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公开(公告)号：US07301631B1
公开(公告)日：2007-11-27
申请号：US11084827
申请日：2005-03-21
申请人： Blaine D. Johs , Ping He , Galen L. Pfeiffer , Steven E. Green , Christopher A. Goeden , Martin M. Liphardt
发明人： Blaine D. Johs , Ping He , Galen L. Pfeiffer , Steven E. Green , Christopher A. Goeden , Martin M. Liphardt
IPC分类号： G01J4/00
CPC分类号： G01J3/02 , G01J3/021 , G01J3/0224 , G01J3/10 , G01N21/211 , G01N2201/061 , G01N2201/0636
摘要： A system for stabilizing the angle of incidence a beam of electromagnetic radiation from a vertically oriented Arc lamp onto a horizontally oriented sample surface.
摘要翻译： 一种用于将来自垂直取向的弧光灯的电磁辐射束入射到水平取向的样品表面上的入射角的系统。
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22.发明申请Mounting for deviation angle self compensating substantially achromatic retarder 有权安装偏移角自补偿基本上消色差延迟器公开(公告)号：US20110188040A1
公开(公告)日：2011-08-04
申请号：US13065090
申请日：2011-03-14
申请人： Ping He , Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer , Martin M. Liphardt
发明人： Ping He , Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer , Martin M. Liphardt
摘要： A system, method of configuring, and application a system for introducing a relative phase retardation into orthogonally polarized components of an electromagnetic beam entered thereinto, wherein the system involves a substantially achromatic multiple element retarder system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems.
摘要翻译： 一种用于配置和应用用于将相对相位延迟引入到其中输入的电磁波的正交极化分量的系统的方法，其中所述系统包括用于宽光谱范围的基本上无色的多元件延迟器系统（例如，190 -1700nm）旋转补偿光谱椭偏仪和/或偏振计系统。
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23.发明授权Spatial filter means comprising an aperture with a non-unity aspect ratio in a system for investigating samples with electromagnetic radiation 有权在用于用电磁辐射调查样本的系统中，空间滤波器装置包括具有非一体宽高比的孔径公开(公告)号：US07554662B1
公开(公告)日：2009-06-30
申请号：US11648060
申请日：2006-12-29
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01J1/02 , G01J1/0295 , G01J1/04 , G01J1/0451 , G01N21/55 , G02B27/46
摘要： Systems which utilize electromagnetic radiation to investigate samples and include at least one spatial filter which has an aperture having a hole therethrough with a non-unity aspect ratio.
摘要翻译： 利用电磁辐射来研究样品并且包括至少一个空间滤光器的系统，所述至少一个空间滤光器具有孔，所述孔具有非均匀纵横比的通孔。
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公开(公告)号：US08013996B1
公开(公告)日：2011-09-06
申请号：US12454007
申请日：2009-05-12
IPC分类号： G01J4/00
CPC分类号： G01J1/02 , G01J1/0295 , G01J1/04 , G01J1/0425 , G01J1/0437 , G01J1/0451 , G01J1/0462 , G01N21/211 , G01N21/55 , G02B27/46
摘要： Systems which utilize electromagnetic radiation to investigate samples and include at least one spatial filter which has an aperture having an opening therethrough of an arbitrary shape, including methodology for fabracting the aperture on an end of an optical fiber per se.
摘要翻译： 利用电磁辐射来研究样品并且包括至少一个空间滤光器的系统，该至少一个空间滤光器具有通孔中具有任意形状的开口，该空间滤光器包括用于在光纤本身端部进行衍射的方法。
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25.发明授权Mounting for deviation angle self compensating substantially achromatic retarder 有权安装偏移角自补偿基本上消色差延迟器公开(公告)号：US08462341B2
公开(公告)日：2013-06-11
申请号：US13065090
申请日：2011-03-14
申请人： Ping He , Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer , Martin M. Liphardt
发明人： Ping He , Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer , Martin M. Liphardt
IPC分类号： G01J4/00
摘要： A system, method of configuring, and application a system for introducing a relative phase retardation into orthogonally polarized components of an electromagnetic beam entered thereinto, wherein the system involves a substantially achromatic multiple element retarder system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems.
摘要翻译： 一种用于配置和应用用于将相对相位延迟引入到其中输入的电磁波的正交极化分量的系统的方法，其中所述系统包括用于宽光谱范围的基本上无色的多元件延迟器系统（例如，190 -1700nm）旋转补偿光谱椭偏仪和/或偏振计系统。
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26.发明授权公开(公告)号：US07468794B1
公开(公告)日：2008-12-23
申请号：US11204929
申请日：2005-08-15
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01N21/55
摘要： Application of a spatial filter equivalent constructed from a converging lens and an optical fiber in rotating compensator ellipsometer systems, after a sample system. The purpose is to eliminate a radially outer annulus of a generally arbitrary Profile beam that presents with low intensity level irregular content, so that electromagnetic beam intensity is caused to quickly decay to zero as a function of radius.
