公开(公告)号：US06225145B1

公开(公告)日：2001-05-01

申请号：US09390850

申请日：1999-09-07

申请人： Chang Auck Choi ,  Jong Hyun Lee ,  Won Ick Jang ,  Dae Yong Kim

发明人： Chang Auck Choi ,  Jong Hyun Lee ,  Won Ick Jang ,  Dae Yong Kim

IPC分类号： H01L2144

CPC分类号： B81C1/00301 ,  B81B2207/096 ,  H01L21/76838 ,  H01L2224/48465 ,  H01L2924/10253 ,  H01L2924/00

摘要： Provided is a method of fabricating a vacuum micro-structure, which is used for an element operating in a vacuum, the method comprising the steps of: (1) entirely etching an epitaxial layer of a silicon substrate having an SOI structure including an upper silicon epitaxial layer, an interlevel insulating layer and a lower silicon bulk layer to form two electrode structures and a floating vibratory structure, and encapsulating them with a vacuum sealing substrate in a vacuum; and (2) etching the silicon substrate having the SOI stricture from the back side to the interlevel insulating layer to open the electrode structures, and forming a metal electrode.

摘要翻译： 提供一种制造真空微结构的方法，其用于在真空中操作的元件，所述方法包括以下步骤：（1）完全蚀刻具有SOI结构的硅衬底的外延层，所述SOI衬底包括上硅 外延层，层间绝缘层和下硅体层，以形成两个电极结构和浮动振动结构，并在真空中用真空密封基板封装它们; 以及（2）从背面蚀刻具有SOI限制的硅衬底到层间绝缘层，以打开电极结构，以及形成金属电极。

公开(公告)号：US08613287B2

公开(公告)日：2013-12-24

申请号：US12672993

申请日：2008-04-14

申请人： Chang Han Je ,  Myung Lae Lee ,  Sung Hae Jung ,  Gunn Hwang ,  Chang Auck Choi

发明人： Chang Han Je ,  Myung Lae Lee ,  Sung Hae Jung ,  Gunn Hwang ,  Chang Auck Choi

IPC分类号： B08B3/00

CPC分类号： B81B3/001 ,  B81C2201/115

摘要： An apparatus for preventing stiction of a three-dimensional MEMS (microelectromechanical system) microstructure, the apparatus including: a substrate; and a plurality of micro projections formed on a top surface of the substrate with a predetermined height in such a way that a cleaning solution flowing out from the microstructure disposed thereabove is discharged.

摘要翻译： 一种用于防止三维MEMS（微机电系统）微结构静止的装置，该装置包括：基板; 以及多个微型突起以预定的高度形成在基板的顶表面上，使得从布置在其上方的微结构流出的清洗溶液被排出。

公开(公告)号：US08263426B2

公开(公告)日：2012-09-11

申请号：US12509360

申请日：2009-07-24

申请人： Sang Choon Ko ,  Chi Hoon Jun ,  Byoung Gon Yu ,  Chang Auck Choi

发明人： Sang Choon Ko ,  Chi Hoon Jun ,  Byoung Gon Yu ,  Chang Auck Choi

IPC分类号： H01L21/00

CPC分类号： G01P15/0802 ,  G01H11/06 ,  G01P1/023 ,  G01P15/125 ,  H04R19/005

摘要： Provided is a high-sensitivity MEMS-type z-axis vibration sensor, which may sense z-axis vibration by differentially shifting an electric capacitance between a doped upper silicon layer and an upper electrode from positive to negative or vice versa when center mass of a doped polysilicon layer is moved due to z-axis vibration. Particularly, since a part of the doped upper silicon layer is additionally connected to the center mass of the doped polysilicon layer, and thus an error made by the center mass of the doped polysilicon layer is minimized, it may sensitively respond to weak vibration of low frequency such as seismic waves. Accordingly, since the high-sensitivity MEMS-type z-axis vibration sensor sensitively responds to a small amount of vibration in a low frequency band, it can be applied to a seismograph sensing seismic waves of low frequency which have a very small amount of vibration and a low vibration speed. Moreover, since the high-sensitivity MEMS-type z-axis vibration sensor has a higher vibration sensibility than MEMS-type z-axis vibration sensor of the same size, it can be useful in electronic devices which are gradually decreasing in size.

