公开(公告)号：US07115191B2

公开(公告)日：2006-10-03

申请号：US10090350

申请日：2002-03-04

申请人： Masahiro Shibamoto ,  Sinji Furukawa ,  Tetsuya Endoh ,  Miho Sakai ,  Naoki Watanabe

发明人： Masahiro Shibamoto ,  Sinji Furukawa ,  Tetsuya Endoh ,  Miho Sakai ,  Naoki Watanabe

IPC分类号： C23C14/32

CPC分类号： G11B5/7325 ,  G11B5/8404

摘要： This invention presents a magnetic recording disk where an anisotropy-allowing layer to allow magnetic anisotropy to a magnetic recording layer is provided between a substrate and the magnetic recording layer. This invention also presents a magnetic-recording-disk manufacturing method comprising a step to prepare an anisotropy-allowing layer to allow magnetic anisotropy to a magnetic recording layer, prior to a step to prepare the magnetic recording layer. This invention also presents a magnetic-recording-disk manufacturing system comprising an anisotropy-allowing-layer preparation chamber, in which an anisotropy-allowing layer to allow magnetic anisotropy to a magnetic recording layer is prepared on a substrate, prior to preparation of the magnetic recording layer. In this invention, the anisotropy-allowing layer is made of; nitride of niobium, tantalum, niobium alloy or tantalum alloy, or nitride-including niobium, tantalum, niobium alloy or tantalum alloy.