TFT device
    30.
    发明授权
    TFT device 失效
    TFT器件

    公开(公告)号:US5308996A

    公开(公告)日:1994-05-03

    申请号:US82908

    申请日:1993-06-29

    CPC分类号: H01L29/78609

    摘要: A TFT device has an insulation substrate, a semiconductor layer formed on the insulation substrate, a pair of opposed electrodes formed on the semiconductor layer, and a gate electrode formed on the semiconductor layer with an insulation film interposed therebetween, wherein a region doped with at least one type of impurity selected from atoms belonging to the V group of the periodic table is formed in the semiconductor layer at the vicinity of the interface between the semiconductor layer and the insulation layer.

    摘要翻译: TFT器件具有绝缘基板,形成在绝缘基板上的半导体层,形成在半导体层上的一对相对电极和形成在半导体层上的绝缘膜之间的栅电极,其中掺杂有 在半导体层和绝缘层之间的界面附近的半导体层中形成选自属于元素周期表V族的原子的至少一种杂质。