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公开(公告)号：US08813363B2
公开(公告)日：2014-08-26
申请号：US12722843
申请日：2010-03-12
申请人： Jae-chang Lee , Jae-woo Chung , Kyo-yool Lee , Chang-seung Lee , Sung-gyu Kang
发明人： Jae-chang Lee , Jae-woo Chung , Kyo-yool Lee , Chang-seung Lee , Sung-gyu Kang
CPC分类号： B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1628 , B41J2/1629 , Y10T29/42 , Y10T29/49401
摘要： A method of manufacturing a piezoelectric inkjet printhead includes processing a lower silicon-on-insulator substrate having a sequentially stacked structure with a first silicon layer, an intervening oxide layer, and a second silicon layer, processing the lower silicon-on-insulator substrate by etching the second silicon layer to form a manifold, a plurality of pressure chambers arranged along at least one side of the manifold and connected with the manifold, and a plurality of dampers connected with the pressure chambers, and by etching the first silicon layer and the intervening oxide layer to form a plurality of vertical nozzles through the first silicon layer and the intervening oxide layer to corresponding ones of the plurality of dampers, stacking and bonding an upper substrate on the lower substrate, reducing the upper substrate to a predetermined thickness, and forming a piezoelectric actuator on the upper substrate.
摘要翻译： 一种制造压电喷墨打印头的方法包括：通过第一硅层，中间氧化物层和第二硅层处理具有顺序层叠结构的下硅绝缘体上基板，通过以下方式处理下硅绝缘体上基板： 蚀刻所述第二硅层以形成歧管，沿所述歧管的至少一侧布置并与所述歧管连接的多个压力室以及与所述压力室连接的多个阻尼器，并且通过蚀刻所述第一硅层和所述第二硅层 形成多个垂直喷嘴，通过第一硅层和中间氧化物层到多个阻尼器中的相应的阻尼器，堆叠并结合下基板上的上基板，将上基板还原成预定厚度;以及 在上基板上形成压电致动器。
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公开(公告)号：US07891064B2
公开(公告)日：2011-02-22
申请号：US11768293
申请日：2007-06-26
申请人： Sung-gyu Kang , Young-ki Hong , Jae-woo Chung , Se-young Oh
发明人： Sung-gyu Kang , Young-ki Hong , Jae-woo Chung , Se-young Oh
CPC分类号： B41J2/14233 , B41J2/055 , B41J2/161 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1642 , B41J2002/14403 , B41J2002/14419 , B41J2202/03 , B41J2202/11 , Y10T29/42
摘要： A piezoelectric inkjet head and a method of manufacturing the piezoelectric inkjet head. The piezoelectric inkjet head includes three single crystal silicon substrates bonded to each other. An upper substrate includes an ink inlet, a plurality of pressure chambers, and a plurality of piezoelectric actuators, a middle substrate includes a manifold, a plurality of restrictors, and a plurality of first dampers, and a lower substrate includes a plurality of nozzles. The middle substrate also includes a membrane that is formed under the manifold to mitigate a rapid pressure change in the manifold and if formed of a material different from the material used for forming the middle substrate. A cavity located under the membrane and at least one venting channel that connects the cavity to the outside are formed in the middle substrate or the lower substrate. Due to the above configuration, the membrane having flexibility mitigates a rapid pressure change in the manifold caused by backflow of ink, and thus, cross-talk between adjacent pressure chambers during ink ejection can be effectively prevented.
摘要翻译： 压电喷墨头和压电喷墨头的制造方法。 压电喷墨头包括彼此结合的三个单晶硅衬底。 上基板包括墨入口，多个压力室和多个压电致动器，中间基板包括歧管，多个限流器和多个第一阻尼器，下基板包括多个喷嘴。 中间基板还包括形成在歧管下方的膜，以减轻歧管中的快速压力变化，并且如果由不同于用于形成中间基板的材料形成的材料形成。 在中间基板或下基板中形成位于膜下方的空腔和将空腔连接到外部的至少一个通气通道。 由于上述结构，具有柔性的膜减轻了由于油墨的回流引起的歧管中的快速压力变化，因此可以有效地防止在喷墨期间相邻压力室之间的串扰。
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公开(公告)号：US09153487B2
公开(公告)日：2015-10-06
申请号：US13601658
申请日：2012-08-31
申请人： Seung-ho Lee , Young-ki Hong , Sung-gyu Kang , Joong-hyuk Kim , Jae-woo Chung
发明人： Seung-ho Lee , Young-ki Hong , Sung-gyu Kang , Joong-hyuk Kim , Jae-woo Chung
IPC分类号： H01L21/285 , H01L21/768 , H01L21/311 , H01L27/12
CPC分类号： H01L21/76885 , H01L21/31127 , H01L21/76814 , H01L21/76822 , H01L21/76879 , H01L27/124 , H01L27/1292
摘要： A method of forming a wiring may include forming a first wire on a substrate; forming a material layer on the substrate, except on the first wire; forming a surface treatment film on the material layer; and forming a second wire on the first wire. The surface treatment film has physical properties opposite to the first wire. A method of forming a wiring may include forming a first wire on a substrate; forming a material layer on the substrate and the first wire; removing a portion of the material layer from the first wire; forming a surface treatment film on the material layer and the first wire; removing a portion of the surface treatment film from the first wire; and forming a second wire on the first wire. A thickness of the material layer on the substrate is greater than a thickness of the first wire on the substrate.
