公开(公告)号：US06865953B2

公开(公告)日：2005-03-15

申请号：US10387461

申请日：2003-03-14

申请人： Kouji Tsukada ,  Jiro Sakata ,  Kentaro Mizuno ,  Yoshiteru Omura ,  Yumi Masuoka ,  Shoji Hashimoto

发明人： Kouji Tsukada ,  Jiro Sakata ,  Kentaro Mizuno ,  Yoshiteru Omura ,  Yumi Masuoka ,  Shoji Hashimoto

IPC分类号： G01L1/18 ,  G01L1/22 ,  G01L9/00 ,  G01L23/10 ,  H01L29/84 ,  G01B7/16 ,  H01L41/04

CPC分类号： G01L23/10 ,  G01L1/18 ,  G01L1/2262 ,  G01L9/0052

摘要： A pressure sensor has a housing having a first block and a second block provided therein. A force to be measured applies upon a upper face of the first block. An upper face of the second block makes contact with a base face of the first block. Piezoresistive elements are formed within the base face of the first block. The resistance values of these piezoresistive elements change as contacting pressure between the first block and the second block changes. A first electrode is formed on an upper face of the first block. A second electrode is formed on a base face of the second block. Electrical characteristics between the first electrode and the second electrode change following change in the contacting pressure between the first block and the second block.

摘要翻译： 压力传感器具有壳体，其具有设置在其中的第一块和第二块。 要测量的力应用于第一块的上表面。 第二块的上表面与第一块的基面接触。 压阻元件形成在第一块的基面内。 当第一块和第二块之间的接触压力改变时，这些压阻元件的电阻值改变。 第一电极形成在第一块的上表面上。 第二电极形成在第二块的基面上。 第一电极和第二电极之间的电特性随着第一块和第二块之间的接触压力的变化而改变。

公开(公告)号：US06915702B2

公开(公告)日：2005-07-12

申请号：US10300617

申请日：2002-11-21

申请人： Yoshiteru Omura ,  Kentaro Mizuno ,  Kouji Tsukada ,  Jiro Sakata ,  Norio Fujitsuka

发明人： Yoshiteru Omura ,  Kentaro Mizuno ,  Kouji Tsukada ,  Jiro Sakata ,  Norio Fujitsuka

IPC分类号： G01B7/16 ,  G01L1/18 ,  G01L1/22

CPC分类号： G01L1/2293 ,  G01L1/18

摘要： Force detection devices may have high detection precision and may prevent current leakage through a strain gage 126 to the outside. For example, a force detection block 120 may include a semiconductor substrate 122, a first insulating layer 124 and a semiconductor layer 126 (strain gage). The strain gage 126 preferably includes a site where resistance changes in accordance with the stress acting thereon. The strain gage 126 preferably constitutes at least a portion of a ridge 130 projects from the surface of the force detection block 120. A force transmission block 138 may be attached to a top surface of the ridge 130. The width of the first insulating layer 124 is preferably greater than the width of the semiconductor layer 126.

摘要翻译： 力检测装置可以具有高检测精度并且可以防止通过应变计126向外部的电流泄漏。 例如，力检测块120可以包括半导体衬底122，第一绝缘层124和半导体层126（应变片）。 应变计126优选地包括其中电阻根据作用在其上的应力而变化的部位。 应变计126优选地构成从力检测块120的表面突出的隆起130的至少一部分。 力传递块138可以附接到脊130的顶表面。 第一绝缘层124的宽度优选地大于半导体层126的宽度。

公开(公告)号：US06607643B2

公开(公告)日：2003-08-19

申请号：US09794069

申请日：2001-02-28

申请人： Hideaki Takahashi ,  Keiichi Saji ,  Jiro Sakata ,  Tadashi Inaba ,  Tadashi Nakamura ,  Yumi Masuoka ,  Toshitaka Saito ,  Akio Tanaka

发明人： Hideaki Takahashi ,  Keiichi Saji ,  Jiro Sakata ,  Tadashi Inaba ,  Tadashi Nakamura ,  Yumi Masuoka ,  Toshitaka Saito ,  Akio Tanaka

IPC分类号： G01N27407

CPC分类号： G01N27/419 ,  G01N33/0037 ,  Y02A50/245

摘要： A NOx gas detecting apparatus including an oxygen pumping cell for removing oxygen from a measurement gas, and a NOx detecting cell positioned downstream from the oxygen pumping cell to detect concentration of NOx in the measurement gas, the NOx detecting cell being configured to measure current which flows when oxygen generated from reducing NOx is pumped, wherein the NOx detecting cell has a NOx detecting cathode made of an electrode material including at least one alloy selected from the group consisting of a Pt-Pd alloy, a Pt-Au-Pd alloy, and a Pt-Pd-Rh alloy.

