-
21.发明授权公开(公告)号：US08575514B2
公开(公告)日：2013-11-05
申请号：US13678006
申请日：2012-11-15
Applicant: Hamamatsu Photonics K.K.
Inventor： Naoya Matsumoto , Takashi Inoue , Norihiro Fukuchi , Haruyasu Ito , Yuu Takiguchi
CPC classification number: B23K26/00 , B23K26/06 , B23K26/0624 , B23K26/064 , B23K26/0661 , B23K26/067 , B23K26/355 , G03H1/2294 , G03H2001/0094 , G03H2225/32
Abstract: A light irradiation device and method for irradiating converged light with an object include a light source configured to output a light, a phase-modulating spatial light modulator, a controller, and a converging optical system. The phase-modulating spatial light modulator is configured to input the light outputted from the light source and to display a hologram modulating a phase of the light at each of a plurality of pixels arranged two-dimensionally, and outputs the phase-modulated light. The controller is configured to cause the spatial light modulator to display a hologram such that the light outputted from the spatial light modulator is converged at a plurality of converging positions. The controller causes the spatial light modulator to display a first hologram and performs a feedback of the first hologram so as to modify the first hologram. The modifying of the first hologram is performed by measuring intensity of the light converged.
Abstract translation: 用于对物体照射会聚光的光照射装置和方法包括配置为输出光的光源，相位调制用空间光调制器，控制器和会聚光学系统。 相位调制空间光调制器被配置为输入从光源输出的光并且显示调制在二维排列的多个像素中的每一个处的光的相位的全息图，并输出相位调制光。 控制器被配置为使得空间光调制器显示全息图，使得从空间光调制器输出的光会聚在多个会聚位置。 控制器使得空间光调制器显示第一全息图并且执行第一全息图的反馈，以便修改第一全息图。 通过测量聚光的强度来进行第一全息图的修改。
-
公开(公告)号：US11913836B2
公开(公告)日：2024-02-27
申请号：US17488493
申请日：2021-09-29
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Koyo Watanabe , Hisanari Takahashi , Kyohei Shigematsu , Takashi Inoue
CPC classification number: G01J3/4412 , G01J3/0208 , G01J3/0229 , G01J3/2823
Abstract: A dispersion measurement apparatus includes a pulse forming unit, a correlation optical system, a beam splitter, an operation unit, an imaging unit, a spatial filter unit, and a photodetector. The pulse forming unit forms a light pulse train including light pulses having time differences and different center wavelengths. The beam splitter branches the light pulse train passed through a measurement object. The imaging unit disperses one light pulse train and images each light pulse. The spatial filter unit extracts light of a partial region of the other light pulse train. The correlation optical system outputs correlation light including a cross-correlation or an autocorrelation of the extracted light. The photodetector detects a temporal waveform of the correlation light. The operation unit estimates a wavelength dispersion amount in the measurement object based on a feature value of the temporal waveform.
-
公开(公告)号：US10175552B2
公开(公告)日：2019-01-08
申请号：US14782021
申请日：2014-03-25
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takashi Inoue
Abstract: An optical module (1A) includes a polarization beam splitter (10) that receives input light (L1) including a p-polarization component using a light splitting surface (11), a first polarization element (20) that rotates a polarization plane of the input light (L1) transmitted through the light splitting surface (11), a first reflective SLM (30) that modulates the input light (L1) to generate first modulation light (L2), a second polarization element (40) that rotates a polarization plane of the first modulation light (L2) passing through the first polarization element (20) again and reflected by the light splitting surface (11), and a second reflective SLM (50) that modulates the first modulation light (L2) to generate second modulation light (L3). The second modulation light (L3) passes through the second polarization element (40) again, is transmitted through the light splitting surface (11), and then is output.
