Variable resistance non-volatile memory cells and methods of fabricating same
    23.
    发明授权
    Variable resistance non-volatile memory cells and methods of fabricating same 失效
    可变电阻非易失性存储单元及其制造方法

    公开(公告)号:US07803654B2

    公开(公告)日:2010-09-28

    申请号:US11862779

    申请日:2007-09-27

    IPC分类号: H01L21/00

    摘要: Methods of fabricating integrated circuit memory cells and integrated circuit memory cells are disclosed. Formation of an integrated circuit memory cell include forming a first electrode on a substrate. An insulation layer is formed on the substrate with an opening that exposes at least a portion of a first electrode. An amorphous variable resistivity material is formed on the first electrode and extends away from the first electrode along sidewalls of the opening. A crystalline variable resistivity material is formed in the opening on the amorphous variable resistivity material. A second electrode is formed on the crystalline variable resistivity material.

    摘要翻译: 公开了制造集成电路存储单元和集成电路存储单元的方法。 集成电路存储单元的形成包括在基板上形成第一电极。 在基板上形成具有露出第一电极的至少一部分的开口的绝缘层。 非晶可变电阻率材料形成在第一电极上,并沿着开口的侧壁远离第一电极延伸。 在非晶可变电阻率材料的开口中形成结晶可变电阻率材料。 在结晶可变电阻率材料上形成第二电极。

    METHODS OF FORMING CONTACT STRUCTURES AND SEMICONDUCTOR DEVICES FABRICATED USING CONTACT STRUCTURES
    24.
    发明申请
    METHODS OF FORMING CONTACT STRUCTURES AND SEMICONDUCTOR DEVICES FABRICATED USING CONTACT STRUCTURES 有权
    形成接触结构的方法和使用接触结构织造的半导体器件

    公开(公告)号:US20100144138A1

    公开(公告)日:2010-06-10

    申请号:US12627810

    申请日:2009-11-30

    IPC分类号: H01L21/768

    CPC分类号: H01L21/76816 H01L27/24

    摘要: Provided are methods of forming contact structures and semiconductor devices fabricated using the contact structures. The formation of a contact structure can include forming a first molding pattern on a substrate, forming an insulating layer to cover at least a sidewall of the first molding pattern, forming a second molding pattern to cover a sidewall of the insulating layer and spaced apart from the first molding pattern, removing a portion of the insulating layer between the first and second molding patterns to form a hole, and forming an insulating pattern between the first and second molding patterns, and forming a contact pattern in the hole.

    摘要翻译: 提供了形成使用接触结构制造的接触结构和半导体器件的方法。 接触结构的形成可以包括在基底上形成第一模制图案,形成绝缘层以覆盖至少第一模制图案的侧壁,形成第二模制图案以覆盖绝缘层的侧壁并与 第一模制图案,去除第一和第二模制图案之间的绝缘层的一部分以形成孔,并且在第一和第二模制图案之间形成绝缘图案,并在孔中形成接触图案。

    PHASE CHANGE MEMORY DEVICE AND METHOD FOR FORMING THE SAME
    28.
    发明申请
    PHASE CHANGE MEMORY DEVICE AND METHOD FOR FORMING THE SAME 审中-公开
    相变存储器件及其形成方法

    公开(公告)号:US20080272355A1

    公开(公告)日:2008-11-06

    申请号:US12110206

    申请日:2008-04-25

    IPC分类号: H01L47/00 H01L21/00

    摘要: A memory device using a phase change material and a method for forming the same are disclosed. One embodiment of a memory device includes a first insulating layer provided on a substrate and defining an opening; a first conductor including a first portion and a second portion, the first portion provided on a bottom of the opening, the second portion being continuously provided along a sidewall of the opening; a variable resistor connected to the second portion of the first conductor and provided along the sidewall of the opening; and a second conductor provided on the variable resistor.

    摘要翻译: 公开了使用相变材料的记忆装置及其形成方法。 存储器件的一个实施例包括设置在衬底上并限定开口的第一绝缘层; 包括第一部分和第二部分的第一导体,所述第一部分设置在所述开口的底部上,所述第二部分沿着所述开口的侧壁连续设置; 连接到第一导体的第二部分并沿着开口的侧壁设置的可变电阻器; 以及设置在可变电阻器上的第二导体。

    VARIABLE RESISTANCE NON-VOLATILE MEMORY CELLS AND METHODS OF FABRICATING SAME
    29.
    发明申请
    VARIABLE RESISTANCE NON-VOLATILE MEMORY CELLS AND METHODS OF FABRICATING SAME 失效
    可变电阻非挥发性记忆细胞及其制备方法

    公开(公告)号:US20080265236A1

    公开(公告)日:2008-10-30

    申请号:US11862779

    申请日:2007-09-27

    IPC分类号: H01L45/00

    摘要: Methods of fabricating integrated circuit memory cells and integrated circuit memory cells are disclosed. Formation of an integrated circuit memory cell include forming a first electrode on a substrate. An insulation layer is formed on the substrate with an opening that exposes at least a portion of a first electrode. An amorphous variable resistivity material is formed on the first electrode and extends away from the first electrode along sidewalls of the opening. A crystalline variable resistivity material is formed in the opening on the amorphous variable resistivity material. A second electrode is formed on the crystalline variable resistivity material.

    摘要翻译: 公开了制造集成电路存储单元和集成电路存储单元的方法。 集成电路存储单元的形成包括在基板上形成第一电极。 在基板上形成具有露出第一电极的至少一部分的开口的绝缘层。 非晶可变电阻率材料形成在第一电极上,并沿着开口的侧壁远离第一电极延伸。 在非晶可变电阻率材料的开口中形成结晶可变电阻率材料。 在结晶可变电阻率材料上形成第二电极。