公开(公告)号：US06800532B2

公开(公告)日：2004-10-05

申请号：US10620613

申请日：2003-07-17

申请人： Teruhito Ohnishi ,  Takeshi Takagi ,  Akira Asai ,  Taizo Fujii ,  Mitsuo Sugiura ,  Yoshihisa Minami

发明人： Teruhito Ohnishi ,  Takeshi Takagi ,  Akira Asai ,  Taizo Fujii ,  Mitsuo Sugiura ,  Yoshihisa Minami

IPC分类号： H01L218222

CPC分类号： H01L29/93 ,  H01L27/0664 ,  H01L27/0808

摘要： A variable capacitor includes an N+ layer including a variable capacitance region, a P+ layer epitaxially grown on the N+ layer and formed from a SiGe film and a Si film, and a P-type electrode. An NPN-HBT (Hetero-junction Bipolar Transistor) includes a collector diffusion layer formed simultaneously with the N+ layer of the variable capacitor, a collector layer, and a Si/SiGe layer epitaxially grown simultaneously with the P+ layer of the variable capacitor. Since a depletion layer formed in a PN junction of the variable capacitor can extend entirely across the N+ layer, reduction in variation range of the capacitance can be suppressed.

摘要翻译： 可变电容器包括N +层，包括可变电容区，在N +层上外延生长并由SiGe膜和Si膜形成的P +层和P型电极。 NPN-HBT（异质结双极晶体管）包括与可变电容器的N +层同时形成的集电极扩散层，集电极层和与P +层同时外延生长的Si / SiGe层 的可变电容器。 由于形成在可变电容器的PN结中的耗尽层可以完全延伸穿过N +层，所以可以抑制电容的变化范围的减小。