摘要翻译： 提供了一种高灵敏度的MEMS型z轴振动传感器，其可以通过将掺杂的上硅层和上电极之间的电容从正向或者反向偏移来感测z轴振动，当中心质量为 掺杂多晶硅层由于z轴振动而移动。 特别地，由于掺杂的上硅层的一部分另外连接到掺杂多晶硅层的中心质量块，因此由掺杂多晶硅层的中心质量造成的误差最小化，可以敏感地响应低的振动弱 频率如地震波。 因此，由于高灵敏度的MEMS型z轴振动传感器对低频带中的少量振动敏感地作出响应，因此可以应用于地震仪中，以便感测具有极小振动频率的低频地震波 和低振动速度。 此外，由于高灵敏度的MEMS型z轴振动传感器具有比相同尺寸的MEMS型z轴振动传感器更高的振动灵敏度，所以在逐渐减小的电子设备中是有用的。

公开(公告)号：US07667202B2

公开(公告)日：2010-02-23

申请号：US12182456

申请日：2008-07-30

申请人： Sang Hoon Cheon ,  Ho Jun Ryu ,  Woo Seok Yang ,  Seong Mok Cho ,  Byoung Gon Yu ,  Chang Auck Choi

发明人： Sang Hoon Cheon ,  Ho Jun Ryu ,  Woo Seok Yang ,  Seong Mok Cho ,  Byoung Gon Yu ,  Chang Auck Choi

IPC分类号： G01J5/20

CPC分类号： G01J5/20 ,  G01J5/02 ,  G01J5/023

摘要： Provided are a multilayer-structured bolometer and a method of fabricating the same. In the multilayer-structured bolometer, the number of support arms supporting the body of a sensor structure is reduced to one, and two electrodes are formed on the one support arm. Thus, the sensor structure is electrically connected with a substrate through the only one support arm. According to the multilayer-structured bolometer and method of fabricating the bolometer, the thermal conductivity of the sensor structure is considerably reduced to remarkably improve sensitivity to temperature, and also the pixel size of the bolometer is reduced to obtain high-resolution thermal images. In addition, the multilayer-structured bolometer can have a high fill-factor due to a sufficiently large infrared-absorbing layer, and thus can improve infrared absorbance.

摘要翻译： 提供一种多层结构的测辐射热计及其制造方法。 在多层结构的测辐射热计中，支撑传感器结构的主体的支撑臂的数量减少到一个，并且在一个支撑臂上形成两个电极。 因此，传感器结构通过仅一个支撑臂与基板电连接。 根据多层结构的测辐射热计和制造测辐射热计的方法，传感器结构的导热性显着降低，显着提高了对温度的敏感性，还减小了测辐射热计的像素尺寸以获得高分辨率的热图像。 此外，由于具有足够大的红外线吸收层，多层结构的测辐射热计可以具有高的填充因子，因此可以提高红外吸收。

公开(公告)号：US20100009514A1

公开(公告)日：2010-01-14

申请号：US12417114

申请日：2009-04-02

申请人： Myung Lae LEE ,  Jong Hyun Lee ,  Sung Sik Yun ,  Dae Hun Jeong ,  Gunn Hwang ,  Chang Auck Choi ,  Chang Han Je ,  Jae Yong An

发明人： Myung Lae LEE ,  Jong Hyun Lee ,  Sung Sik Yun ,  Dae Hun Jeong ,  Gunn Hwang ,  Chang Auck Choi ,  Chang Han Je ,  Jae Yong An

IPC分类号： H01L21/306

CPC分类号： B81C1/00619 ,  B81C1/00626 ,  B81C2201/0132 ,  B81C2201/0133

摘要： A method of fabricating a micro-vertical structure is provided. The method includes bonding a second crystalline silicon (Si) substrate onto a first crystalline Si substrate by interposing an insulating layer pattern and a cavity, etching the second crystalline Si substrate using a deep reactive ion etch (DRIE) process along a [111] crystal plane vertical to the second crystalline Si substrate, and etching an etched vertical surface of the second crystalline Si substrate using a crystalline wet etching process to improve the surface roughness and flatness of the etched vertical surface. As a result, no morphological defects occur on the etched vertical surface. Also, footings do not occur at an etch end-point due to the insulating layer pattern. In addition, the micro-vertical structure does not float in the air but is fixed to the first crystalline Si substrate, thereby facilitating subsequent processes.

