公开(公告)号：US20210316301A1

公开(公告)日：2021-10-14

申请号：US17357335

申请日：2021-06-24

Applicant: Shanghai Tianma Micro-Electronics Co., Ltd.

Inventor： Wei Li ,  Baiquan Lin ,  Kerui Xi ,  Linzhi Wang ,  Zhenyu Jia

IPC: B01L3/00

Abstract: Provided are a microfluidic apparatus and a manufacturing method thereof. The microfluidic apparatus includes a microfluidic substrate including a base substrate, an electrode array layer located on the base substrate, and a hydrophobic layer, where the electrode array layer includes a plurality of electrodes arranged in an array; and a microfluidic structure layer including at least one microfluidic channel; where the microfluidic substrate is configured to apply a voltage to each of the plurality of electrodes according to the at least one microfluidic channel to drive a droplet in each of the at least one microfluidic channels to move.