摘要翻译： 形成布线的方法可以包括在基板上形成第一布线; 在所述基板上形成除了所述第一线之外的材料层; 在所述材料层上形成表面处理膜; 以及在所述第一线上形成第二线。 表面处理膜具有与第一丝相反的物理性质。 形成布线的方法可以包括在基板上形成第一布线; 在所述基板和所述第一线上形成材料层; 从所述第一丝线去除所述材料层的一部分; 在所述材料层和所述第一线上形成表面处理膜; 从所述第一丝线去除所述表面处理膜的一部分; 以及在所述第一线上形成第二线。 基板上的材料层的厚度大于基板上的第一布线的厚度。
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公开(公告)号：US09050793B2
公开(公告)日：2015-06-09
申请号：US12107133
申请日：2008-04-22
申请人： Jae-woo Chung , Young-ki Hong , Sung-gyu Kang
发明人： Jae-woo Chung , Young-ki Hong , Sung-gyu Kang
CPC分类号： B41J2/06 , B41J2/14 , B41J2/14233 , B41J2202/09
摘要： An inkjet printing device includes a flow path plate comprising a manifold to supply ink, a pressure chamber filled with the ink supplied from the manifold, and a nozzle via which the ink is ejected, a piezoelectric actuator which is disposed on a top surface of the flow path plate and includes a lower electrode, a piezoelectric layer, and an upper electrode that are stacked sequentially, a first electrostatic electrode to generate an electrostatic field, and a second electrostatic electrode which is disposed a predetermined distance apart from a bottom surface of the flow path plate to generate the electrostatic field between the first electrostatic electrode and the second electrostatic electrode.
摘要翻译： 喷墨打印装置包括流路板，该流路板包括用于供应墨水的歧管，填充有从歧管供应的墨的压力室和喷射墨水的喷嘴，压电致动器，设置在喷嘴的顶表面上 流路板，并且包括依次堆叠的下电极，压电层和上电极，产生静电场的第一静电电极和与所述第一静电电极的底表面隔开设置的第二静电电极 流路板以产生第一静电电极和第二静电电极之间的静电场。
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公开(公告)号：US09018036B2
公开(公告)日：2015-04-28
申请号：US13448438
申请日：2012-04-17
申请人： Joong-hyuk Kim , Sung-gyu Kang , Seung-ho Lee , Jae-woo Chung , Young-ki Hong
发明人： Joong-hyuk Kim , Sung-gyu Kang , Seung-ho Lee , Jae-woo Chung , Young-ki Hong
CPC分类号： B41J2/16 , B41J2/1626 , B41J2/1631
摘要： A method of forming patterns on a substrate, the method including: placing a mask having an opening defining a portion of one surface of a substrate on which patterns are to be formed on the substrate; forming a first modification layer in the opening by ejecting a surface modification ink onto a surface of the substrate through the opening; ejecting a target ink having droplets of sizes larger than those of a surface modification ink such that the target ink is distributed on the first modification layer in the opening; and removing the mask.
摘要翻译： 一种在基板上形成图案的方法，所述方法包括：将具有限定要在其上形成有图案的基板的一个表面的一部分的一部分的开口的掩模放置在基板上; 通过所述开口将表面改性油墨喷射到所述基板的表面上，在所述开口中形成第一改质层; 喷射具有大于表面改性油墨的尺寸的液滴的目标油墨，使得目标油墨分布在开口中的第一改质层上; 并取下面罩。
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公开(公告)号：US08888244B2
公开(公告)日：2014-11-18
申请号：US13477383
申请日：2012-05-22
申请人： Sung-gyu Kang , Young-ki Hong , Joong-hyuk Kim , Seung-ho Lee , Jae-woo Chung , Yong-wan Jin
发明人： Sung-gyu Kang , Young-ki Hong , Joong-hyuk Kim , Seung-ho Lee , Jae-woo Chung , Yong-wan Jin
IPC分类号： B41J2/14
CPC分类号： B41J2/14209 , B41J2/162 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1631
摘要： A printing apparatus includes a first nozzle substrate having a first tapered nozzle unit aligned with a pressure chamber and a second nozzle substrate having a second tapered nozzle unit aligned with the first tapered nozzle unit and attached to the bottom of the first nozzle substrate.
