CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER HAVING NANOPILLAR STRUCTURE AND METHOD OF FABRICATING THE SAME
    22.
    发明申请
    CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER HAVING NANOPILLAR STRUCTURE AND METHOD OF FABRICATING THE SAME 审中-公开
    具有纳米结构的电容式微型超声波传感器及其制造方法

    公开(公告)号:US20160045935A1

    公开(公告)日:2016-02-18

    申请号:US14686459

    申请日:2015-04-14

    CPC classification number: B06B1/0292 B81B7/008 B81C1/00031

    Abstract: Example embodiments relate to a capacitive micromachined ultrasonic transducer (CMUT) having a nanopillar structure and a method of fabricating the same. The CMUT may include a conductive device substrate, a support defining a plurality of cavities corresponding to elements on the device substrate, a membrane on the support to form the plurality of cavities, an upper electrode on the membrane, and a plurality of nanopillars on at least one of the membrane and the device substrate exposed to the plurality of cavities.

    Abstract translation: 示例实施例涉及具有纳米柱结构的电容微机械超声换能器(CMUT)及其制造方法。 CMUT可以包括导电器件衬底,限定对应于器件衬底上的元件的多个空腔的支撑件,支撑件上的膜以形成多个空腔,膜上的上电极以及在其上的多个纳米柱 膜和装置基板中的至少一个暴露于多个空腔。

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