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38 条记录 (耗时 0.014 秒)

    PROCESS TO MAKE PMR WRITER WITH LEADING EDGE SHIELD (LES) AND LEADING EDGE TAPER (LET)
    21.
    发明申请
    PROCESS TO MAKE PMR WRITER WITH LEADING EDGE SHIELD (LES) AND LEADING EDGE TAPER (LET) 失效
    具有导向边缘屏蔽（LES）和导线边缘（LET）的PMR写入的过程

    公开(公告)号：US20120125886A1

    公开(公告)日：2012-05-24

    申请号：US12954485

    申请日：2010-11-24

    申请人： Liubo Hong ,  Fenglin Liu ,  Qiping Zhong ,  Honglin Zhu

    发明人： Liubo Hong ,  Fenglin Liu ,  Qiping Zhong ,  Honglin Zhu

    IPC分类号： G01R1/16

    CPC分类号： G11B5/315 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/3163

    摘要： Methods for fabrication of leading edge shields and tapered magnetic poles with a tapered leading edge are provided. The leading edge shield may be formed by utilizing a CMP stop layer. The CMP stop layer may aid in preventing over polishing of the magnetic material. For the tapered magnetic poles with a tapered leading edge, a magnetic material is deposited on a planarized surface, a patterned resist material is formed, and exposed magnetic material is etched to form at least one tapered surface of the magnetic material.

    摘要翻译： 提供了具有锥形前缘的前缘屏蔽和锥形磁极的制造方法。 前缘屏蔽可以通过利用CMP停止层形成。 CMP停止层可以有助于防止磁性材料的过度抛光。 对于具有锥形前缘的锥形磁极，将磁性材料沉积在平坦化表面上，形成图案化的抗蚀剂材料，并且暴露的磁性材料被蚀刻以形成磁性材料的至少一个锥形表面。

    Magnetic write head having a wider trailing edge pole structure
    24.
    发明授权
    Magnetic write head having a wider trailing edge pole structure 失效
    具有较宽后缘极结构的磁写头

    公开(公告)号：US07382577B2

    公开(公告)日：2008-06-03

    申请号：US11229160

    申请日：2005-09-16

    申请人： Cherng-Chyi Han ,  Mao-Min Chen ,  Po Kang Wang ,  Fenglin Liu

    发明人： Cherng-Chyi Han ,  Mao-Min Chen ,  Po Kang Wang ,  Fenglin Liu

    IPC分类号： G11B5/39 ,  G11B5/187

    CPC分类号： G11B5/3163 ,  G11B5/3116 ,  G11B5/3967 ,  Y10T29/49032

    摘要： A trimmed upper pole piece for a magnetic write head, said pole piece having a tapered profile that is widest at its trailing edge. Such a pole piece is capable of writing narrow tracks with sharply and well defined patterns and minimal overwriting of adjacent tracks. The necessary taper is produced by using NiCr, NiFeCr, Rh or Ru as write gap filling materials which have an etch rate which is substantially equal to the etch rate of the other layers forming the pole piece and are highly corrosion resistant. As a result, the write gap does not protrude to mask the effects of the ion-beam etch used to form the taper.

    摘要翻译： 用于磁写头的经修剪的上极片，所述极片具有在其后缘处最宽的锥形轮廓。 这样的极片能够以清晰明确的图案和相邻轨迹的最小重写来写入窄轨道。 通过使用NiCr，NiFeCr，Rh或Ru作为写入间隙填充材料产生必要的锥度，其具有基本上等于形成极片的其它层的蚀刻速率的蚀刻速率并且具有高耐腐蚀性。 结果，写入间隙不突出以掩盖用于形成锥形的离子束蚀刻的效果。

    Process for manufacturing a perpendicular magnetic recording writer pole with nonmagnetic bevel
    26.
    发明授权
    Process for manufacturing a perpendicular magnetic recording writer pole with nonmagnetic bevel 失效
    制造具有非磁性斜面的垂直磁记录刻录机的方法