摘要翻译： 打印装置包括：第一喷嘴基板，具有与压力室对准的第一锥形喷嘴单元和具有与第一锥形喷嘴单元对准并附接到第一喷嘴基板的底部的第二锥形喷嘴单元的第二喷嘴基板。
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公开(公告)号：US20130106942A1
公开(公告)日：2013-05-02
申请号：US13448438
申请日：2012-04-17
申请人： Joong-hyuk Kim , Sung-gyu Kang , Seung-ho Lee , Jae-woo Chung , Young-ki Hong
发明人： Joong-hyuk Kim , Sung-gyu Kang , Seung-ho Lee , Jae-woo Chung , Young-ki Hong
IPC分类号： B41J2/015
CPC分类号： B41J2/16 , B41J2/1626 , B41J2/1631
摘要： A method of forming patterns on a substrate, the method including: placing a mask having an opening defining a portion of one surface of a substrate on which patterns are to be formed on the substrate; forming a first modification layer in the opening by ejecting a surface modification ink onto a surface of the substrate through the opening; ejecting a target ink having droplets of sizes larger than those of a surface modification ink such that the target ink is distributed on the first modification layer in the opening; and removing the mask.
摘要翻译： 一种在基板上形成图案的方法，所述方法包括：将具有限定要在其上形成有图案的基板的一个表面的一部分的一部分的开口的掩模放置在基板上; 通过所述开口将表面改性油墨喷射到所述基板的表面上，在所述开口中形成第一改质层; 喷射具有大于表面改性油墨的尺寸的液滴的目标油墨，使得目标油墨分布在开口中的第一改质层上; 并取下面罩。
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公开(公告)号：US20110141195A1
公开(公告)日：2011-06-16
申请号：US12801616
申请日：2010-06-17
申请人： Sung-gyu Kang , Jae-Woo Chung , Young-Ki Hong
发明人： Sung-gyu Kang , Jae-Woo Chung , Young-Ki Hong
CPC分类号： B41J2/1642 , B41J2/1433 , B41J2/162 , B41J2/1628 , B41J2/1629 , B41J2/1631
摘要： Provided is a nozzle plate and methods of manufacturing the nozzle plate. The nozzle plate may include a substrate having a nozzle. The nozzle plate may also include a permittivity reducing area in an upper portion of the substrate around the nozzle, wherein the permittivity reducing area includes a plurality of porosities and a plurality of walls between the plurality of porosities. Additionally, the nozzle plate may include a protection layer on the substrate, wherein the protection layer covers the plurality of porosities and the plurality of walls.
摘要翻译： 提供喷嘴板和制造喷嘴板的方法。 喷嘴板可以包括具有喷嘴的基板。 喷嘴板还可以包括在喷嘴周围的基板的上部中的介电常数降低区域，其中介电常数降低区域包括多个孔隙和多个孔隙之间的多个壁。 此外，喷嘴板可以在基板上包括保护层，其中保护层覆盖多个孔隙和多个壁。
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公开(公告)号：US20070171260A1
公开(公告)日：2007-07-26
申请号：US11468954
申请日：2006-08-31
申请人： Jae-chang Lee , Jae-woo Chung , Kyo-yool Lee , Chang-seung Lee , Sung-gyu Kang
发明人： Jae-chang Lee , Jae-woo Chung , Kyo-yool Lee , Chang-seung Lee , Sung-gyu Kang
IPC分类号： B41J2/045
CPC分类号： B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1628 , B41J2/1629 , Y10T29/42 , Y10T29/49401
摘要： A piezoelectric inkjet printhead including an upper substrate formed of a single crystal silicon substrate or an SOI substrate and having an ink inlet therethrough, and a lower substrate formed of an SOI substrate having a sequentially stacked structure with a first silicon layer, an intervening oxide layer, and a second silicon layer in which a manifold, pressure chambers, and dampers are formed in the second silicon layer by wet or dry etching, and nozzles are formed through the intervening oxide layer and the first silicon layer by dry etching, and a method of manufacturing the same.
摘要翻译： 一种压电喷墨打印头，包括由单晶硅衬底或SOI衬底形成的上衬底，并且具有墨入口，以及由具有第一硅层的顺序层叠结构的SOI衬底形成的下衬底，中间氧化物层 以及通过湿法或干蚀刻在第二硅层中形成歧管，压力室和阻尼器的第二硅层，并且通过干法蚀刻形成穿过中间氧化物层和第一硅层的喷嘴，以及方法 的制造相同。
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公开(公告)号：US08678552B2
公开(公告)日：2014-03-25
申请号：US13093409
申请日：2011-04-25
申请人： Sung-gyu Kang
发明人： Sung-gyu Kang
CPC分类号： B41J2/1433 , B41J2/162 , B41J2/1628 , B41J2/1631
摘要： A nozzle plate including protruding nozzles and a method of manufacturing the nozzle plate. The nozzle plate may include a body unit and at least one nozzle protruding from the body unit. The at least one nozzle may include an exit part having a constant cross-sectional area and a damper part having a cross-sectional area that decreases in a direction toward the exit part, wherein the damper part of the at least one nozzle includes a plurality of inner wall surfaces having different angles of inclination.
摘要翻译： 包括突出喷嘴的喷嘴板和制造喷嘴板的方法。 喷嘴板可以包括主体单元和从主体单元突出的至少一个喷嘴。 所述至少一个喷嘴可以包括具有恒定横截面积的出口部分和具有在朝向出口部分的方向上减小的横截面积的阻尼部分，其中所述至少一个喷嘴的阻尼部分包括多个 的内壁表面具有不同的倾斜角。
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