SCANNER MODEL REPRESENTATION WITH TRANSMISSION CROSS COEFFICIENTS
    11.
    发明申请
    SCANNER MODEL REPRESENTATION WITH TRANSMISSION CROSS COEFFICIENTS 有权
    具有传输交叉系数的扫描仪模型表示

    公开(公告)号:US20100141925A1

    公开(公告)日:2010-06-10

    申请号:US12608460

    申请日:2009-10-29

    IPC分类号: G03B27/32

    摘要: The present invention relates to a method for simulating aspects of a lithographic process. According to certain aspects, the present invention uses transmission cross coefficients to represent the scanner data and models. According to other aspects, the present invention enables sensitive data regarding various scanner subsystems to be hidden from third party view, while providing data and models useful for accurate lithographic simulation.

    摘要翻译: 本发明涉及一种用于模拟光刻工艺的方面的方法。 根据某些方面,本发明使用传输交叉系数来表示扫描仪数据和模型。 根据其他方面,本发明使得关于各种扫描器子系统的敏感数据能够从第三方视图中隐藏起来,同时提供用于精确光刻模拟的数据和模型。