Homoepitaxial gallium nitride based photodetector and method of producing
    24.
    发明申请
    Homoepitaxial gallium nitride based photodetector and method of producing 有权
    同质外延氮化镓基光电探测器及其制造方法

    公开(公告)号:US20050029537A1

    公开(公告)日:2005-02-10

    申请号:US10932127

    申请日:2004-09-01

    摘要: A photodetector (100, 200, 300) comprising a gallium nitride substrate, at least one active layer (104, 302) disposed on the substrate (102, 202, 306), and a conductive contact structure (106, 210, 308) affixed to the active layer (104, 302) and, in some embodiments, the substrate (102, 202, 306). The invention includes photodetectors (100, 200, 300) having metal-semiconductor-metal structures, P-i-N structures, and Schottky-barrier structures. The active layers (104, 302) may comprise Ga1-x-yAlxInyN1-z-w PzAsw, or, preferably, Ga1-xAlxN. The gallium nitride substrate comprises a single crystal gallium nitride wafer and has a dislocation density of less than about 105 cm−2. A method of making the photodetector (100, 200, 300) is also disclosed.

    摘要翻译: 包括氮化镓衬底,设置在衬底(102,202,306)上的至少一个有源层(104,302)的光电探测器(100,200,300)和固定在衬底上的导电接触结构(106,210,308) 到有源层(104,302),并且在一些实施例中为衬底(102,202,306)。 本发明包括具有金属 - 半导体 - 金属结构,P-i-N结构和肖特基势垒结构的光电探测器(100,200,300)。 有源层(104,302)可以包括Ga1-x-yAlxInyN1-z-wPzAsw,或者优选地,Ga1-xAlxN。 氮化镓衬底包括单晶氮化镓晶片,并且具有小于约10 -5 cm -2的位错密度。 还公开了制造光电检测器(100,200,300)的方法。