公开(公告)号：US10688488B2

公开(公告)日：2020-06-23

申请号：US15839509

申请日：2017-12-12

Applicant: Illumina, Inc.

Inventor： John Gerhardt Earney ,  Justin Fullerton ,  Kaleb Smith ,  Bala Murali K. Venkatesan

IPC: B01L3/00 ,  B01J19/00 ,  G02B26/00 ,  B33Y50/02 ,  G01N27/447 ,  G02B3/14 ,  F16J15/14 ,  B81C1/00 ,  B81C3/00 ,  F16J15/10 ,  B29C65/00 ,  B29C65/16 ,  B29C65/48 ,  B29C35/08 ,  B29L31/00 ,  B29C65/50

Abstract: An example method includes providing a working stack having a first substrate layer, a second substrate layer, and a radiation-absorbing material disposed between the first and second substrate layers. The working stack includes a cavity therein having a designated liquid. A bonding interface is defined between the radiation-absorbing material and at least one of the first substrate layer or the second substrate layer. The bonding interface has a film of the designated liquid. The method also includes directing radiation onto the bonding interface to form a perimeter seal. The perimeter seal separates the cavity from an outer area of the bonding interface. The method also includes directing the radiation onto the outer area of the bonding interface to secure the first and second substrate layers together. The perimeter seal impedes an ingress of bubbles from the outer area into the cavity as the radiation is directed onto the outer area.