摘要翻译： 一种NOx气体检测装置，其包括用于从测量气体中除氧的氧气泵浦单元，以及位于所述氧气泵浦单元下游的NOx检测单元，以检测所述测量气体中的NOx浓度，所述NOx检测单元被配置为测量 在从还原NOx产生的氧气被泵送时流动，其中，所述NOx检测单元具有由电极材料制成的NOx检测阴极，所述电极材料包括选自由Pt-Pd合金，Pt-Au-Pd合金， 和Pt-Pd-Rh合金。

公开(公告)号：US06268298B1

公开(公告)日：2001-07-31

申请号：US09265528

申请日：1999-03-09

申请人： Atsushi Komura ,  Takeshi Kuzuhara ,  Noriyuki Iwamori ,  Manabu Koike ,  Jiro Sakata ,  Hirofumi Funahashi ,  Kenji Nakashima ,  Masahiko Ishii

发明人： Atsushi Komura ,  Takeshi Kuzuhara ,  Noriyuki Iwamori ,  Manabu Koike ,  Jiro Sakata ,  Hirofumi Funahashi ,  Kenji Nakashima ,  Masahiko Ishii

IPC分类号： H01L2131

CPC分类号： H01L21/02238 ,  H01L21/02255 ,  H01L21/02337 ,  H01L21/2253 ,  H01L21/31662 ,  H01L21/76202 ,  H01L21/76218 ,  H01L21/823878

摘要： In a method of manufacturing a semiconductor device, after performing ion-implantation and before forming an oxide film, a silicon substrate is disposed within a furnace to undergo a heat treatment at a temperature equal to or higher than 950° C. for a specific time period (equal to or longer than 15 minutes). When performing the heat treatment and when raising a temperature up to the heat treatment temperature, oxygen is supplied together with nitrogen gas (inert gas). A supply amount of oxygen is controlled to be equal to or less than 5% when raising the temperature up to the heat treatment temperature, and to be equal to or less than 2% when performing the heat treatment. After the heat treatment, the oxidation film is formed. As a result, crystal defects (OSFs) are prevented from being produced on the silicon substrate surface.

摘要翻译： 在制造半导体器件的方法中，在进行离子注入和形成氧化膜之前，将硅衬底设置在炉内，以在950℃以上的温度下进行特定时间的热处理 期间（等于或长于15分钟）。 进行热处理时，升温至热处理温度时，与氮气（惰性气体）一起供给氧。 当将温度升高到热处理温度时，供氧量控制在5％以下，进行热处理时为0.2％以下。 热处理后，形成氧化膜。 结果，防止在硅衬底表面上产生晶体缺陷（OSF）。

公开(公告)号：US4583996A

公开(公告)日：1986-04-22

申请号：US667745

申请日：1984-11-02

申请人： Jiro Sakata ,  Minoru Yamamoto

发明人： Jiro Sakata ,  Minoru Yamamoto

IPC分类号： B01D53/22 ,  B01D53/26 ,  B01D53/38 ,  B01D53/74 ,  B01D71/04

CPC分类号： B01D71/04 ,  B01D53/22 ,  B01D53/228 ,  B01D53/268 ,  B01D63/02 ,  B01D2313/18

摘要： This invention provides an apparatus for separating condensable gas, which is provided with, as a membrane for separating condensable gas, an inorganic porous membrane which has a layer having a multiplicity of micropores communicating in the thickness direction of the membrane and having a pore radius, as determined by the nitrogen absorption method, of up to 50 .ANG., and preferably up to 20 .ANG., and which has an affinity for said condensable gas or is hydrophilic. This apparatus yields highly selective permeation of condensable gas, such as water vapor or organic gases.

摘要翻译： 本发明提供了一种用于分离可冷凝气体的装置，其具有作为用于分离可冷凝气体的膜的无机多孔膜，所述无机多孔膜具有在膜的厚度方向上连通并具有孔半径的多个微孔的层， 如通过氮气吸收法测定的，高达50安培姆，优选高达20安培姆，并且对所述可冷凝气体具有亲和力或者是亲水性的。 该装置产生可冷凝气体（例如水蒸汽或有机气体）的高度选择性渗透。

公开(公告)号：US4481808A

公开(公告)日：1984-11-13

申请号：US234069

申请日：1981-02-12

申请人： Jiro Sakata ,  Masana Hirai ,  Minoru Yamamoto

发明人： Jiro Sakata ,  Masana Hirai ,  Minoru Yamamoto

IPC分类号： G01N13/00 ,  G01N7/10 ,  G01N13/04 ,  G01N33/28

CPC分类号： G01N7/10 ,  G01N33/2852

摘要： Method and apparatus for determination of the concentration of a component in a solution, such as ethyl alcohol in gasohol, acetic acid in hexane-acetic acid solution, or the like. Such determination is made with ease and accuracy based on a rate of pressure change caused in a closed container due to mass transfer occurring between two liquids through porous material.

摘要翻译： 用于测定溶液中的组分浓度的方法和装置，如乙醇在汽油中，乙酸在己烷 - 乙酸溶液中等。 基于由于通过多孔材料在两种液体之间发生质量传递而在密闭容器中引起的压力变化的速率，这种确定是容易且准确的。