-
公开(公告)号：US09727024B2
公开(公告)日：2017-08-08
申请号：US14441270
申请日：2013-11-07
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Yuu Takiguchi , Takashi Inoue
CPC classification number: G03H1/0841 , G02B21/06 , G02B26/06 , G02B27/0927 , G02B27/0944 , G03H1/0005 , G03H1/0808 , G03H1/2294 , G03H2001/005 , G03H2001/0094 , G03H2001/085 , G03H2001/221 , G03H2210/20 , G03H2225/32 , G03H2225/52
Abstract: A phase distribution is calculated such that modulated light has a predetermined intensity distribution on a target plane and displayed on a phase modulation plane, readout light enters the phase modulation plane so as to generate the modulated light. When calculating the phase distribution, a region on the phase modulation plane is divided into N regions A1 . . . AN, with sizes set such that integration values of an intensity distribution in the regions are equal to each other. Further, a region on the target plane is divided into N regions B1 . . . BN, with sizes set such that integration values of an intensity distribution in the regions are equal to each other. The phase distribution is calculated by obtaining an optical path length from the region An to the region Bn, and determining the phase of the region An based on the optical path length.
-
25.发明授权Aberration-correcting method, laser processing method using said aberration-correcting method, laser irradiation method using said aberration-correcting method, aberration-correcting device and aberration-correcting program 有权畸变校正方法，使用所述像差校正方法的激光加工方法，使用所述像差校正方法的激光照射方法，像差校正装置和像差校正程序
公开(公告)号：US09488831B2
公开(公告)日：2016-11-08
申请号：US15073924
申请日：2016-03-18
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Haruyasu Ito , Naoya Matsumoto , Takashi Inoue
CPC classification number: G02B27/0025 , B23K26/00 , B23K26/03 , B23K26/032 , B23K26/06 , B23K26/064 , B23K26/36 , B23K26/364 , B23K26/38 , B23K26/40 , B23K26/53 , B23K26/57 , B23K2101/40 , B23K2103/50 , G02B5/1876 , G02B5/32 , G02B21/0032 , G02B21/02 , G02B21/06 , G02B21/361 , G02B27/0068 , G02F1/01 , G02F2203/18
Abstract: In an aberration-correcting method according to an embodiment of the present invention, in an aberration-correcting method for a laser irradiation device 1 which focuses a laser beam on the inside of a transparent medium 60, aberration of a laser beam is corrected so that a focal point of the laser beam is positioned within a range of aberration occurring inside the medium. This aberration range is not less than n×d and not more than n×d+Δs from an incidence plane of the medium 60, provided that the refractive index of the medium 60 is defined as n, a depth from an incidence plane of the medium 60 to the focus of the lens 50 is defined as d, and aberration caused by the medium 60 is defined as Δs.
Abstract translation: 在根据本发明实施例的像差校正方法中，在将激光束聚焦在透明介质60的内部的激光照射装置1的像差校正方法中，校正激光束的像差，使得 激光束的焦点位于介质内发生的像差范围内。 该像差范围不小于介质60的入射面的n×d且不大于n×d +Δs，条件是介质60的折射率被定义为n，从 将透镜50的焦点的介质60定义为d，将由介质60引起的像差定义为Δs。
-
公开(公告)号：US11821793B2
公开(公告)日：2023-11-21
申请号：US17600667
申请日：2020-03-27
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Koyo Watanabe , Kyohei Shigematsu , Takashi Inoue
CPC classification number: G01J3/453 , G01J11/00 , G01M11/3163 , H01S3/0057 , H01S3/0092
Abstract: A dispersion measurement apparatus includes a pulse forming unit, a correlation optical system, a photodetection unit, and an operation unit. The pulse forming unit forms a light pulse train including a plurality of light pulses having time differences and center wavelengths different from each other from a measurement target light pulse output from a pulsed laser light source. The correlation optical system receives the light pulse train output from the pulse forming unit and outputs correlation light including a cross-correlation or an autocorrelation of the light pulse train. The photodetection unit detects a temporal waveform of the correlation light output from the correlation optical system. The operation unit estimates a wavelength dispersion amount of the pulsed laser light source based on a feature value of the temporal waveform of the correlation light.
