公开(公告)号：US20200158960A1

公开(公告)日：2020-05-21

申请号：US16654623

申请日：2019-10-16

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Feng-Wei KUO ,  Lan-Chou CHO ,  Huan-Neng CHEN ,  Chewn-Pu JOU

IPC: G02B6/34 ,  G02B6/124 ,  G02B6/122 ,  G02B6/02

Abstract: Disclosed are grating couplers having a high coupling efficiency for optical communications. In one embodiment, an apparatus for optical coupling is disclosed. The apparatus includes: a substrate; a grating coupler comprising a plurality of coupling gratings over the substrate, wherein each of the plurality of coupling gratings extends in a first lateral direction and has a cross-section having a middle-raised shape in a second lateral direction, wherein the first and second lateral directions are parallel to a surface of the substrate and perpendicular to each other in a grating plane; and a cladding layer comprising an optical medium, wherein the cladding layer is filled in over the grating coupler.