公开(公告)号：US5153674A

公开(公告)日：1992-10-06

申请号：US652150

申请日：1991-02-07

Applicant: Friedrich Bobel ,  Norbert Bauer

Inventor： Friedrich Bobel ,  Norbert Bauer

IPC: G01N21/64 ,  G01N21/85 ,  H01L21/00

CPC classification number: G01N21/6456 ,  H01L21/67253 ,  G01N21/85 ,  G01N2201/0696

Abstract: A semiconductor production control and measuring unit for a two-dimensional detection and control of concentration and pressure distribution of process particles within a process chamber, which forms part of a semiconductor production device and in the interior of which a vacuum can be generated with the aid of a vacuum pump. A light fan source produces a substantially parallel light fan within the process chamber, the light fan penetrating the area of the process chamber which is to be examined with regard to concentration distribution or pressure distribution, the wavelength of the light emitted by the light fan source being so short that the process particle have imparted thereto an excitation energy sufficient for fluorescent radiation. A camera is disposed at an angle with respect to the light fan and it covers the area to be examined. In the spectral region of the fluorescent radiation of the process particles, the camera has a quantum efficiency which detects the fluorescent radiation. A processing device is connected to the camera and determines the two-dimensional concentration and pressure distribution of the process particles on the basis of the image signals received from the camera.

Abstract translation: 一种用于二维检测和控制处理室内的处理颗粒的浓度和压力分布的半导体生产控制和测量单元，其形成半导体生产装置的一部分，并且其内部可以借助于其产生真空 的真空泵。 光风扇源在处理室内产生基本上平行的光风扇，光风扇关于浓度分布或压力分布渗透待检查处理室的区域，光风扇源发出的光的波长 太短，使得工艺颗粒赋予足够用于荧光辐射的激发能。 照相机相对于光风扇以一定角度设置，并且其覆盖待检查的区域。 在过程颗粒的荧光辐射的光谱区域中，相机具有检测荧光辐射的量子效率。 处理装置连接到照相机，并且基于从照相机接收的图像信号确定处理颗粒的二维浓度和压力分布。