    公开(公告)号：US08628672B1

    公开(公告)日：2014-01-14

    申请号：US13535091

    申请日：2012-06-27

    申请人： Weimin Si ,  Ying Hong ,  Zhigang Bai ,  Yunhe Huang ,  Fenglin Liu ,  Hong Zhang ,  Jikou Zhou ,  Xiaoyu Yang ,  Yuan Yao ,  Iulica Zana ,  Feng Liu ,  Ling Wang

    发明人： Weimin Si ,  Ying Hong ,  Zhigang Bai ,  Yunhe Huang ,  Fenglin Liu ,  Hong Zhang ,  Jikou Zhou ,  Xiaoyu Yang ,  Yuan Yao ,  Iulica Zana ,  Feng Liu ,  Ling Wang

    IPC分类号： B44C1/22

    CPC分类号： G11B5/315 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3163

    摘要： A method for fabricating a magnetic recording transducer having a magnetic writer pole with a short effective throat height is provided. In an embodiment, a writer structure comprising a magnetic writer pole having a trailing bevel and a nonmagnetic stack on the top surface of the writer pole is provided. A dielectric write gap layer comprising alumina is deposited over the trailing bevel section and the nonmagnetic stack; and at least one etch stop layer is deposited over the dielectric write gap layer. A layer of nonmagnetic fill material is deposited over the etch stop layer and to form a nonmagnetic bevel by performing a dry etch process. The etch stop layer(s) are removed from the short throat section; and a trailing shield is deposited over the short throat section, nonmagnetic bevel, and nonmagnetic stack top surface.

    摘要翻译： 提供一种制造具有具有短的有效喉部高度的磁性写入极的磁记录换能器的方法。 在一个实施例中，提供了一种写入器结构，其包括在写入器极的顶表面上具有后斜面和非磁性堆叠的磁性写入极。 包含氧化铝的电介质写入间隙层沉积在后斜面部分和非磁性层上; 并且至少一个蚀刻停止层沉积在电介质写间隙层上。 一层非磁性填充材料沉积在蚀刻停止层上并通过执行干法蚀刻工艺形成非磁性斜面。 蚀刻停止层从短喉部分移除; 并且尾部屏蔽层沉积在短喉部分，非磁性斜面和非磁性堆叠顶表面上。

    METHOD FOR MANUFACTURING A PERPENDICULAR MAGNETIC WRITE POLE HAVING A WRITE POLE AND TRAILING SHIELD WITH A TAPERED TRAILING GAP
    27.
    发明申请
    METHOD FOR MANUFACTURING A PERPENDICULAR MAGNETIC WRITE POLE HAVING A WRITE POLE AND TRAILING SHIELD WITH A TAPERED TRAILING GAP 审中-公开
    用于制作具有写入轨迹的具有写入点和跟踪屏蔽的贯通磁性写入点的方法

    公开(公告)号：US20120154951A1

    公开(公告)日：2012-06-21

    申请号：US12975010

    申请日：2010-12-21

    申请人： Wen-Chien D. Hsiao ,  Fenglin Liu ,  Aron Pentek ,  Yi Zheng

    发明人： Wen-Chien D. Hsiao ,  Fenglin Liu ,  Aron Pentek ,  Yi Zheng

    IPC分类号： G11B5/187 ,  G11B5/255 ,  G11B5/127

    CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3146 ,  G11B5/3163

    摘要： A method for manufacturing a magnetic write head having a that has a write pole with a tapered trailing edge in a pole tip region, and a trailing shield that has a leading edge that tapers away from the write pole at an angle that is greater than that taper angle of the trailing edge of the write pole. The magnetic head has a step feature with a front edge that is recessed from the ABS. In one embodiment a magnetic wedge is formed over the tapered surface of the write pole. In another embodiment, a non-magnetic bump is formed over a first tapered portion of the write pole adjacent to the front edge of the step feature, and a non-magnetic wedge is formed over a second tapered portion of the write pole and extends from the non-magnetic bump to the air bearing surface.