摘要翻译： 在采样系统之后，将由会聚透镜和光纤构成的空间滤波器等效应用于旋转补偿器椭偏仪系统中。 目的是消除呈现低强度水平不规则内容的大致任意轮廓波束的径向外环，使电磁波强度作为半径的函数快速衰减为零。
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27.发明授权公开(公告)号：US06930813B1
公开(公告)日：2005-08-16
申请号：US10425801
申请日：2003-04-29
IPC分类号： G01J3/10 , G01N21/21 , G02B27/09 , G02B27/46 , G02F1/00 , G01J3/28 , G01J3/50 , G01J4/00 , G02F1/33
CPC分类号： G01N21/211 , G01J3/10 , G01N21/21 , G02B27/09 , G02B27/46
摘要： Disclosed is the application of spatial filters and beam energy homogenizing systems in ellipsometer and the like systems prior to a sample system. The purpose is to eliminate a radially outer annulus of a generally arbitrary intensity profile, so that electromagnetic beam intensity is caused to quickly decay to zero, rather than, for instance, demonstrate an irregular profile as a function of radius.
摘要翻译： 公开了在采样系统之前在椭偏仪等系统中应用空间滤波器和光束能均匀化系统。 目的是消除大体上任意的强度分布的径向外环，使得电磁波强度被快速衰减到零，而不是例如证明作为半径的函数的不规则轮廓。
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公开(公告)号：US06456376B1
公开(公告)日：2002-09-24
申请号：US09864840
申请日：2001-05-24
IPC分类号： G01J400
CPC分类号： G01J3/447 , G01J4/00 , G01J2003/2866 , G01N21/21 , G01N21/211 , G02B5/3058 , G02B5/3083 , G02B27/46
摘要： Disclosed is the application of spatial filter(s) in rotating compensator ellipsometer systems prior to or after a sample system. The purpose is, for instance, to eliminate a radially outer annulus of a generally arbitrary Profile beam that presents with low intensity level irregular content, so that electromagnetic beam intensity is caused to quickly decay to zero as a function of radius.
摘要翻译： 公开了在采样系统之前或之后在旋转补偿器椭偏仪系统中应用空间滤波器。 目的是例如消除具有低强度水平不规则内容的大致任意轮廓波束的径向外环，使得使电磁波强度作为半径的函数快速衰减到零。
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29.发明授权Flying mobile on-board ellipsometer, polarimeter, reflectometer and the like systems 有权飞行移动式机载椭圆仪，偏振计，反射计等系统公开(公告)号：US07277171B1
公开(公告)日：2007-10-02
申请号：US11105852
申请日：2005-04-14
申请人： Blaine D. Johs , Ping He , Martin M. Liphardt , Christopher A. Goeden , John A. Woollam , James D. Welch
发明人： Blaine D. Johs , Ping He , Martin M. Liphardt , Christopher A. Goeden , John A. Woollam , James D. Welch
IPC分类号： G01J4/00
CPC分类号： G01N21/21 , G01N21/55 , G01N2021/151 , G01N2021/212 , G01N2021/214 , G01N2201/021 , G01N2201/0693
摘要： A substantially self-contained “on-board” material system investigation system functionally mounted on a three dimensional locational system to enable positioning at desired locations on, and distances from, the surface of a large sample, including the capability to easily and conveniently change the angle-of-incidence of a beam of electromagnetic radiation onto a sample surface.
摘要翻译： 一种基本上独立的“车载”材料系统调查系统，其功能地安装在三维位置系统上，以便能够定位在大样品表面上的距离和期望位置，包括容易地和方便地改变 电磁辐射束到样品表面的入射角。
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30.发明授权Multi-AOI-system for easy changing angles-of-incidence in ellipsometer, polarimeter and reflectometer systems 有权多AOI系统，用于在椭偏仪，偏振计和反射计系统中方便地改变入射角公开(公告)号：US06859278B1
公开(公告)日：2005-02-22
申请号：US10050802
申请日：2002-01-15
申请人： Blaine D. Johs , Ping He , Martin M. Liphardt , Christopher A. Goeden , John A. Woollam , James D. Welch
发明人： Blaine D. Johs , Ping He , Martin M. Liphardt , Christopher A. Goeden , John A. Woollam , James D. Welch
IPC分类号： G01N21/21
CPC分类号： G01N21/211 , G01N2021/214 , G01N2021/4711
摘要： Disclosed is a system for enabling easy sequential setting of different Angles-of-Incidence of a beam of electromagnetic radiation to a surface of a sample system, and to regression based methodology for evaluating and compensating the effects of the presence of electromagnetic beam intercepting angle-of-incidence changing systems, including where desired, parameterization of calibration parameters.
摘要翻译： 公开了一种用于使得将电磁辐射束的不同角度发生顺序设置到样本系统的表面的系统，以及用于评估和补偿电磁束拦截角度的存在的影响的基于回归的方法， 包括在需要时包括校准参数的参数化。
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