-
公开(公告)号：US10989935B2
公开(公告)日：2021-04-27
申请号：US15573900
申请日：2016-05-11
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Koyo Watanabe , Takashi Inoue , Koji Takahashi
Abstract: A modulation pattern calculation apparatus includes an iterative Fourier transform unit, a filtering process unit, and a modulation pattern calculation unit. The iterative Fourier transform unit performs a Fourier transform on a waveform function including an intensity spectrum function and a phase spectrum function, performs a replacement of a temporal intensity waveform function based on a desired waveform after the Fourier transform and then performs an inverse Fourier transform, and performs a replacement to constrain the phase spectrum function after the inverse Fourier transform. The filtering process unit performs a filtering process of cutting a part exceeding a cutoff intensity for each wavelength, on the intensity spectrum function in a frequency domain.
-
28.发明授权
公开(公告)号：US10942418B2
公开(公告)日：2021-03-09
申请号：US16327891
申请日：2017-07-28
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Koyo Watanabe , Koji Takahashi , Takashi Inoue
IPC: G02F2/00
Abstract: A Fourier transform is performed on a first waveform function in a frequency domain, and a second waveform function in a time domain including a temporal intensity waveform function and a temporal phase waveform function is generated. A replacement of the temporal intensity waveform function based on a desired waveform is performed for the second waveform function. The second waveform function is modified so as to bring a spectrogram of the second waveform function close to a target spectrogram generated in advance in accordance with a desired wavelength band. An inverse Fourier transform is performed on the modified second waveform function, and a third waveform function in the frequency domain is generated. Data is generated on the basis of an intensity spectrum function or a phase spectrum function of the third waveform function.
-
公开(公告)号：US10324285B2
公开(公告)日：2019-06-18
申请号：US15290233
申请日：2016-10-11
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Haruyasu Ito , Naoya Matsumoto , Takashi Inoue
IPC: B23K26/03 , G02B21/00 , G02B5/18 , B23K26/00 , B23K26/06 , B23K26/36 , B23K26/38 , B23K26/40 , B23K26/53 , B23K26/57 , G02B21/02 , G02B21/06 , G02B21/36 , G02B27/00 , B23K26/064 , B23K26/364 , G02B5/32 , G02F1/01 , B23K101/40 , B23K103/00
Abstract: In an aberration-correcting method according to an embodiment of the present invention, in an aberration-correcting method for a laser irradiation device 1 which focuses a laser beam on the inside of a transparent medium 60, aberration of a laser beam is corrected so that a focal point of the laser beam is positioned within a range of aberration occurring inside the medium. This aberration range is not less than n×d and not more than n×d+Δs from an incidence plane of the medium 60, provided that the refractive index of the medium 60 is defined as n, a depth from an incidence plane of the medium 60 to the focus of the lens 50 is defined as d, and aberration caused by the medium 60 is defined as Δs.
-
30.发明申请
公开(公告)号：US20180161923A1
公开(公告)日：2018-06-14
申请号：US15857279
申请日：2017-12-28
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Naoya Matsumoto , Yuu Takiguchi , Taro Ando , Yoshiyuki Ohtake , Takashi Inoue , Tomoko Otsu , Haruyoshi Toyoda
IPC: B23K26/064 , B23K26/06 , B23K26/03
CPC classification number: B23K26/064 , B23K26/032 , B23K26/0608 , G02F2203/12 , G02F2203/18 , G02F2203/50
Abstract: In the control of light condensing irradiation of laser light using a spatial light modulator, the number of wavelengths of the laser light, a value of each wavelength, and incident conditions of the laser light are acquired (step S101), the number of light condensing points, and a light condensing position, a wavelength, and a light condensing intensity on each light condensing point are set (S104), and a light condensing control pattern to be provided for the laser light is set for each light condensing point (S107). Then, a modulation pattern to be presented in the spatial light modulator is designed in consideration of the light condensing control pattern (S108). Further, in the design of a modulation pattern, a design method focusing on an effect by a phase value of one pixel is used, and when evaluating a light condensing state on the light condensing point, a propagation function to which a phase pattern opposite to the light condensing control pattern is added is used. Thereby, a light modulation control method, a program, a device, and a laser light irradiation device, which are capable of preferably achieving light condensing control of laser light are achieved.
