公开(公告)号：US07019955B2

公开(公告)日：2006-03-28

申请号：US10781555

申请日：2004-02-18

Applicant: Wayne A. Loeb ,  John J. Neumann, Jr. ,  Kaigham J. Gabriel

Inventor： Wayne A. Loeb ,  John J. Neumann, Jr. ,  Kaigham J. Gabriel

IPC: H02H23/00

CPC classification number: H04R19/005 ,  H04R17/00

Abstract: An acoustic transducer comprising a substrate; and a diaphragm formed by depositing a micromachined membrane onto the substrate. The diaphragm is formed as a single silicon chip using a CMOS MEMS (microelectromechanical systems) semiconductor fabrication process. The curling of the diaphragm during fabrication is reduced by depositing the micromachined membrane for the diaphragm in a serpentine-spring configuration with alternating longer and shorter arms. As a microspeaker, the acoustic transducer of the present invention converts a digital audio input signal directly into a sound wave, resulting in a very high quality sound reproduction at a lower cost of production in comparison to conventional acoustic transducers. The micromachined diaphragm may also be used in microphone applications.

Abstract translation: 包括基底的声学换能器; 以及通过将微加工膜沉积到基底上而形成的隔膜。 使用CMOS MEMS（微机电系统）半导体制造工艺将隔膜形成为单个硅芯片。 在制造期间，通过将用于隔膜的微加工膜沉积成具有交替的较长和较短臂的蛇形弹簧构型来减小隔膜的卷曲。 作为微型扬声器，与传统的声换能器相比，本发明的声换能器将数字音频输入信号直接转换成声波，从而以较低的生产成本产生非常高质量的声音再现。 微加工膜片也可用于麦克风应用。