    摘要翻译： 一种用于制造具有在磁极尖端区域具有锥形后缘的写入极的磁性写入头的方法，以及具有与所述写入磁极成角度大于所述磁极尖端的角度的前缘从所述写入磁极分离的前缘的后挡板。 写极后缘的锥角。 磁头具有台阶特征，其前缘从ABS凹入。 在一个实施例中，磁楔形成在写极的锥形表面上。 在另一个实施例中，非磁性凸块形成在与步极特征的前边缘相邻的写磁极的第一锥形部分上方，并且非磁性楔形成在写极的第二锥形部分之上并且从 非磁性凸块到空气轴承表面。

    PERPENDICULAR WRITE HEAD WITH WRAP AROUND SHIELD AND CONFORMAL SIDE GAP
    28.
    发明申请
    PERPENDICULAR WRITE HEAD WITH WRAP AROUND SHIELD AND CONFORMAL SIDE GAP 有权
    平头写字头与封面和合适的边缝

    公开(公告)号：US20120125885A1

    公开(公告)日：2012-05-24

    申请号：US12954458

    申请日：2010-11-24

    申请人： YINGJIAN CHEN ,  Shiwen Huang ,  Fenglin Liu ,  Kyusik Shin

    发明人： YINGJIAN CHEN ,  Shiwen Huang ,  Fenglin Liu ,  Kyusik Shin

    IPC分类号： G11B21/00

    CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/23 ,  G11B5/315 ,  G11B5/3163

    摘要： A perpendicular write head having a wrap around shield and a conformal side gap. In fabricating the write head, the leading edge shield may be chemical mechanical polished down to a level that is substantially even with a chemical mechanical polishing stop layer. Because the leading edge shield and the chemical mechanical polishing stop layer are used as RIE stop for trench RIE, a fully conformal side shield may be formed with a LTE/LES.

    摘要翻译： 垂直写头，其具有围绕屏蔽的保护层和保形侧间隙。 在制造写入头时，前缘屏蔽可以化学机械抛光到基本上均匀的化学机械抛光停止层的水平。 由于前缘屏蔽和化学机械抛光停止层用作沟槽RIE的RIE停止，所以可以用LTE / LES形成完全共形的侧屏蔽。

    Perpendicular magnetic recording head with a side write shield
    30.
    发明授权
    Perpendicular magnetic recording head with a side write shield 有权
    垂直磁记录头带有侧写屏蔽

    公开(公告)号：US07898773B2

    公开(公告)日：2011-03-01

    申请号：US11345892

    申请日：2006-02-02

    申请人： Cherng-Chyi Han ,  Min Li ,  Fenglin Liu ,  Jiun-Ting Lee

    发明人： Cherng-Chyi Han ,  Min Li ,  Fenglin Liu ,  Jiun-Ting Lee

    IPC分类号： G11B5/127

    CPC分类号： G11B5/3163 ,  G11B5/11 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/315 ,  Y10T29/49032 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

    摘要： A perpendicular magnetic recording (PMR) head is fabricated with a pole tip shielded laterally by a separated pair of side shields and shielded from above by an upper shield. The side shields are formed by a RIE process using specific gases applied to a shield layer through a masking layer formed of material that has a slower etch rate than the shield material. A masking layer of Ta, Ru/Ta, TaN or Ti, formed on a shield layer of NiFe and using RIE gases of CH3OH, CO or NH3 or their combinations, produces the desired result. The differential in etch rates maintains the opening dimension within the mask and allows the formation of a wedge-shaped trench within the shield layer that separates the layer into two shields. The pole tip is then plated within the trench and, being aligned by the trench, acquires the wedge-shaped cross-section of the trench. An upper shield is then formed above the side shields and pole.

    摘要翻译： 垂直磁记录（PMR）头被制造成具有通过分离的一对侧屏蔽横向屏蔽的极尖并且被上屏蔽从上面屏蔽。 侧面屏蔽是通过RIE工艺形成的，其使用通过掩模层施加到屏蔽层上的特定气体，该屏蔽层由具有比屏蔽材料更慢的蚀刻速率的材料形成。 形成在NiFe的屏蔽层上并使用CH 3 OH，CO或NH 3的RIE气体或其组合的Ta，Ru / Ta，TaN或Ti的掩蔽层产生期望的结果。 蚀刻速率的差异保持了掩模内的开口尺寸，并且允许在屏蔽层内形成将该层分成两个屏蔽层的楔形沟槽。 然后将磁极尖端电镀在沟槽内，并且通过沟槽对准，获得沟槽的楔形横截面。 然后在侧屏和极上方形成上屏蔽。