摘要翻译： 提供一种制造微垂直结构的方法。 该方法包括通过插入绝缘层图案和空腔将第二晶体硅（Si）衬底接合到第一晶体Si衬底上，使用沿[111]晶体的深反应离子蚀刻（DRIE）工艺蚀刻第二晶体Si衬底 垂直于第二晶体Si衬底，并且使用结晶湿蚀刻工艺蚀刻第二晶体Si衬底的蚀刻垂直表面，以改善蚀刻垂直表面的表面粗糙度和平坦度。 结果，蚀刻的垂直表面上没有形成形态缺陷。 此外，由于绝缘层图案，在蚀刻终点处不发生基脚。 此外，微垂直结构不会浮在空气中，而是固定在第一晶体Si衬底上，从而有助于后续工艺。

公开(公告)号：US20090056448A1

公开(公告)日：2009-03-05

申请号：US12168025

申请日：2008-07-03

申请人： Sung Sik LEE ,  Ji Man Park ,  Myung Lae Lee ,  Sung Hae Jung ,  Chang Han Je ,  Gunn Hwang ,  Chang Auck Choi

发明人： Sung Sik LEE ,  Ji Man Park ,  Myung Lae Lee ,  Sung Hae Jung ,  Chang Han Je ,  Gunn Hwang ,  Chang Auck Choi

IPC分类号： G01P15/125

CPC分类号： G01P15/125 ,  G01P13/04

摘要： There is provided a bidirectional readout circuit for detecting direction and amplitude of an oscillation sensed at a capacitive microelectromechanical system (MEMS) accelerometer, the bidirectional readout circuit converting capacitance changes of the capacitive MEMS accelerometer into a time change amount by using high resolution capacitance-to-time conversion technology and outputting the time change amount as the direction and the amplitude of the oscillation by using time-to-digital conversion (TDC) technology, thereby detecting not only the amplitude of the oscillation but also the direction thereof, which is capable of being applied to various MEMS sensors.

摘要翻译： 提供了一种用于检测在电容式微机电系统（MEMS）加速度计处感测的振荡的方向和振幅的双向读出电路，双向读出电路通过使用高分辨率电容 - 电容将电容式MEMS加速度计的电容变化转换为时变量 时间转换技术，并且通过使用时间 - 数字转换（TDC）技术输出时间变化量作为振荡的方向和振幅，从而不仅检测振荡的振幅，而且检测其方向，这是能够 被应用于各种MEMS传感器。

公开(公告)号：US20080185128A1

公开(公告)日：2008-08-07

申请号：US11815364

申请日：2006-01-10

申请人： Seok Hwan Moon ,  Gunn Hwang ,  Sang Choon Ko ,  Sung Weon Kang ,  Chang Auck Choi

发明人： Seok Hwan Moon ,  Gunn Hwang ,  Sang Choon Ko ,  Sung Weon Kang ,  Chang Auck Choi

IPC分类号： F28D15/02

CPC分类号： F28D15/046 ,  F28D15/0233 ,  F28F1/022

摘要： Provided is a flat plate-type heat pipe formed of a flat pipe having a predetermined through-hole formed therein and a plurality of grooves extending from an inner surface of the through-hole in a longitudinal direction so that, while the interior of the heat pipe is in a vacuum state, heat in the heat pipe is discharged to the exterior due to a phase change of between liquid and gaseous states of working fluid and the working fluid flows by a capillary force produced from the plurality of grooves, whereby it is possible to obtain a strong capillary force and an excellent cooling effect while it is manufactured through a simple process.

摘要翻译： 本发明提供一种平面型热管，其由具有形成在其中的预定通孔的扁平管形成，以及沿着纵向方向从通孔的内表面延伸的多个槽，使得在热的内部 管处于真空状态，由于工作流体的液态和气态之间的相变，热管中的热量被排出到外部，并且工作流体由多个槽产生的毛细管力流动，由此 可以通过简单的工艺制造而获得强的毛细管力和优异的冷却效果。

公开(公告)号：US20070256814A1

公开(公告)日：2007-11-08

申请号：US11577233

申请日：2005-12-09

申请人： Seok Hwan Moon ,  Gunn Hwang ,  Sung Weon Kang ,  Chang Auck Choi

发明人： Seok Hwan Moon ,  Gunn Hwang ,  Sung Weon Kang ,  Chang Auck Choi

IPC分类号： G06F1/20

CPC分类号： H05K7/20336 ,  H01L23/427 ,  H01L2924/0002 ,  H01L2924/00

摘要： Provided is a loop type micro heat transport device including: a lower plate having a reservoir for storing operating fluid at its upper surface, an evaporating part spaced apart from the reservoir to evaporate the operating fluid, and a condensing part for condensing vapor evaporated from the evaporating part; and an upper plate engaged with an upper surface of the lower plate and formed at a position corresponding to the evaporating part and the condensing part, and including a vapor space having a vapor line through which the vapor evaporated from the evaporating part is transported to the condensing part, wherein the operating fluid is circulated through the reservoir, the evaporating part, and the condensing part. Therefore, it is possible to remarkably improve productivity since its simple structure helps to make the manufacture simple, as well as to improve cooling performance and enabling long distance heat transport.

