Heating apparatus with enhanced thermal uniformity and method for making thereof
    25.
    发明申请
    Heating apparatus with enhanced thermal uniformity and method for making thereof 有权
    具有增强的热均匀性的加热装置及其制造方法

    公开(公告)号:US20080066676A1

    公开(公告)日:2008-03-20

    申请号:US11549968

    申请日:2006-10-16

    IPC分类号: C23C16/00

    CPC分类号: C23C16/4586 H01L21/67103

    摘要: A heating apparatus for regulating/controlling the surface temperature of a substrate is provided. At least a thermal pyrolytic graphite (TPG) layer is embedded in the heater to diffuse the temperature difference of the various components in the heating apparatus and provide temporal and spatial control of the surface temperature of the substrate, for a relatively uniform substrate temperature with the difference between the maximum and minimum temperature points on the substrate of less than 10° C.

    摘要翻译: 提供一种用于调节/控制基板的表面温度的加热装置。 至少一个热解石墨(TPG)层嵌入在加热器中以扩散加热装置中的各种组分的温度差,并提供衬底的表面温度的时间和空间控制,对于相对均匀的衬底温度, 基板上最大和最小温度点之间的差值小于10°C

    MULTI-PIECE CERAMIC CRUCIBLE AND METHOD FOR MAKING THEREOF
    26.
    发明申请
    MULTI-PIECE CERAMIC CRUCIBLE AND METHOD FOR MAKING THEREOF 有权
    多层陶瓷坩埚及其制造方法

    公开(公告)号:US20070289526A1

    公开(公告)日:2007-12-20

    申请号:US11554561

    申请日:2006-10-30

    摘要: A unibody, multi-piece crucible for use in for use in elemental purification, compounding, and growth of semi-conductor crystals, e.g., in the process of molecular beam epitaxy (MBE) for melting silicon and the like at high temperature. The crucible has an outer coating layer that fixedly joins the multi pieces making up the crucible. The invention also provides a method for making a unibody containing structure comprising pyrolytic boron nitride having a negative draft, which method obviates the need of complicated overhang structure of graphite mandrels or the removal of the graphite mandrels by burning at high temperatures.

    摘要翻译: 用于元素纯化,复合和半导体晶体生长的单体,多件式坩埚,例如在用于在高温下熔化硅等的分子束外延(MBE)的过程中。 坩埚具有固定连接构成坩埚的多个部件的外部涂层。 本发明还提供了一种制备含有具有负牵伸的热解氮化硼的含有单体的结构的方法,该方法消除了石墨心轴的复杂突出结构或通过在高温下燃烧而去除石墨心轴的需要。

    Mechanically flexible organic electroluminescent device with directional light emission
    30.
    发明授权
    Mechanically flexible organic electroluminescent device with directional light emission 有权
    具有定向发光的机械柔性有机电致发光器件

    公开(公告)号:US06891330B2

    公开(公告)日:2005-05-10

    申请号:US10113137

    申请日:2002-03-29

    摘要: A mechanically flexible and environmentally stable organic electroluminescent (“EL”) device with directional light emission comprises an organic EL member disposed on a flexible substrate, a surface of which is coated with a multilayer barrier coating which includes at least one sublayer of a substantially transparent organic polymer and at least one sublayer of a substantially transparent inorganic material. The device includes a reflective metal layer disposed on the organic EL member opposite to the substrate. The reflective metal layer provides an increased external quantum efficiency of the device. The reflective metal layer and the multilayer barrier coating form a seal around the organic EL member to reduce the degradation of the device due to environmental elements.

    摘要翻译: 具有定向发光的机械柔性和环境稳定的有机电致发光(“EL”)器件包括设置在柔性基板上的有机EL元件,其表面涂覆有多层阻挡涂层,该多层阻挡涂层包括至少一个基本透明的子层 有机聚合物和至少一个基本上透明的无机材料的子层。 该器件包括设置在与衬底相对的有机EL元件上的反射金属层。 反射金属层提供了增加的器件的外部量子效率。 反射金属层和多层阻挡涂层在有机EL构件周围形成密封,以减少由于环境因素导致的器件的劣化。