公开(公告)号：US5689337A

公开(公告)日：1997-11-18

申请号：US698547

申请日：1996-08-15

Applicant: Joseph A. Lamb, Jr. ,  Chiayu Ai

Inventor： Joseph A. Lamb, Jr. ,  Chiayu Ai

IPC: G01B11/30 ,  G01B9/02

CPC classification number: G01B11/306

Abstract: An interferometer mounting mechanism that consists of a horizontal shaft rigidly connected to the interferometer in axial alignment with the optical path of the instrument and protruding through an opening in the center of the transmission flat. A sample stage adapted to receive a computer-drive disk is attached to the distal end of the shaft, so that the stage is directly and rigidly connected to the interferometer. The sample stage consists of a hub capable of retaining a disk in precise alignment with the transmission flat by hanging its center hole on two support posts and resting the disk on three pressure tips on the hub. A system of push-pull adjustment screws is provided to set the proper tip/tilt of the disk.

Abstract translation: 一种干涉仪安装机构，其由水平轴组成，水平轴刚性地连接到干涉仪，与仪器的光路轴向对准并且突出穿过变速器平面中心的开口。 适于接收计算机驱动盘的样品台附接到轴的远端，使得台与干涉仪直接且刚性地连接。 样品台包括一个毂，能够通过将其中心孔悬挂在两个支撑柱上并将盘固定在轮毂上的三个压力尖端上，以保持与传动平面精确对准的盘。 提供一个推挽式调节螺丝系统来设置磁盘的正确倾斜/倾斜。

公开(公告)号：US5502566A

公开(公告)日：1996-03-26

申请号：US387635

申请日：1995-02-13

Applicant: Chiayu Ai ,  James C. Wyant ,  Lian-Zhen Shao ,  Robert E. Parks

Inventor： Chiayu Ai ,  James C. Wyant ,  Lian-Zhen Shao ,  Robert E. Parks

IPC: G01B11/24 ,  G01B9/02

CPC classification number: G01B11/24

Abstract: A method and apparatus for measuring an absolute profile of a flat using an interferometer system that includes an interferometer adapted to support two flats, a detection system, and a computer adapted to compute the OPD (optical path difference) between surface of the two flats, wherein a first flat A! having a first surface and a second flat B! having a second surface are supported in the interferometer, with the second surface facing the first surface. The interferometer system measures the OPDs between the first and second surfaces for each pixel. The first flat A! then is rotated by a number of predetermined angles relative to its initial position and each time the OPDs are measured. The first flat A! is rotated to its initial position or 180.degree. therefrom. A third flat C! having a third surface is substituted for the second flat. The OPDs between the first and third surfaces are measured. The first flat A! is replaced by the second flat, with the second surface facing the third in an orientation mirror imaged to its original orientation. The interferometer system is operated to measure the OPDs. The computer solves first, second, and third equations to obtain the entire surface topographies of the first, second, and third surface, wherein each equation is expressed as a sum of even--even, even-odd, odd-even, and odd--odd parts so as to effectuate cancellation of terms, permitting solving of the equations for the surface topography.

Abstract translation: 一种用于使用包括适于支撑两个平面的干涉仪的干涉仪系统来测量平面的绝对轮廓的方法和装置，检测系统和适于计算两个平面的表面之间的OPD（光程差）的计算机， 其中具有第一表面的第一平面[A]和具有第二表面的第二平面[B]被支撑在干涉仪中，其中第二表面面向第一表面。 干涉仪系统测量每个像素的第一和第二表面之间的OPD。 然后，第一平面[A]相对于其初始位置旋转多个预定角度，并且每次测量OPD。 第一个平面[A]旋转到其初始位置或180°。 具有第三表面的第三平面[C]代替第二平面。 测量第一和第三表面之间的OPD。 第一平面[A]由第二平面代替，其中第二表面朝向成像为其原始取向的取向镜中的第三表面。 操作干涉仪系统来测量OPD。 计算机解决了第一，第二和第三方程以获得第一，第二和第三表面的整个表面形貌，其中每个等式被表示为偶数均匀，偶数奇数，奇偶数和奇数奇数， 奇数部分，以便实现术语的取消，允许求解表面形貌的方程式。

公开(公告)号：US5398112A

公开(公告)日：1995-03-14

申请号：US131486

申请日：1993-10-04

Applicant: Chiayu Ai ,  James C. Wyant

Inventor： Chiayu Ai ,  James C. Wyant

IPC: G01B9/02 ,  G01M11/02

CPC classification number: G01M11/0271 ,  G01B9/02032 ,  G01B9/02059

Abstract: The invention provides a technique for eliminating "ripple" or ghost fringes from a wavefront transmitted by an optical window with a very small wedge angle, distortions in the wavefront being measured by an interferometer. A collimated beam produced by the interferometer is transmitted through the optical window, which is tilted so as to prevent direct reflections from entering a detector of the interferometer. The beam transmitted through the window is reflected by a return flat back through the window and transmitted to the detector. The return flat is tilted slightly in the direction of or opposite to the direction of tilt of the window, causing the re-incident angle of the returned ray to be different from the original incident angle of the collimated beam. This causes the multiple reflections within the window to be different and to be out of phase. The ghost fringes are cancelled by appropriately tilting the return flat.

Abstract translation: 本发明提供了一种用于从具有非常小的楔角的光学窗口传输的波前消除“波纹”或重影条纹的技术，波前的失真由干涉仪测量。 由干涉仪产生的准直光束通过倾斜的光学窗口传输，以防止直接反射进入干涉仪的检测器。 通过窗口传输的光束通过窗口反射回平面并传输到检测器。 返回平面在与窗的倾斜方向相反的方向上稍微倾斜，导致返回光线的再入射角度与准直光束的原始入射角不同。 这导致窗口内的多次反射是不同的并且是不相位的。 通过适当倾斜返回平面取消鬼影条纹。