SASAKI , Masamichi TANIGUCHI
CPC classification number: G02F1/0316 , G02F1/035 , G02F1/225 , G02F2201/07
Abstract: An optical modulator includes a single-crystal substrate, a lithium niobate film formed on a main surface of the single-crystal substrate, the lithium niobate film being an epitaxial film and having a ridge, a buffer layer formed on the ridge, a first electrode formed on the buffer layer, and a second electrode separated from the first electrode, the second electrode being in contact with the lithium niobate film.
Abstract translation: 光调制器包括单晶衬底，在单晶衬底的主表面上形成的铌酸锂膜，铌酸锂膜是外延膜并具有脊，形成在脊上的缓冲层，第一电极 形成在所述缓冲层上的第二电极和与所述第一电极分离的第二电极，所述第二电极与所述铌酸锂膜接触。
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