摘要翻译： 本发明提供一种环型微热输送装置，其特征在于，具有：下板，其具有用于在其上表面存储工作流体的储存器，与所述储存器间隔开的蒸发部，蒸发所述工作流体;以及冷凝部， 蒸发部分 以及与所述下板的上表面接合并形成在与所述蒸发部和所述冷凝部对应的位置的上板，并且包括具有蒸气管的蒸气空间，蒸发部蒸发的蒸汽通过所述蒸气管路被输送到所述蒸发部 冷凝部件，其中工作流体循环通过储存器，蒸发部件和冷凝部件。 因此，由于其简单的结构有助于使制造简单，并且提高冷却性能并且能够进行长距离的热输送，因此可以显着提高生产率。

公开(公告)号：US07209608B2

公开(公告)日：2007-04-24

申请号：US10923838

申请日：2004-08-24

申请人： Chang Kyu Kim ,  Myung Lae Lee ,  Chi Hoon Jun ,  Chang Auck Choi ,  Yun Tae Kim

发明人： Chang Kyu Kim ,  Myung Lae Lee ,  Chi Hoon Jun ,  Chang Auck Choi ,  Yun Tae Kim

IPC分类号： G02B6/28 ,  G02B6/36 ,  G02B27/00 ,  G02B1/10 ,  G02B5/28

CPC分类号： G02B26/001 ,  G02B2006/12109

摘要： Provided is a Fabry-Perot type wavelength tunable optical filter, comprising a first mirror; a second mirror located over the first mirror; a driving body located over the first mirror, and having both ends fixed to the first mirror through a spacer; a plurality of electrodes, each formed on both ends of the driving body; a rod structure connecting a center of the driving body and the second mirror; a plurality of fixing means, each fixed to the first mirror at both sides of the rod structure through the spacer; and a plurality of elastic bodies connecting the rod structure with the plurality of fixing means and acting as a rotational axis. And the mirror is driven by the rod structure acting as a lever that has an elastic body as a rotational axis, when warping is generated by electro-thermal expansion, electromagnetic force or external force. Thereby the mirror can be driven in the larger wavelength tunable range and the low power consumption.

摘要翻译： 提供了一种法布里 - 珀罗型波长可调谐滤光器，包括第一反射镜; 位于第一镜上的第二镜; 位于所述第一反射镜上方的驱动体，并且其两端通过间隔件固定到所述第一反射镜; 多个电极，各自形成在所述驱动体的两端; 连接驱动体的中心和第二反射镜的杆结构; 多个固定装置，每个固定装置通过间隔件固定到杆结构的两侧的第一反射镜; 以及多个弹性体，其将所述杆结构与所述多个固定装置连接并用作旋转轴线。 并且当由作为电热膨胀，电磁力或外力产生翘曲时，作为具有弹性体作为旋转轴的杠杆的杆结构驱动反射镜。 从而可以在更大的波长可调范围和低功耗范围内驱动反射镜。

公开(公告)号：US07171177B2

公开(公告)日：2007-01-30

申请号：US11024050

申请日：2004-12-29

申请人： Duck Gun Park ,  Sung Weon Kang ,  Chang Auck Choi

发明人： Duck Gun Park ,  Sung Weon Kang ,  Chang Auck Choi

IPC分类号： H04B1/18

CPC分类号： H04B13/005

摘要： Provided is to a communication apparatus and method using a human body as a medium, in which secure/normal data signals are transmitted/received to the inside and outside of a human body respectively, through at least two different frequency channels classified according to a predetermined reference value, to thereby efficiently use a frequency based on a physical characteristic of a channel and increase a data transmission rate while maintaining security.

摘要翻译： 提供了一种使用人体作为介质的通信装置和方法，其中通过根据预定的分类的至少两个不同的频率信道，将安全/正常数据信号分别发送/接收到人体内部和外部 从而有效地使用基于信道的物理特性的频率并且在保持安全性的同时提高数据传输速率。